# US 8,783,674 B2 · Stage > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,783,674 B2 - Document ID: US8783674B2 - Status: Granted - Kind: B2 - Application number: 12/902,496 - Filed: 2010-10-12 - Published: 2011-02-24 - Granted: 2014-07-22 - Earliest claimed: 2008-05-19 - Assignees: Ulvac, Inc. - Applicants: Yuya Inoue; Tamotsu Tanifuji; Hisato Tanaka; Makoto Takahashi; Kuniyoshi Sekine - Inventors: Yuya Inoue; Tamotsu Tanifuji; Hisato Tanaka; Makoto Takahashi; Kuniyoshi Sekine - Web page: https://patentgrep.com/patent/US8783674B2 ## CPC - B25B 1/00: Vices (specially adapted for tying flies for angling A01K97/28; specially adapted for machine tools B23Q3/00 {; rope or cable splicing vices D07B7/162}) - B65G 49/061: {Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames (suction means as load-engaging elements attached to the lifting or lowering gear of cranes B66C1/02; suction cups for attaching purposes F16B47/00; suction cups on gripping heads B25J15/0616; suction cups in general B65G47/91; suction cups combined with cutting means on vertical conveyors C03B33/00 - C03B33/10; devices for turning sheets B65G49/067; suspending devices B65G49/066)} - B65G 2249/02: Controlled or contamination-free environments or clean space conditions - B25B: TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING, OR HOLDING - B65G: TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS (packaging B65B; handling thin or filamentary materials, e.g. paper sheets or thread, B65H; cranes B66C; portable mobile or lifting or hauling appliances, e.g. hoists, B66D; devices for lifting or lowering goods for loading or unloading purposes, e.g. fork-lift trucks, B66F9/00; emptying bottles, jars, casks, barrels or similar containers, not otherwise provided for, B67C9/00; delivering or transferring liquids B67D; filling or discharging vessels for liquefied, solidified or compressed gases F17C; pipe-line systems for fluids F17D) ## Abstract Provided is a substrate stage which can transfer a substrate at a high speed. In the substrate stage of the present invention, auxiliary mounting tables are attached to a main mounting table, and lower rails are arranged over on the main mounting table and above the auxiliary mounting tables. When both ends of the lower rails are bent upwardly by a vertically adjusting unit in order to prevent the both ends of the lower rails to be bent downwardly, the lower rails are made straight. Since the lower rail is not divided, the linearity is ensured and the moving plate does not stutter so that transfer of the substrate at high speed can be performed. ## Claims ### Claim 1 A stage, comprising: a main mounting table; an auxiliary mounting table which has an area smaller than an area of the main mounting table and can be separated from the main mounting table; a plurality of lower rails which are arranged over on the main mounting table and above the auxiliary mounting table, end portions of the lower rail being positioned above the auxiliary mounting table; and a moving plate which is located above each of the lower rails and can be run above the lower rails, wherein each one of the plurality of lower rails is formed from a single raw plate, the lower rails being detachably attached to the main mounting table and the auxiliary mounting table, and wherein the auxiliary mounting tables are provided with a vertically adjusting unit which can adjust the height of the lower rails at plural positions, wherein one side of each auxiliary mounting table is fixed to the main mounting table and a portion of the auxiliary mounting table, which is fixed to the main mounting table, is supported by the main mounting table, and a portion of the auxiliary mounting table opposed to the portion of the auxiliary mounting table, which is fixed to the main mounting table, is unsupported by the main mounting table. ### Claim 2 (depends on 1) The stage according to claim 1, further comprising: a plurality of through holes provided in the moving plate through which moving up/down pins are inserted, and wherein the moving up/down pins can be inserted from a rear face side of the moving plate when the moving plate is positioned at a predetermined place of the auxiliary mounting tables. ### Claim 3 (depends on 1) The stage according to claim 1, wherein an upper rail arranged above the lower rails is detachably attached to the main mounting table. ### Claim 4 (depends on 3) The stage according to claim 3, wherein an ink jet head is movably attached to the upper rail. ### Claim 5 A stage, comprising: a main mounting table; an auxiliary mounting table which has a smaller area than an area of the main mounting table and can be separated from the main mounting table; a plurality of lower rails which are arranged over on the main mounting table and above the auxiliary mounting table, end portions of the lower rail being located above the auxiliary mounting table; and an upper rail which is moveably attached along a direction in which the lower rails extend, wherein each one of the lower rails is made of a single raw plate and can be detachably attached to the main mounting table and the auxiliary mounting table, the auxiliary mounting table being provided with a vertically adjusting unit which can adjust the height of the lower rails at plural positions, and the upper rail and the lower rails being detachably attached, wherein one side of each auxiliary mounting table is fixed to the main mounting table and a portion of the auxiliary mounting table, which is fixed to the main mounting table, is supported by the main mounting table, and a portion of the auxiliary mounting table opposed to the portion of the auxiliary mounting table, which is fixed to the main mounting table, is unsupported by the main mounting table. ### Claim 6 (depends on 5) The stage according to claim 5, wherein an ink jet head is movably attached to the upper rail. ### Claim 7 (depends on 1) The stage according to claim 1, wherein the lower rails are made of granite.