# US 8,784,564 B2 · Film coating apparatus

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- Number: US 8,784,564 B2
- Document ID: US8784564B2
- Status: Granted
- Kind: B2
- Application number: 12/894,121
- Filed: 2010-09-29
- Published: 2011-12-29
- Granted: 2014-07-22
- Earliest claimed: 2010-06-29
- Assignees: Hon Hai Precision Industry Co., Ltd.
- Applicants: Chia-Ling Hsu
- Inventors: Chia-Ling Hsu
- Web page: https://patentgrep.com/patent/US8784564B2

## CPC

- C23C 16/45555: {applied in non-semiconductor technology}
- C23C 16/45525: {Atomic layer deposition [ALD]}
- C23C 16/46: characterised by the method used for heating the substrate (C23C16/48, C23C16/50 take precedence)
- C23C 16/0209: {by heating}
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)

## Abstract

A film coating apparatus for coating a patterned roller using an atomic layer deposition process includes a deposition chamber and a heater. The deposition chamber defines an inlet and an outlet. The inlet is misaligned with the outlet. The heater is received in the deposition chamber. The heater includes a number of coiled filaments each formed into a generally circular loop. The filaments are spaced from each other and surrounds the patterned roller. The filaments are configured for heating the patterned roller.

## Claims

### Claim 1

A film coating apparatus for coating a patterned roller using an atomic layer deposition process, comprising:
a deposition chamber defining an inlet and an outlet and comprising an inner upper surface, an inner lower surface, as first inner side surface, and a second inner side surface connected to each other end-to-end, the inner upper surface facing the inner lower surface, the first inner side surface facing the second inner side surface, the inlet being misaligned with the outlet; and
a heater received in the deposition chamber, the heater comprising a plurality of coiled filaments each being a closed ring, the closed ring defining a through hole in a middle thereof, the filaments being spaced from each other with each filament surrounding the patterned roller, each filament being in contact with the inner upper surface, the first inner side surface, the inner lower surface, and the second inner side surface, the patterned roller extending through all of the through holes of the filaments, the filaments configured for heating the patterned roller.

### Claim 2 (depends on 1)

The film coating apparatus of claim 1, wherein the deposition chamber comprises an upper portion and a bottom portion detachably mounted to the upper portion in an airtight fashion.

### Claim 3 (depends on 2)

The film coating apparatus of claim 2, wherein the upper portion defines the inlet in a side wall thereof, and the bottom portion defines the outlet in a side wall thereof.

### Claim 4 (depends on 1)

The film coating apparatus of claim 1, further comprising two support members configured for supporting the patterned roller in place in the deposition chamber.

### Claim 5 (depends on 4)

The film coating apparatus of claim 4, wherein the patterned roller comprises a cylinder having two circular ends at opposite sides thereof and two protrusions extending from the two circular ends, respectively, each of the support members defines a hole, and the holes of the support members are configured for engagingly receiving the protrusions of the patterned roller, respectively.