# US 8,783,063 B2 · Glass substrate for magnetic disk and manufacturing method of the same

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- Number: US 8,783,063 B2
- Document ID: US8783063B2
- Status: Granted
- Kind: B2
- Application number: 13/349,495
- Filed: 2012-01-12
- Published: 2012-05-31
- Granted: 2014-07-22
- Earliest claimed: 2007-09-28
- Assignees: Hoya Corporation
- Applicants: Kinobu Osakabe; Hideki Isono; Katsuyuki Iwata; Shinji Eda; Kenichiro Terada
- Inventors: Kinobu Osakabe; Hideki Isono; Katsuyuki Iwata; Shinji Eda; Kenichiro Terada
- Web page: https://patentgrep.com/patent/US8783063B2

## CPC

- C03C 21/002: {to perform ion-exchange between alkali ions (C03C21/005 takes precedence)}
- G11B 5/73921: {Glass or ceramic substrates}
- G11B 5/8404: {manufacturing base layers}
- C03C: CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- G11B: INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER (recording measured values in a way that does not require playback through a transducer G01D9/00; recording or playback apparatus using mechanically marked tape, e.g. punched paper tape, or using unit records, e.g. punched or magnetically marked cards G06K; transferring data from one type of record carrier to another G06K1/18; circuits for coupling output of reproducer to radio receiver H04B1/20; gramophone pick-ups or like acoustic electromechanical transducers or circuits therefor H04R)

## Abstract

A glass substrate for a magnetic disk of the invention is a disk-shaped glass substrate for a magnetic disk where the substrate has a main surface and end face and is subjected to chemical reinforcement treatment, and is characterized in that the penetration length in the uppermost-portion stress layer on the main surface is 49.1 μm or less, and that assuming that an angle between the main surface and compressive stress in the stress profile by a Babinet compensator method is θ, a value y of {12·t·ln(tan θ)+(49.1/t)} is the penetration length in the uppermost-portion stress layer or less.

## Claims

### Claim 1

A method of manufacturing a glass substrate for a magnetic disk,
wherein the glass contains in expression of percent by mass:
SiO2 57 to 75%;
Al2O3 5 to 20%;
(where the total amount of SiO2+Al2O3 is 74% or more)
the total of ZrO2, HfO2, Nb2O5, Ta2O5, La2O3, Y2O3, and TiO2 exceeding 0% to 6% or less;
Li2O exceeding 1% to 9% or less;
Na2O 5 to 18%;
(where the mass ratio Li2O/Na2O is 0.5 or less)
K2O 0 to 6%;
MgO 0 to 4%;
CaO exceeding 0% to 5% or less;
(where the total amount of MgO and CaO is 5% or less, and the content of CaO is higher than the content of MgO) and
SrO+BaO 0 to 3%,
the method comprising the step of applying chemical reinforcement treatment to the glass substrate,
wherein a glass composition of the glass substrate and conditions of the chemical reinforcement treatment are selected to perform the chemical reinforcement treatment on the selected conditions so that when the glass substrate for a magnetic disk is made by the chemical reinforcement treatment, a penetration length in an uppermost-portion stress layer on a main surface of the glass substrate for a magnetic disk is 49.1 μm or less, and that assuming that an angle between the main surface and compressive stress in a stress profile by a Babinet compensator method is θ, the penetration length in the uppermost-portion stress layer is a value y of {12·t·ln(tan θ)+(49.1/t)} or less,
the penetration length in the uppermost-portion stress layer is a length of the longer diagonal in an indentation when a diamond quadrangular pyramid indenter of rhombic transverse section with vertex angles of 172° 30′ and 130° is pressed against the main surface with a pressing force of 100 g, the tan θ is a value {(L1+L2)/(P1+P2)} calculated from stress values and stress depths obtained by the Babinet compensator method, the t is a thickness of the substrate,
P1 is a compressive stress value, P2 is a tensile stress value, L1 is a compressive stress depth, and L2 is a tensile stress depth.

### Claim 2 (depends on 1)

The manufacturing method of a glass substrate for a magnetic disk according to claim 1, wherein the value of y is {16·t·ln(tan θ)+(49.1/t)}.

