# US 8,783,837 B2 · Liquid jet head, liquid jet apparatus, and piezoelectric element

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- Number: US 8,783,837 B2
- Document ID: US8783837B2
- Status: Granted
- Kind: B2
- Application number: 13/604,410
- Filed: 2012-09-05
- Published: 2013-04-18
- Granted: 2014-07-22
- Earliest claimed: 2011-09-06
- Assignees: Seiko Epson Corporation
- Applicants: Tetsuya Isshiki; Toshiaki Takahashi
- Inventors: Tetsuya Isshiki; Toshiaki Takahashi
- Web page: https://patentgrep.com/patent/US8783837B2

## CPC

- B41J 2/14201: {Structure of print heads with piezoelectric elements}
- B41J 2/14233: {of film type, deformed by bending and disposed on a diaphragm}
- B41J 2/161: {of film type, deformed by bending and disposed on a diaphragm}
- B41J 2/1623: {bonding and adhesion}
- B41J 2/1629: {wet etching}
- B41J 2/1632: {machining}
- B41J 2/1642: {thin film formation by CVD [chemical vapor deposition]}
- B41J 2/1645: {thin film formation by spincoating}
- B41J 2/1646: {thin film formation by sputtering}
- H10N 30/704: {based on piezoelectric or electrostrictive films or coatings}
- H10N 30/8561: {Bismuth-based oxides}
- B41J 2002/14241: {having a cover around the piezoelectric thin film element}
- H10N 30/078: by sol-gel deposition
- B41J: TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR

## Abstract

[Object] There are provided a liquid jet head and a liquid jet apparatus that each include a piezoelectric element including a piezoelectric layer in which the occurrence of cracks is suppressed, and the piezoelectric element. [Solution] The liquid jet head ejects a liquid from a nozzle aperture. The liquid jet head includes a piezoelectric element including a piezoelectric layer and an electrode provided for the piezoelectric layer. The piezoelectric layer is made of a complex oxide containing bismuth, iron, barium and titanium and having a perovskite structure, and has an average crystal grain diameter of 120 nm or more and 252 nm or less.

## Claims

### Claim 1

A liquid jet head that ejects a liquid from a nozzle aperture, the liquid jet head comprising a piezoelectric element including a piezoelectric layer and electrodes provided for the piezoelectric layer, wherein the piezoelectric layer:
is made of a complex oxide containing bismuth, iron, barium, titanium, and further containing an element selected from manganese, cobalt, and chromium,
has a perovskite structure, and
has an average crystal grain diameter of 120 nm or more and 252 nm or less.

### Claim 2 (depends on 1)

The liquid jet head according to claim 1, wherein the piezoelectric layer is preferentially oriented in the (110) plane.

### Claim 3 (depends on 1)

A liquid jet apparatus comprising the liquid jet head as set forth in claim 1.

### Claim 4

A piezoelectric element comprising a piezoelectric layer and an electrode provided for the piezoelectric layer, wherein the piezoelectric layer:
is made of a complex oxide containing bismuth, iron, barium, titanium, and further containing an element selected from manganese, cobalt, and chromium,
has a perovskite structure, and
has an average crystal grain diameter of 120 nm or more and 252 nm or less.