# US 8,784,599 B2 · Laser induced thermal imaging apparatus and method of manufacturing organic light emitting display device using the same

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- Number: US 8,784,599 B2
- Document ID: US8784599B2
- Status: Granted
- Kind: B2
- Application number: 12/929,460
- Filed: 2011-01-26
- Published: 2011-07-28
- Granted: 2014-07-22
- Earliest claimed: 2010-01-27
- Assignees: Samsung Display Co., Ltd.
- Applicants: Jin-Won Sun; Sok-Won Noh
- Inventors: Jin-Won Sun; Sok-Won Noh
- Web page: https://patentgrep.com/patent/US8784599B2

## CPC

- B41M 5/38221: {Apparatus features}
- B32B 37/025: {Transfer laminating}
- B32B 37/182: {one or more of the layers being plastic}
- B32B 38/18: Handling of layers or the laminate
- B32B 2309/68: Vacuum
- B32B 2310/0843: using laser
- B32B 2457/206: Organic displays, e.g. OLED
- H10K 71/18: using non-liquid printing techniques, e.g. thermal transfer printing from a donor sheet
- Y10T 156/17: Surface bonding means and/or assemblymeans with work feeding or handling means
- Y10T 156/1788: Work traversing type and/or means applying work to wall or static structure
- Y10T 156/1793: Grip or clamp for web end
- B41M: PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING, (correction of typographical errors B41J; processes for applying transfer pictures or the like B44C1/16; fluid media for correction of typographical errors by coating C09D10/00; printing textiles D06P)
- B32B: LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

A laser induced thermal imaging (LITI) apparatus includes a stage configured to support an acceptor substrate and a supporting portion configured to support a donor film and to move the donor film up and down relative to the stage so as to adjust a distance between the acceptor substrate and the donor film. The donor film includes a thin film to be disposed on the acceptor substrate. The stage includes a discharging outlet through which gas between the acceptor substrate and the donor film is discharged to the outside. The LITI apparatus may be used to laminate a film on an acceptor substrate including an organic light emitting display device.

## Claims

### Claim 1

A laser induced thermal imaging (LITI) apparatus, comprising:
a stage configured to support an acceptor substrate; and
a supporting portion configured to support a donor film and to move the donor film up and down relative to the stage so as to adjust a distance between the acceptor substrate and the donor film, the donor film including a thin film to be disposed on the acceptor substrate,
wherein the stage includes a discharging outlet through which gas between the acceptor substrate and the donor film is discharged to the outside, and
wherein the supporting portion includes:
a first member supporting a first end portion of the donor film; and
a second member supporting a second end portion of the donor film, opposite the first end portion of the donor film, the first member and the second member being individually moveable up and down relative to the stage.

### Claim 2 (depends on 1)

The LITI apparatus as claimed in claim 1, wherein the first member comprises a first fixing portion that fixes the first end portion of the donor film and a first connection portion that moves the first fixing portion up and down relative to the stage.

### Claim 3 (depends on 1)

The LITI apparatus as claimed in claim 1, wherein the second member comprises a second fixing portion that fixes the second end portion of the donor film and a second connection portion that moves the second fixing portion up and down relative to the stage.

### Claim 4 (depends on 1)

The LITI apparatus as claimed in claim 1, wherein, during a delamination process of the donor film and the acceptor substrate, the first member is configured to lift the first end portion of the donor film to separate the first end portion from the acceptor substrate while the second member is stationary.

### Claim 5 (depends on 1)

The LITI apparatus as claimed in claim 1, wherein the supporting portion is configured to separate the donor film from the acceptor substrate before a lamination process, and the discharging outlet is configured to discharges gas existing in a space between the acceptor substrate and the donor film to the outside.

### Claim 6 (depends on 1)

The LITI apparatus as claimed in claim 1, wherein the supporting portion is configured to hold the donor film taut while discharging the gas to the outside.

### Claim 7 (depends on 6)

The LITI apparatus as claimed in claim 6, wherein the supporting portion is configured to pull the first and second end portions of the donor film in opposite directions.

### Claim 8 (depends on 1)

The LITI apparatus as claimed in claim 1, further comprising a pressurizing member configured to contact the donor film and apply pressure to the donor film toward the acceptor substrate.

### Claim 9 (depends on 8)

The LITI apparatus as claimed in claim 8, wherein, during lamination, the pressurizing member adheres the donor film to the acceptor substrate by applying pressure to the donor film toward the acceptor substrate.

### Claim 10 (depends on 8)

The LITI apparatus as claimed in claim 8, wherein, during delamination, the supporting portion is configured to lift the first end portion of the donor film and, as the supporting portion lifts the first end portion of the donor film, the pressurizing member is configured to apply pressure to the donor film while moving along from the first end portion of the donor film to the second end portion.

### Claim 11 (depends on 8)

The LITI apparatus as claimed in claim 8, wherein the pressurizing member includes a roller.

### Claim 12

A method of manufacturing an organic light emitting display device using a laser induced thermal imaging (LITI) method, the method comprising:
disposing an acceptor substrate on a stage;
disposing a donor film separate from the acceptor substrate on first and second members of a supporting portion, the first and second members being individually moveable up and down relative to the stage and configured to support first and second end portions of the donor film, and the donor film including a film to be disposed on the acceptor substrate;
removing gas between the acceptor substrate and the donor film;
laminating the donor film on the acceptor substrate;
transferring the film of the donor film onto the acceptor substrate; and
delaminating the donor film from the acceptor substrate.

### Claim 13 (depends on 1)

The method as claimed in claim 1, further comprising maintaining a uniform distance between the acceptor substrate and the donor film while removing the gas.

### Claim 14 (depends on 13)

The method as claimed in claim 13, wherein maintaining the uniform distance includes holding the donor film taut.

### Claim 15 (depends on 12)

The method as claimed in claim 12, wherein laminating further comprises applying pressure to the donor film toward the acceptor substrate.

### Claim 16 (depends on 12)

The method as claimed in claim 12, wherein laminating includes:
adhering the first end portion of the donor film to the acceptor substrate; and
then adhering the second end portion of the donor film to the acceptor substrate.

### Claim 17 (depends on 12)

The method as claimed in claim 12, wherein transferring includes irradiating the donor film.

### Claim 18 (depends on 12)

The method as claimed in claim 12, wherein delaminating includes lifting the first end portion of the donor film and applying pressure along the donor film from the first end portion to the second end portion of the donor film.

### Claim 19

A method of manufacturing an organic light emitting display device using a laser induced thermal imaging (LITI) method, the method comprising:
disposing an acceptor substrate on a stage;
disposing a donor film separate from the acceptor substrate, the donor film including a film to be disposed on the acceptor substrate;
maintaining a uniform distance between the acceptor substrate and the donor film while removing gas between the acceptor substrate and the donor film, wherein maintaining the uniform distance includes holding the donor film taut, by pulling a first end portion of the donor film and a second end portion, opposite the first end portion, in opposite directions;
laminating the donor film on the acceptor substrate;
transferring the film of the donor film onto the acceptor substrate; and
delaminating the donor film from the acceptor substrate.