### Claim 3 (depends on 1)

The manufacturing method of a glass substrate for a magnetic disk according to claim 1, wherein glass forming the glass substrate for a magnetic disk is aluminosilicate glass containing Zr.

### Claim 4

A method of manufacturing a glass substrate for a magnetic disk, wherein the glass contains in expression of percent by mass:
SiO2 57 to 75%;
Al2O3 5 to 20%;
(where the total amount of SiO2+Al2O3 is 74% or more) the total of ZrO2, HfO2, Nb2O5, Ta2O5, La2O3, Y2O3, and TiO2 exceeding 0% to 6% or less;
Li2O exceeding 1% to 9% or less;
Na2O 5 to 18%;
where the mass ratio Li2O/Na2O is 0.5 or less,
K2O 0 to 6%;
MgO 0 to 4%;
CaO exceeding 0% to 5% or less;
where the total amount of MgO and CaO is 5% or less, and the content of CaO is higher than the content of MgO, and
SrO+BaO 0 to 3%,
said method comprising:
a chemical reinforcement treatment step of immersing a disk-shaped glass substrate, having a circular hole formed at a center portion thereof and made from said glass, in a chemical reinforcement treatment solution, causing ion exchange for replacing relatively small ions contained in a surface of the glass substrate made from said glass with relatively large ions contained in the chemical reinforcement treatment solution, and thereby creating a compressive stress layer in the surface of the glass substrate,
wherein the chemical reinforcement treatment is performed so that a deformation amount of the circular hole formed at the center portion of the disk-shaped glass substrate is within 0.05% of the diameter of the circular hole, and that the transverse strength of the disk-shaped glass substrate is 98 N or more.

### Claim 5

A method of manufacturing a glass substrate for a magnetic disk, wherein the glass contains in expression of percent by mass:
SiO2 57 to 75%;
Al2O3 5 to 20%;
(where the total amount of SiO2+Al2O3 is 74% or more) the total of ZrO2, HfO2, Nb2O5, Ta2O5, La2O3, Y2O3, and TiO2 exceeding 0% to 6% or less;
Li2O exceeding 1% to 9% or less;
Na2O 5 to 18%;
where the mass ratio Li2O/Na2O is 0.5 or less,
K2O 0 to 6%;
MgO 0 to 4%;
CaO exceeding 0% to 5% or less;
where the total amount of MgO and CaO is 5% or less, and the content of CaO is higher than the content of MgO, and
SrO+BaO 0 to 3%,
wherein the glass substrate is a doughnut-shaped glass substrate for a magnetic disk, and has a circular hole at a center portion thereof, and
wherein when diameters of circular holes of 500 to 1000 glass substrates that are arbitrarily selected are measured, the diameter of the circular hole of each of the glass substrates is within the range of ±5×10−4×A relative to the average diameter A of the circular holes of the glass substrates, the transverse strength of each of the glass substrates is 98 N or more, and control is thus performed.

### Claim 6 (depends on 5)

The manufacturing method of a glass substrate for a magnetic disk according to claim 5, wherein the glass substrate for a magnetic disk is a 2.5-inch substrate, and the diameter of the circular hole of each glass substrate is within A±10 μm.

### Claim 7

A method of manufacturing a glass substrate for a magnetic disk, wherein a glass material in said substrate contains in expression of percent by mass:
SiO2 57 to 75%;
Al2O3 5 to 20%;
where the total amount of SiO2+Al2O3 is 74% or more,
the total of ZrO2, HfO2, Nb2O5, Ta2O5, La2O3, Y2O3, and TiO2 exceeding 0% to 6% or less;
Li2O exceeding 1% to 9% or less;
Na2O 5 to 18%;
where the mass ratio Li2O/Na2O is 0.5 or less,
K2O 0 to 6%;
MgO 0 to 4%;
CaO exceeding 0% to 5% or less;
where the total amount of MgO and CaO is 5% or less, and the content of CaO is higher than the content of MgO, and
SrO+BaO 0 to 3%,
said method comprising:
a chemical reinforcement treatment step of immersing a disk-shaped glass substrate with, having a circular hole formed at a center portion thereof and made from said glass material, in a chemical reinforcement treatment solution, causing ion exchange for replacing relatively small ions contained in a surface of the glass substrate made from said glass material with relatively large ions contained in the chemical reinforcement treatment solution, and thereby creating a compressive stress layer in the surface of the glass substrate,
wherein the chemical reinforcement treatment is performed by selecting said glass material of the disk-shaped glass substrate and treatment conditions of the chemical reinforcement treatment so that a deformation amount of the circular hole formed at the center portion of the disk-shaped glass substrate is within 0.05% of the diameter of the circular hole, and that the transverse strength of the disk-shaped glass substrate is 98 N or more.

