# US 8,784,965 B2 · Method of creating two-sided template from a single recorded master > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,784,965 B2 - Document ID: US8784965B2 - Status: Granted - Kind: B2 - Application number: 13/197,059 - Filed: 2011-08-03 - Published: 2012-12-06 - Granted: 2014-07-22 - Earliest claimed: 2011-05-31 - Assignees: Seagate Technology LLC - Applicants: David Kuo; Gennady Gauzner; Kim Yang Lee - Inventors: David Kuo; Gennady Gauzner; Kim Yang Lee - Web page: https://patentgrep.com/patent/US8784965B2 ## Abstract The embodiments disclose a method of creating two-sided template from a single recorded master, including fabricating a first template using a single recorded master, wherein the first template has a changed duty cycle and an unchanged servo arc orientation, creating a replicate of the first template, wherein the replicate has a mirrored servo arc orientation and a changed duty cycle and fabricating a second template using the replicate to produce a predetermined mirrored servo arc orientation and a predetermined duty cycle for imprinting on a second side of a patterned stack. ## Claims ### Claim 1 A method of creating two-sided template from a single recorded master, comprising: fabricating a side A first template using a single recorded side A master, wherein the side A first template has a changed duty cycle and an unchanged servo arc orientation; creating a replicate of the first template, wherein the replicate has a mirrored servo arc orientation and a changed duty cycle; fabricating a side B second template using the replicate to produce a predetermined mirrored servo arc orientation and a predetermined duty cycle; and using a mix of reverse tone, imprint and etch processes to create the side A first template etched substrate and the side B second template etched substrate for use in fabricating a two-sided patterned stack. ### Claim 2 (depends on 1) The method of claim 1, further comprising using a template design to form a first side template as the single recorded master. ### Claim 3 (depends on 1) The method of claim 1, wherein the first template is fabricated using a reverse tone process with one of a chromium lift off process or a spin-on-glass over a negative resist process. ### Claim 4 (depends on 1) The method of claim 1, wherein the first template is fabricated using a direct etching process. ### Claim 5 (depends on 1) The method of claim 1, wherein the replicate is created using an imprint lithography process to create a mirrored servo arc orientation. ### Claim 6 (depends on 1) The method of claim 1, wherein the second side template is fabricated using a reverse tone process with one of a direct etch, chromium lift off or spin-on-glass over a negative resist. ### Claim 7 (depends on 1) The method of claim 1, further comprising the fabrication of templates using a process to mix reverse tone and imprint processes to create a family of first side and second side templates for use in the production of two-sided patterned stacks. ### Claim 8 (depends on 1) The method of claim 1, wherein the servo arc orientation is mirrored using the replicate to fabricate a second side template using a reverse tone process. ### Claim 9 (depends on 1) The method of claim 1, wherein the second side template is fabricated from a single recorded master to reduce the time for mastering templates for the fabrication of patterned stacks. ### Claim 10 (depends on 1) The method of claim 1, further comprising using two-sided templates for the fabrication of two-sided patterned stacks using a single recorded master. ### Claim 11 (depends on 1) The method of claim 1, wherein the fabricating of a second template with predetermined mirrored servo arc orientation and predetermined duty cycle is performed from a single recorded master for use in the fabrication of two-sided patterned stacks. ### Claim 12 An apparatus, comprising: means for fabricating a side A first template using a single recorded side A master to create a replicate; means for creating a replicate of the side A first template to mirror the servo arc orientation and reverse the duty cycle; means for fabricating a side B second template using the replicate to produce a predetermined mirrored servo arc orientation and a predetermined duty cycle of the single recorded master; and means for using a mix of reverse tone, imprint and etch processes to create the side A first template etched substrate and the side B second template etched substrate for use in fabricating two-sided patterned stacks. ### Claim 13 The apparatus of 12, further comprising means for using a single recorded master to create a first template using a reverse tone process. ### Claim 14 The apparatus of 12, further comprising means for creating a replicate of the first template using imprint lithography. ### Claim 15 The apparatus of 12, further comprising means for using the replicate to fabricate a second side template using a reverse tone process to produce the predetermined mirrored servo arc orientation and predetermined duty cycle of the single recorded master. ### Claim 16 The apparatus of 12, further comprising means for mixing reverse tone and imprint lithography processes to create a family of first side and second side templates for use in the two-sided fabrication of patterned stacks. ### Claim 17 A second side template, comprising: a predetermined mirrored servo arc orientation; and a predetermined duty cycle, wherein the predetermined mirrored servo arc orientation and the predetermined duty cycle are created using a single recorded master for two-sided fabrication of patterned stacks. ### Claim 18 (depends on 17) The second side template of claim 17, further comprising using a reverse tone process to fabricate a first template. ### Claim 19 (depends on 17) The second side template of claim 17, further comprising using a mixed process including a reverse tone process to fabricate the first template and an imprint lithography process to fabricate a replicate of the first template. ### Claim 20 (depends on 19) The second side template of claim 19, wherein the mixed process creates a family of first side and second side templates for use in the two-sided fabrication of patterned stacks.