# US 8,784,561 B2 · Method of adjusting insulation in a directional solidification furnace > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,784,561 B2 - Document ID: US8784561B2 - Status: Granted - Kind: B2 - Application number: 13/532,096 - Filed: 2012-06-25 - Published: 2012-10-11 - Granted: 2014-07-22 - Earliest claimed: 2011-03-31 - Assignees: Memc Singapore Pte. Ltd. (Uen200614794D) - Applicants: Rituraj Nandan; Benjamin Michael Meyer; Lee William Ferry - Inventors: Rituraj Nandan; Benjamin Michael Meyer; Lee William Ferry - Web page: https://patentgrep.com/patent/US8784561B2 ## CPC - F27D 1/0033: {Linings or walls comprising heat shields, e.g. heat shields} - C30B 11/003: {Heating or cooling of the melt or the crystallised material} - C30B 29/06: Silicon - F27B 14/10: Crucibles - Y10T 29/49718: Repairing - F27D: DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE - C30B: SINGLE-CRYSTAL GROWTH (by using ultra-high pressure, e.g. for the formation of diamonds, B01J3/06); UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL (zone-refining of metals or alloys C22B); PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE (casting of metals, casting of other substances by the same processes or devices B22D; working of plastics B29; modifying the physical structure of metals or alloys C21D, C22F); SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE (for producing semiconductor devices or parts thereof H10); APPARATUS THEREFOR - F27B: FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS - Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION ## Abstract Methods are disclosed for inhibiting heat transfer through lateral sidewalls of a support member positioned beneath a crucible in a directional solidification furnace. The methods include the use of insulation positioned adjacent the lateral sidewalls of the support member. The insulation inhibits heat transfer through the lateral sidewalls of the support member to ensure the one-dimensional transfer of heat from the melt through the support member. ## Claims ### Claim 1 A method of adjusting the position of insulation in a directional solidification furnace, the furnace including a crucible for holding molten silicon, a crucible support for supporting the crucible, the crucible support having a bottom plate, a support member having an upper surface in contact with the bottom plate of the crucible support, the support member having lateral sidewalls, the method comprising: positioning the insulation in a melt position during melting of the silicon in the crucible, wherein the insulation is disposed away from the lateral sidewalls of the support member when in the melt position; and positioning the insulation in a solidification position during solidification of molten silicon in the crucible, wherein the insulation is adjacent the lateral sidewalls of the support member when in the solidification position. ### Claim 2 (depends on 1) The method of claim 1 wherein when in the solidification position, the insulation is in contact with the lateral sidewalls of the support member. ### Claim 3 (depends on 1) The method of claim 1 wherein when in the melt position, the insulation is not in contact with the lateral sidewalls of the support member. ### Claim 4 (depends on 1) The method of claim 1 wherein the insulation is initially placed in the melt position during melting, and thereafter moved to the solidification position during solidification. ### Claim 5 (depends on 1) The method of claim 1 wherein the insulation includes a main insulating member positioned adjacent the lateral sidewalls of the support member when in the solidification position. ### Claim 6 (depends on 5) The method of claim 5 including a secondary insulating member positioned atop the main insulating member and adjacent the crucible support when in the solidification position, the secondary insulating member ensuring a view factor is not present between the support member and other components of the directional solidification furnace. ### Claim 7 (depends on 5) The method of claim 5 wherein the main insulating member is in contact with the lateral sidewalls of the support member when in the solidification position. ### Claim 8 (depends on 6) The method of claim 6 wherein at least a portion of the secondary insulating member is in contact with the crucible support when in the solidification position. ### Claim 9 (depends on 1) The method of claim 1 further comprising the step of moving the insulation between the melt position and the solidification position by an actuator. ### Claim 10 (depends on 6) The method of claim 6 further comprising the step of moving the main insulating member and the secondary insulating member are movable simultaneously by an actuator. ### Claim 11 A method of inhibiting differential heat transfer in a melt plane of a directional solidification furnace, the method comprising in order: providing the directional solidification furnace including a crucible for holding molten silicon, a crucible support for supporting the crucible, the crucible support having a bottom plate, a support member having an upper surface in contact with the bottom plate of the crucible support, the support member having lateral sidewalls; positioning the insulation in a melt position during melting of the silicon in the crucible, wherein the insulation is disposed away from the lateral sidewalls of the support member when in the melt position; and positioning the insulation in a solidification position during solidification of molten silicon in the crucible, wherein the insulation is adjacent the lateral sidewalls of the support member when in the solidification position. ### Claim 12 (depends on 11) The method of claim 11 wherein when in the solidification position, the insulation is in contact with the lateral sidewalls of the support member. ### Claim 13 (depends on 11) The method of claim 11 wherein when in the melt position, the insulation is not in contact with the lateral sidewalls of the support member. ### Claim 14 (depends on 11) The method of claim 11 wherein the insulation includes a main insulating member positioned adjacent the lateral sidewalls of the support member when in the solidification position. ### Claim 15 (depends on 14) The method of claim 14 including a secondary insulating member positioned atop the main insulating member and adjacent the crucible support when in the solidification position, the secondary insulating member ensuring a view factor is not present between the support member and other components of the directional solidification furnace. ### Claim 16 (depends on 15) The method of claim 15 wherein the main insulating member is in contact with the lateral sidewalls of the support member when in the solidification position. ### Claim 17 (depends on 16) The method of claim 16 wherein at least a portion of the secondary insulating member is in contact with the crucible support when in the solidification position. ### Claim 18 (depends on 11) The method of claim 11 further comprising the step of moving the insulation between the melt position and the solidification position by an actuator. ### Claim 19 (depends on 17) The method of claim 17 further comprising the step of moving the main insulating member and the secondary insulating member are movable simultaneously by an actuator.