# US 8,783,823 B2 · Maintenance liquid

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- Number: US 8,783,823 B2
- Document ID: US8783823B2
- Status: Granted
- Kind: B2
- Application number: 13/172,312
- Filed: 2011-06-29
- Published: 2012-01-05
- Granted: 2014-07-22
- Earliest claimed: 2010-06-30
- Assignees: FUJIFILM Corporation
- Applicants: Kunihiko Kodama; Kenichi Kodama
- Inventors: Kunihiko Kodama; Kenichi Kodama
- Web page: https://patentgrep.com/patent/US8783823B2

## CPC

- G03F 7/0045: {with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors}
- B82Y 10/00: Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
- B82Y 40/00: Manufacture or treatment of nanostructures
- C11D 3/0063: {Photo- activating compounds}
- C11D 3/2068: {Ethers}
- C11D 3/2093: {Esters; Carbonates}
- C11D 7/263: {Ethers}
- C11D 7/266: {Esters or carbonates}
- G03F 7/0002: {Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping}
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)
- B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- C11D: DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL

## Abstract

Disclosed is a maintenance liquid for property carrying out imprints excellent in patternability. The maintenance liquid for imprints of an ink-jet discharging device comprises a compound comprising an ester group and/or an ether group.

## Claims

### Claim 1

A maintenance liquid for an ink-jet device used for a method of forming a pattern, the method including a process of discharging, using the ink-jet device, a photo-curable composition mainly composed of a polymerizable monomer, onto a substrate or a mold having a fine pattern formed thereon, applying the other one of the substrate and the mold onto the photo-curable composition and irradiating light onto the photo-curable composition held between the substrate and the mold having a fine pattern formed thereon,
the maintenance liquid containing a compound having an ester group and/or an ether group, and a polymerizable monomer, and the maintenance liquid contains no photopolymerization initiator;
wherein a ratio of area corresponded to polymerization products of the polymerizable monomer in the maintenance liquid is 0.5% or smaller relative to the polymerizable monomer, when measured by gel permeation chromatography (GPC) using a differential refractometer (RI detector); and
at least one species of the polymerizable monomer contained in the maintenance liquid is a polymerizable monomer represented by the following formula:
wherein Ar is an arylene group which may have a substituent, X is a single bond or an organic linking group, R1 is a hydrogen atom or a methyl group, and n is 2 or 3.

### Claim 2 (depends on 1)

The maintenance liquid described in claim 1, wherein the compound having an ester group and/or an ether group is a polymerizable monomer.

### Claim 3 (depends on 1)

The maintenance liquid described in claim 1, having a viscosity at 25° C. of 50 mPa·s or smaller.

### Claim 4 (depends on 1)

The maintenance liquid described in claim 1, containing a compound having both of an ester functional group and an ether group, or containing both of a compound having an ester functional group and a compound having an ether group.

### Claim 5 (depends on 1)

The maintenance liquid described in claim 1, having a boiling point at 1 atm of 150° C. or higher.

### Claim 6 (depends on 1)

The maintenance liquid described in claim 1, wherein 50% by mass or more of the maintenance liquid is the compound having an ester group and/or an ether group.

### Claim 7 (depends on 1)

The maintenance liquid described in claim 1, which essentially consists of the compound having an ester group and/or an ether group and the polymerizable monomer.

### Claim 8 (depends on 1)

The maintenance liquid described in claim 1, wherein X is an organic linking group.

### Claim 9 (depends on 8)

The maintenance liquid described in claim 8, wherein X is an alkylene group.

### Claim 10 (depends on 1)

The maintenance liquid described in claim 1, wherein the compound having an ester group and/or an ether group is different from the polymerizable monomer.

### Claim 11 (depends on 9)

The maintenance liquid described in claim 9, wherein the compound having an ester group and/or an ether group is different from the polymerizable monomer.

### Claim 12 (depends on 1)

The maintenance liquid described in claim 1, wherein the compound having an ester group and/or an ether group is non-polymerizable.

### Claim 13 (depends on 9)

The maintenance liquid described in claim 9, wherein the compound having an ester group and/or an ether group is non-polymerizable.

### Claim 14

A maintenance liquid for an ink-jet device used for a method of forming a pattern, the method including a process of discharging, using the ink-jet device, a photo-curable composition mainly composed of a polymerizable monomer, onto a substrate or a mold having a fine pattern formed thereon, applying the other one of the substrate and the mold onto the photo-curable composition and irradiating light onto the photo-curable composition held between the substrate and the mold having a fine pattern formed thereon,
the maintenance liquid containing a compound having an ester group and/or an ether group, and a polymerizable monomer, and the maintenance liquid having a boiling point at 1 atm of 150° C. or higher;
wherein a ratio of area corresponded to polymerization products of the polymerizable monomer in the maintenance liquid is 0.5% or smaller relative to the polymerizable monomer, when measured by gel permeation chromatography (GPC) using a differential refractometer (RI detector); and
at least one species of the polymerizable monomer contained in the maintenance liquid is a polymerizable monomer represented by the following formula:
wherein Ar is an arylene group which may have a substituent, X is an organic linking group, R1 is a hydrogen atom or a methyl group, and n is 2 or 3.

### Claim 15 (depends on 14)

The maintenance liquid described in claim 14, wherein the compound having an ester group and/or an ether group is a polymerizable monomer.

### Claim 16 (depends on 14)

The maintenance liquid described in claim 14, having a viscosity at 25° C. of 50 mPa·s or smaller.

### Claim 17 (depends on 14)

The maintenance liquid described in claim 14, containing a compound having both of an ester functional group and an ether group, or containing both of a compound having an ester functional group and a compound having an ether group.

### Claim 18 (depends on 14)

The maintenance liquid described in claim 14, wherein 50% by mass or more of the maintenance liquid is the compound having an ester group and/or an ether group.

### Claim 19 (depends on 14)

The maintenance liquid described in claim 14, which essentially consists of the compound having an ester group and/or an ether group and the polymerizable monomer.