# US 8,783,108 B2 · Micromechanical system for detecting an acceleration

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- Number: US 8,783,108 B2
- Document ID: US8783108B2
- Status: Granted
- Kind: B2
- Application number: 12/876,559
- Filed: 2010-09-07
- Published: 2011-03-10
- Granted: 2014-07-22
- Earliest claimed: 2009-09-08
- Assignees: Robert Bosch GmbH
- Applicants: Johannes Classen
- Inventors: Johannes Classen
- Web page: https://patentgrep.com/patent/US8783108B2

## CPC

- G01P 15/125: by capacitive pick-up
- G01P 2015/0831: {the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration}
- G01P: MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT (measuring or recording blood flow A61B5/02, A61B8/06; monitoring speed or deceleration of electrically-propelled vehicles B60L3/00; vehicle lighting systems adapted to indicate speed B60Q1/54; determining position or course in navigation, measuring ground distance in geodesy or surveying G01C; combined measuring devices for measuring two or more variables of movement G01C23/00; measuring velocity of sound G01H; measuring velocity of light G01J7/00; measuring direction or velocity of solid objects by reception or emission of radiowaves or other waves and based on propagation effects, e.g. Doppler effect, propagation time, direction of propagation, G01S; measuring speed of nuclear radiation G01T; measuring acceleration of gravity G01V; {measuring or recording the speed of trains B61L23/00; speed indicators incorporated in motor vehicles B60K35/00; measuring frequency or phase G01R; traffic control G08G})

## Abstract

A micromechanical system for detecting an acceleration includes a substrate, a rocker-like mass structure having a first lever arm and a diametrically opposed second lever arm, the lever arms being situated tiltably at a distance to the substrate and about an axis of rotation to the substrate, and first and second electrodes being provided on the substrate. Each electrode is diametrically opposed to a lever arm and each lever arm includes a section extending from the axis of rotation which is located between the electrodes above an intermediate space. The two sections have different masses.

## Claims

### Claim 1

A micromechanical system for detecting an acceleration, comprising:
a substrate;
a rocker-like mass structure having a first lever arm and a diametrically opposed second lever arm, which are situated tiltably at a distance in relation to the substrate and about an axis of rotation to the substrate; and
first and second electrodes situated on the substrate, each electrode being diametrically opposed to a lever arm, wherein the two electrodes are arranged in mirror symmetry with respect to the axis of rotation,
wherein each lever arm includes a section extending from the axis of rotation, the two sections having varying masses that lie above an intermediate space between the electrodes and each section includes an end section having equal masses, such that the first electrode is located under the end section of the first lever arm and the second electrode is located under the end section of the second lever arm, each at a distance farther from the axis of rotation than the two sections having varying masses.

### Claim 2 (depends on 1)

The system according to claim 1, wherein one of the sections has a greater recess than the other section.

### Claim 3 (depends on 1)

The system according to claim 1, wherein one of the sections includes an additional mass.

### Claim 4 (depends on 1)

The system according to claim 1, wherein both lever arms are at an equal distance from the axis of rotation.

### Claim 5 (depends on 1)

The system according to claim 1, further comprising an additional electrode situated on the substrate in the intermediate space between the electrodes.

### Claim 6 (depends on 5)

The system according to claim 5, wherein an underside of the mass structure facing the substrate has a cover layer which is in mirror symmetry with respect to the axis of rotation.

### Claim 7 (depends on 6)

The system according to claim 6, further comprising first, second and third functional layers, the electrodes being a component of the first functional layer, the cover layer being a component of the second functional layer, and the mass structure being a component of the third functional layer.

### Claim 8 (depends on 1)

The system according to claim 1, wherein the mass structure is connected to the substrate via a fastening structure, the fastening structure including a torsion spring which acts counter to a tipping of the mass structure toward the substrate.

### Claim 9 (depends on 8)

The system according to claim 8, wherein the fastening structure is connected to the substrate.