# US 8,783,836 B2 · Piezoelectric element, liquid ejecting head, and liquid ejecting apparatus

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- Number: US 8,783,836 B2
- Document ID: US8783836B2
- Status: Granted
- Kind: B2
- Application number: 13/315,259
- Filed: 2011-12-08
- Published: 2012-06-14
- Granted: 2014-07-22
- Earliest claimed: 2010-12-09
- Assignees: Seiko Epson Corporation
- Applicants: Xiaoxing Wang
- Inventors: Xiaoxing Wang
- Web page: https://patentgrep.com/patent/US8783836B2

## CPC

- B41J 2/14233: {of film type, deformed by bending and disposed on a diaphragm}
- B41J 2/161: {of film type, deformed by bending and disposed on a diaphragm}
- B41J 2/1628: {dry etching}
- B41J 2/1631: {photolithography}
- B41J 2/1632: {machining}
- B41J 2/1645: {thin film formation by spincoating}
- B41J 2/1646: {thin film formation by sputtering}
- H10N 30/2047: {Membrane type}
- H10N 30/8542: {Alkali metal based oxides, e.g. lithium, sodium or potassium niobates}
- B41J: TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR

## Abstract

A piezoelectric element includes a piezoelectric layer, and an electrode provided to the piezoelectric layer. The piezoelectric layer is configured of a complex oxide having a perovskite structure containing potassium, sodium, and bismuth, niobium, iron, and chromium.

## Claims

### Claim 1

A piezoelectric element comprising:
a piezoelectric layer; and
an electrode provided to the piezoelectric layer,
wherein the piezoelectric layer is configured of a complex oxide having a perovskite structure containing potassium, sodium, and bismuth, niobium, iron, and chromium, wherein the perovskite structure is expressed by the formula ABO3 and potassium, sodium, and bismuth are in the A site and niobium, iron, and chromium are in the B site.

### Claim 2 (depends on 1)

The piezoelectric element according to claim 1, wherein the complex oxide has a mixed crystal including potassium sodium niobate, bismuth ferrate, and bismuth chromate.

### Claim 3 (depends on 1)

The piezoelectric element according to claim 1, wherein the complex oxide has a molar ratio of chromium to niobium (chromium/niobium) of 0.03 or more.

### Claim 4 (depends on 1)

The piezoelectric element according to claim 1, wherein the complex oxide has a molar ratio of chromium to niobium (chromium/niobium) of 0.05 or more and 0.08 or less.

### Claim 5 (depends on 1)

The piezoelectric element according to claim 1, wherein the piezoelectric layer has a thickness of 1 μm or more.

### Claim 6 (depends on 1)

A liquid ejecting head comprising the piezoelectric element according to claim 1.

### Claim 7 (depends on 6)

A liquid ejecting apparatus comprising the liquid ejecting head according to claim 6.