### Claim 8

A method of manufacturing a glass substrate for a magnetic disk, wherein a glass material in said substrate contains in expression of percent by mass:
SiO2 57 to 75%;
Al2O3 5 to 20%;
where the total amount of SiO2+Al2O3 is 74% or more,
the total of ZrO2, HfO2, Nb2O5, Ta2O5, La2O3, Y2O3, and TiO2 exceeding 0% to 6% or less;
Li2O exceeding 1% to 9% or less;
Na2O 5 to 18%;
where the mass ratio Li2O/Na2O is 0.5 or less,
K2O 0 to 6%;
MgO 0 to 4%;
CaO exceeding 0% to 5% or less;
where the total amount of MgO and CaO is 5% or less, and the content of CaO is higher than the content of MgO, and
SrO+BaO 0 to 3%,
said method comprising:
a chemical reinforcement treatment step of immersing a disk-shaped glass substrate, having a circular hole formed at a center portion thereof and made from said glass material, in a chemical reinforcement treatment solution, causing ion exchange for replacing relatively small ions contained in a surface of the glass substrate made from said glass material with relatively large ions contained in the chemical reinforcement treatment solution, and thereby creating a compressive stress layer in the surface of the glass substrate,
wherein a deformation amount due to the chemical reinforcement treatment of the circular hole formed at the center portion of the disk-shaped glass substrate is beforehand grasped for each glass, said glass material is selected so that the deformation amount is within 0.05% of the diameter of the circular hole, and that the transverse strength of the disk-shaped glass substrate due to the chemical reinforcement treatment is 98 N or more, the selected glass material is processed in disk form, while the circular hole is formed at the center portion, and the chemical reinforcement treatment is performed.

### Claim 9 (depends on 4)

The manufacturing method of a glass substrate for a magnetic disk according to claim 4, wherein the chemical reinforcement treatment is performed using a chemical reinforcement treatment solution having a composition with 60 percent to 80 percent by mass KNO3 and 40 percent to 20 percent by mass NaNO3, where 100 percent by mass in total, at a temperature ranging from 350° C. to 420° C.

### Claim 10 (depends on 4)

The manufacturing method of a glass substrate for a magnetic disk according to claim 4, wherein a thickness of the compressive stress layer in the disk-shaped glass substrate subjected to the chemical reinforcement treatment ranges from 10 μm to 150 μm.

### Claim 11 (depends on 4)

The manufacturing method of a glass substrate for a magnetic disk according to claim 4, wherein the glass substrate supports a magnetic disk in which a track density of information to record is at least 100-gigabit TPI.

### Claim 12 (depends on 4)

The manufacturing method of a glass substrate for a magnetic disk according to claim 4, wherein the glass substrate supports a perpendicular magnetic recording system.

### Claim 13 (depends on 1)

The manufacturing method of a glass substrate for a magnetic disk according to claim 1, wherein a compressive stress depth is from 100 μm to 150 μm.

### Claim 14 (depends on 4)

The manufacturing method of a glass substrate for a magnetic disk according to claim 4, wherein the mass ratio Li2O/Na2O is 0.38 or less.

### Claim 15 (depends on 5)

The manufacturing method of a glass substrate for a magnetic disk according to claim 5, wherein the mass ratio Li2O/Na2O is 0.38 or less.

### Claim 16 (depends on 7)

The manufacturing method of a glass substrate for a magnetic disk according to claim 7, wherein the mass ratio Li2O/Na2O is 0.38 or less.

### Claim 17 (depends on 8)

The manufacturing method of a glass substrate for a magnetic disk according to claim 8, wherein the mass ratio Li2O/Na2O is 0.38 or less.