# US 8,784,621 B1 · Wafer carrier comprising a variable aperture shield

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- Number: US 8,784,621 B1
- Document ID: US8784621B1
- Status: Granted
- Kind: B1
- Application number: 13/250,070
- Filed: 2011-09-30
- Granted: 2014-07-22
- Earliest claimed: 2011-06-07
- Assignees: DECA Technologies Inc.
- Applicants: Rico Sto. Domingo
- Inventors: Rico Sto. Domingo
- Web page: https://patentgrep.com/patent/US8784621B1

## CPC

- C25D 17/06: Suspending or supporting devices for articles to be coated
- C25D 17/001: {Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells}
- H10P 72/13: {Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements}
- H10P 72/18: {characterised by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports}
- C25D: PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

A wafer carrier is described. In one embodiment, the wafer carrier includes a variable aperture shield.

## Claims

### Claim 1

A wafer carrier, comprising:
a variable aperture shield, the variable aperture shield further comprising:
a cover plate,
a fixed base plate, and
a plurality of fins forming a variable aperture of the variable aperture shield, the plurality of fins mounted on the fixed base plate and disposed between the fixed base plate and the cover plate, wherein at least one of the plurality of fins is configured to move towards or away from a center of the variable aperture when the cover plate is moved such that at least one of the plurality of fins overlaps an adjacent fin and changes a diameter of the variable aperture.

### Claim 2 (depends on 1)

The wafer carrier of claim 1 wherein the movement comprises a rotation of at least one of the plurality of the fins.

### Claim 3 (depends on 2)

The wafer carrier of claim 2 wherein the rotation of the fins comprises a simultaneous rotation of the plurality of fins.

### Claim 4 (depends on 1)

The wafer carrier of claim 1 wherein the movement of the plurality of fins comprises a convergence of the plurality of fins towards the center of the variable aperture.

### Claim 5 (depends on 1)

The wafer carrier of claim 1 wherein each of the plurality of fins comprises a pivot point configured to move the fin with respect to the fixed base plate.

### Claim 6 (depends on 1)

The wafer carrier of claim 1 wherein each of the plurality of fins comprises a lever point configured to move the fin towards or away from the center of the variable aperture.

### Claim 7 (depends on 1)

The wafer carrier of claim 1 wherein the variable aperture shield further comprising a cover plate mounted onto the fixed base plate.

### Claim 8 (depends on 7)

The wafer carrier of claim 7 wherein the cover plate is clamped onto the fixed base plate to align a center of the cover plate with a center of the fixed base plate upon movement of the cover plate.

### Claim 9 (depends on 7)

The wafer carrier of claim 7 wherein the plurality of fins are positioned between the fixed base plate and the cover plate.

### Claim 10 (depends on 7)

The wafer carrier of claim 7 wherein the cover plate is configured to move the lever points of the fin.

### Claim 11 (depends on 7)

The wafer carrier of claim 7, wherein the cover plate comprises a handle configured to move the cover plate to change a diameter of the variable aperture, the handle further configured to be disposed outside a plating bath.