# US 8,783,101 B2 · Rapid response relative humidity sensor using anodic aluminum oxide film

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 8,783,101 B2
- Document ID: US8783101B2
- Status: Granted
- Kind: B2
- Application number: 13/380,053
- Filed: 2010-12-22
- Published: 2012-10-04
- Granted: 2014-07-22
- Earliest claimed: 2009-12-22
- Assignees: Nano and Advanced Materials Institute Limited
- Applicants: Chun Zhang; Jianying Miao; Ning Wang
- Inventors: Chun Zhang; Jianying Miao; Ning Wang
- Web page: https://patentgrep.com/patent/US8783101B2

## CPC

- G01N 27/223: {for determining moisture content, e.g. humidity (rain detectors on vehicle windows B60S1/0825)}
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)

## Abstract

A rapid response relative humidity sensor based on nano-structured aluminum oxide thin film is disclosed. The main body of the sensor is an anodic aluminum oxide thin film of about 2-20 μm thick formed from an Al substrate which serves as one electrode. A porous metal layer of about 20-200 nm thick is formed over the anodic aluminum oxide thin film and functions as a second electrode. The alumina thin film contains nano-sized channels of about 10-100 nm in diameter, serving as a capacitive relative humidity sensor having high sensitivity and short response time. Thermal annealing at elevated temperature improves the linearity of the capacitance versus humidity curve, giving a full range humidity sensing range. Hysteresis and degradation are negligible for the humidity sensors.

## Claims

### Claim 1

A capacitive humidity sensor having a substantially linear response and capable of detecting relative humidity in a full range of 0 to 100% relative humidity, the humidity sensor comprising:
an aluminum substrate forming one electrode of the capacitive humidity sensor;
an anodic aluminum oxide thin film formed from at least a portion of the aluminum substrate and having a thickness of 2-20 μm formed on a portion of the aluminum substrate, the anodic aluminum oxide film having channels with a channel diameter from 10 nm to 100 nm configured to adsorb water vapor from an ambient environment; and
a porous metal layer formed on a portion of the anodic aluminum oxide film formed on the aluminum substrate, the porous metal layer forming a second electrode of the capacitive humidity sensor, the aluminum substrate, anodic aluminum oxide thin film and porous metal layer having undergone heat treatment to produce a substantially linear humidity versus capacitance sensor response,
wherein said heat treatment is selected from one of the following conditions:
a) annealing at a temperature of 85° C. for 5-50 hours at 90% relative humidity;
b) annealing at a temperature of 90° C. for 5-50 hours in dry air; or
c) immersion in boiling water at a temperature of 100° C. for 10-100 minutes; and
wherein a response time of said capacitive humidity sensor is less than 6 seconds when the channel diameter is larger than 10 nm.

### Claim 2 (depends on 1)

The capacitive humidity sensor according to claim 1, wherein the response time is less than 1 second when the channel diameter is larger than 40 nm.

### Claim 3 (depends on 1)

The capacitive humidity sensor according to claim 1 further comprising metal electrode pins extending from the aluminum substrate and the porous metal layer.

### Claim 4 (depends on 1)

The capacitive humidity sensor according to claim 1 wherein the aluminum substrate is plate-shaped with two integrally formed electrode legs extending therefrom, one of the electrode legs comprising unanodized aluminum and the other electrode leg comprising anodized aluminum with the porous metal layer formed thereon.

### Claim 5 (depends on 1)

The capacitive humidity sensor according to claim 1, wherein the aluminum substrate is plate shaped with an attached electrode leg extending from an unanodized portion of the aluminum substrate and another attached electrode leg extending from the anodized portion of the aluminum substrate having the porous metal layer formed thereon.

### Claim 6 (depends on 1)

A process for fabricating the capacitive humidity sensor of claim 1 comprising:
forming an aluminum template from an aluminum substrate;
anodizing at least a portion of the aluminum template;
depositing a porous metal film on at least a portion of the anodized aluminum template; and
thermally treating the resulting multilayer structure to create a substantially linear humidity versus capacitance response humidity sensor.

### Claim 7 (depends on 6)

A method according to claim 6, wherein anodizing is carried out in oxalic acid, or sulfuric acid, or phosphoric acid, or nitric acid, or a mixture thereof.

### Claim 8 (depends on 6)

A method according to claim 6, the porous metal film is aluminum, copper, gold, platinum, palladium, or nichrome.

### Claim 9 (depends on 6)

A method according to claim 6, wherein the thermal treatment comprises annealing at a temperature of 85° C. for 5-50 hours at 90% relative humidity.

### Claim 10 (depends on 6)

A method according to claim 6, wherein the thermal treatment comprises annealing at a temperature of 90° C. for 5-50 hours in dry air.

### Claim 11 (depends on 6)

A method according to claim 6, wherein the thermal treatment comprises immersion in boiling water at a temperature of 100° C. for 10-100 minutes.