# US 8,784,565 B2 · Manufacturing apparatus for depositing a material and an electrode for use therein > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,784,565 B2 - Document ID: US8784565B2 - Status: Granted - Kind: B2 - Application number: 12/937,927 - Filed: 2009-04-13 - Published: 2011-02-10 - Granted: 2014-07-22 - Earliest claimed: 2008-04-14 - Assignees: Hemlock Semiconductor Corporation - Applicants: David Hillabrand; Theodore Knapp - Inventors: David Hillabrand; Theodore Knapp - Web page: https://patentgrep.com/patent/US8784565B2 ## CPC - C23C 16/4418: {Methods for making free-standing articles (C23C16/01 takes precedence)} - C01B 33/035: by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process - H05B 3/03: Electrodes - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - C01B: NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; {METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C} - H05B: ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL ## Abstract The present invention relates to a manufacturing apparatus for deposition of a material on a carrier body and an electrode for use with the manufacturing apparatus. Typically, the carrier body has a first end and a second end spaced from each other. A socket is disposed at each of the end of the carrier body. The manufacturing apparatus includes a housing that defines a chamber. At least one electrode is disposed through the housing with the electrode at least partially disposed within the chamber for coupling to the socket. The electrode has an exterior surface having a contact region that is adapted to contact the socket. A contact region coating is disposed on the contact region of the exterior surface of the electrode. The contact region coating has an electrical conductivity of at least 9×106 Siemens/meter and a corrosion resistance that is higher than silver in a galvanic series that is based upon room temperature sea water as an electrolyte. ## Claims ### Claim 1 A manufacturing apparatus for deposition of a material on a carrier body having a first end and a second end spaced from each other with a socket disposed at each end of the carrier body, said apparatus comprising: a housing defining a chamber; an inlet defined through said housing for introducing a gas into the chamber; an outlet defined through said housing for exhausting the gas from the chamber; at least one electrode including a shaft having a first end and a second end with a head disposed on one of said ends of said shaft for coupling with the socket with said electrode having an exterior surface having a contact region adapted to contact the socket, said electrode disposed through said housing with said electrode at least partially disposed within the chamber for coupling with the socket; a power supply device coupled to said electrode for providing an electrical current to said electrode; a contact region coating disposed on said contact region of said electrode for maintaining thermal conductivity between said electrode and the socket, said contact region coating having an electrical conductivity of at least 9×106 Siemens/meter and corrosion resistance higher than silver in a galvanic series based upon room temperature sea water as an electrolyte; and an exterior coating different from said contact region coating and disposed on at least one of said head and said shaft outside of said contact region. ### Claim 2 (depends on 1) A manufacturing apparatus as set forth in claim 1 wherein said head comprises copper. ### Claim 3 (depends on 1) A manufacturing apparatus as set forth in claim 1 wherein said exterior surface of said electrode including said contact region coating is at least partially disposed within the chamber. ### Claim 4 (depends on 1) A manufacturing apparatus as set forth in claim 1 wherein said contact region coating comprises at least one of gold, platinum, and palladium. ### Claim 5 (depends on 4) A manufacturing apparatus as set forth in claim 4 wherein said contact region coating further comprises at least one of silver, nickel, and chromium. ### Claim 6 (depends on 5) A manufacturing apparatus as set forth in claim 5 wherein said contact region coating has a thickness of from 0.00254 to 0.254 mm. ### Claim 7 (depends on 5) A manufacturing apparatus as set forth in claim 5 wherein said contact region coating has a thickness of from 0.00508 mm to 0.127 mm. ### Claim 8 (depends on 5) A manufacturing apparatus as set forth in claim 5 wherein said contact region coating has a thickness of from 0.00508 mm to 0.0254 mm. ### Claim 9 (depends on 5) A manufacturing apparatus as set forth in claim 5 wherein said contact region coating has a thickness of from 0.00254 to 0.254 mm. ### Claim 10 (depends on 1) A manufacturing apparatus as set forth in claim 1 wherein said at least one electrode includes a first electrode for receiving the socket at the first end of the carrier body and a second electrode for receiving the socket at the second end of the carrier body. ### Claim 11 An electrode for use with a manufacturing apparatus to deposit a material onto a carrier body having a first end and a second end spaced from each other with a socket disposed at each end of the carrier body, said electrode comprising: a shaft having a first end and a second end; a head disposed on one of said ends of said shaft for coupling with the socket; wherein said head has an exterior surface having a contact region adapted to contact the socket; a contact region coating disposed on said contact region of said electrode for maintaining electrical conductivity between said electrode and the socket, said contact region coating having an electrical conductivity of at least 9×106 Siemens/meter and corrosion resistance higher than silver in a galvanic series based upon room temperature sea water as an electrolyte; and an exterior coating different from said contact region coating and disposed on at least one of said head and said shaft outside of said contact region. ### Claim 12 (depends on 11) An electrode as set forth in claim 11 wherein said head is integral to said shaft. ### Claim 13 (depends on 11) An electrode as set forth in claim 11 wherein said contact region coating comprises at least one of gold, platinum, and palladium. ### Claim 14 (depends on 13) An electrode as set forth in claim 13 wherein said contact region coating further comprises at least one of silver, nickel, and chromium. ### Claim 15 (depends on 13) An electrode as set forth in claim 13 wherein said contact region coating has a thickness of from 0.00254 to 0.254 mm. ### Claim 16 (depends on 13) An electrode as set forth in claim 13 wherein said contact region coating has a thickness of from 0.00508 mm to 0.127 mm. ### Claim 17 (depends on 13) An electrode as set forth in claim 13 wherein said contact region coating has a thickness of from 0.00508 mm to 0.0254 mm. ### Claim 18 (depends on 11) An electrode as set forth in claim 11 wherein said head comprises copper. ### Claim 19 (depends on 11) An electrode as set forth in claim 11 wherein said shaft of said electrode includes a shaft coating different from said contact region coating and disposed on an exterior surface of said shaft. ### Claim 20 (depends on 11) An electrode as set forth in claim 11 wherein said shaft is free from a shaft coating disposed on an exterior surface thereof. ### Claim 21 (depends on 11) An electrode as set forth in claim 11 wherein said contact region coating has a thickness of from 0.00254 to 0.254 mm.