# US 8,783,652 B2 · Liquid flow control for film deposition > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,783,652 B2 - Document ID: US8783652B2 - Status: Granted - Kind: B2 - Application number: 13/785,819 - Filed: 2013-03-05 - Published: 2013-09-12 - Granted: 2014-07-22 - Earliest claimed: 2012-03-12 - Assignees: MPS Corporation - Applicants: Thuc M. Dinh; Benjamin Y. H. Liu; Yamin Ma - Inventors: Thuc M. Dinh; Benjamin Y. H. Liu; Yamin Ma - Web page: https://patentgrep.com/patent/US8783652B2 ## CPC - H10P 14/00: Formation of materials, e.g. in the shape of layers or pillars - F16K 7/14: arranged to be deformed against a flat seat - F16K 31/007: {Piezoelectric stacks} - F16K 31/1221: {one side of the piston being spring-loaded} - Y10T 137/0357: For producing uniform flow - Y10T 137/7722: Line condition change responsive valves - Y10T 137/7759: Responsive to change in rate of fluid flow - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - F16K: VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING {(devices for emptying and evacuating the excess liquid in valves or conduits F16L55/07)} - Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION ## Abstract An apparatus for controlling liquid flow wherein the apparatus comprises an orifice and an adjacent flexible diaphragm separated from each other by a gap through which a liquid flows. The diaphragm is sufficiently flexible to vary the gap thereby controlling the rate of liquid flowing through the orifice or to provide a positive liquid shutoff of liquid flowing through the orifice. A method for controlling liquid flow through the apparatus comprises flexing said diaphragm to vary a size of the gap to control the rate of liquid flowing through the orifice or to provide a positive liquid shutoff of liquid from flowing through the orifice. ## Claims ### Claim 1 An apparatus for controlling liquid flow comprising an orifice and an adjacent flexible diaphragm separated from each other by a gap through which a liquid flows, said diaphragm being sufficiently flexible to vary the gap for controlling the rate of liquid flowing through the orifice or to provide a positive liquid shutoff of liquid flowing through the orifice and a spring to exert a force on said flexible diaphragm for positive liquid flow shut off; wherein a piezoelectric transducer is in contact with said flexible diaphragm and positioned between said diaphragm and a piston, the piston operable by compressed gas to create a force to counter the force of said spring on said flexible diaphragm and place said diaphragm in a position for liquid flow control wherein the spring is capable of exerting a force on the piezoelectric transducer to move the transducer against the flexible diaphragm for positive liquid flow shutoff. ### Claim 2 (depends on 1) The apparatus of claim 1 wherein the piezoelectric transducer provides a force to the flexible diaphragm for controlling the rate of liquid flow. ### Claim 3 (depends on 1) The apparatus of claim 1 including additionally a liquid flow sensor and electronic circuitry to operate said apparatus to permit the liquid to flow through at a selected rate. ### Claim 4 (depends on 1) The apparatus of claim 1 including additionally a pressurized liquid source in a container for delivering liquid to the gap. ### Claim 5 (depends on 1) The apparatus of claim 1 including additionally a flow passageway with an outlet downstream of said orifice to deliver liquid for vaporization and a gas flow passageway directing a gas to flow at a high velocity near said outlet of said flow passageway to reduce the size of liquid drops formed at said outlet. ### Claim 6 (depends on 2) The apparatus of claim 2 said gas flow velocity is higher than 20 meters per second. ### Claim 7 (depends on 1) The apparatus of claim 1, said flexible diaphragm being a metal. ### Claim 8 (depends on 4) The apparatus of claim 4, said diaphragm being stainless steel. ### Claim 9 A method for controlling liquid flow through an apparatus comprising an orifice and an adjacent flexible diaphragm separated from each other by a gap through which a liquid flows, the orifice comprising a liquid outlet substantially centered within a gas flow passageway outlet, the method comprising: flexing said diaphragm to vary a size of the gap to control the rate of liquid flowing through the orifice or to provide a positive liquid shutoff of liquid from flowing through the orifice; and providing a gas to flow at high velocity through the gas flow passageway outlet and flowing the gas through the gas outlet in substantially the same direction as the liquid flowing through the liquid outlet to reduce the size of liquid droplets formed at said outlet, wherein said outlet is located downstream of the orifice and in fluid communication therewith. ### Claim 10 (depends on 9) The method of claim 9 wherein the gas flows at a velocity higher than 20 meters per second. ### Claim 11 (depends on 9) The method of claim 9 and further providing an piezoelectric transducer in contact with the flexible diaphragm such that the piezoelectric transducer is operable to flex the diaphragm for controlling the rate of liquid flow. ### Claim 12 (depends on 9) The method of claim 9 and providing a spring to exert a force on the flexible diaphragm for positive liquid flow shutoff. ### Claim 13 (depends on 12) The method of claim 12 and further providing a gas generated force against the spring to counter the force of the spring on the flexible diaphragm thereby placing the diaphragm in a position for liquid flow control.