# US 8,782,915 B2 · Method and device for measuring a surface profile > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,782,915 B2 - Document ID: US8782915B2 - Status: Granted - Kind: B2 - Application number: 13/373,143 - Filed: 2011-11-04 - Published: 2012-04-26 - Granted: 2014-07-22 - Earliest claimed: 2009-05-07 - Assignees: Carl Mahr Holding GmbH - Applicants: Matthias Reitemeyer; Heinz-Joachim Kedziora - Inventors: Matthias Reitemeyer; Heinz-Joachim Kedziora - Web page: https://patentgrep.com/patent/US8782915B2 ## CPC - G01B 3/008: {Arrangements for controlling the measuring force} - G01B 5/008: using coordinate measuring machines - G01B 21/042: {Calibration or calibration artifacts (G01B3/30, G01B9/02072 take precedence)} - G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS ## Abstract A measuring device (10) and method for measuring a surface profile of a workpiece. A measuring carriage (15) is moved in a straight line at a distance from the workpiece surface in a moving direction (x), without accelerating a carried probe tip (25). The free probe end (40) of the probe tip (25) rests on the workpiece surface (11) with a measuring force (Fm) and is deflected during the measurement in a measuring direction (z), transverse to moving direction (x), the surface profile causes a track-dependent deflection (zT) of the probe end (49). A measured value receiver (45) detects the deflecting value (s) describing the deflection of the probe end (40) in measuring direction (z). In an analyzing unit (21), a measuring force change value describing the change of the measuring force (Fm) between the probe end (40) and the workpiece surface (11) is formed for detecting measuring errors/inaccuracies. ## Claims ### Claim 1 Measuring device (10) for measuring a surface profile of a workpiece, said device comprising, a measuring carriage (15) having a plurality of carriage positions, the measuring carriage (15) during measurement carried by and movable via a carriage drive (16) in a straight line at a distance from the workpiece surface in a moving direction (x), a probe tip (25) provided on the measuring carriage (15), a free probe end (40) of said probe tip (25) in operative position resting on the workpiece surface (11) to be measured with a measuring force (Fm) and the free probe end (40) being deflectable in a measuring direction (z) transverse to the moving direction (x) a measured value receiver (45) in operative arrangement with the probe tip (25) and for detecting a deflecting value (s) describing a deflection (zT) of the probe end (40) in the measuring direction (z), an analyzing unit (21) in operative arrangement with the carriage drive (16) and the measured value receiver (45), the analyzing unit (21) for determining a measuring force change value (Fdyn) describing the change of the measuring force (Fm) between the probe end (40) and the workpiece surface (11) as a function of the deflecting value (s), the analyzing unit (21) is provided with a pre-specified measuring force target range (Fo, Fu) for the measuring force value (Fm), whereby an exact measurement can occur within said range, the analyzing unit (21) for generating a measuring error signal when the measuring for value (Fm) is outside the measuring force target range (Fo, Fu), and, the measuring error signal for indicating that the probe end (40) has lifted off the workpiece surface (11) and/or that a measuring force (Fm) is too high between the probe end (40) and the workpiece surface (11). ### Claim 2 (depends on 1) Measuring device as in claim 1, further characterized by the analyzing unit (21) for calculating the deflection (zT) from the deflection value (s) and for determining the acceleration (aT) of the probe end (40) in measuring direction (z) based on the deflection (zT) and for determining the measuring force change value (Fdyn), whereby the measuring force change value (Fdyn) corresponds to the difference between the measuring force (Fm) and the static force (Fstat). ### Claim 3 (depends on 1) Measuring device as in claim 1, further characterized by an operator interface (50) operatively connected with the analyzing unit (21) is provided, the operator interface (50) for pre-specifying and/or varying by an operator the measuring force target range (Fo, Fu). ### Claim 4 (depends on 1) Measuring device as in claim 1, further characterized by an operator interface (50) that that can be activated by the analyzing unit (21) is provided, said analyzing unit (21) for issuing measuring error information to the operator interface (50) when the measuring error signal is present. ### Claim 5 (depends on 4) Measuring device as in claim 4, further characterized by the measuring error information of the analyzing unit (21) contains a changed carriage velocity (vx) that can be set by the operator for a repeat measurement. ### Claim 6 (depends on 1) Measuring device as in claim 1, further characterized by the analyzing unit (21) for activating the carriage drive (16) when a measuring error signal is present in order to move the measuring carriage (15) back up to at least the carriage position in which the last error-free measured value of the deflecting value (s) was available. ### Claim 7 (depends on 1) Measuring device as in claim 1, further characterized by, when the measuring error signal is present, the analyzing unit (21) for adapting the carriage velocity (vx) of the carriage drive (16) for further measurement. ### Claim 8 (depends on 1) Measuring device as in claim 1, further characterized by, during measurement, the carriage drive (16) for moving the measuring carriage (15) in a uniform manner at constant carriage velocity. ### Claim 9 (depends on 1) Measuring device as in claim 1, further characterized by, during measurement, the carriage drive (16) for moving the measuring carriage (15) at a parameter-dependent pre-specified carriage velocity, in particular at a carriage velocity that is a function of the deflecting value (s). ### Claim 10 (depends on 1) Measuring device as in claim 1, further characterized by the probe tip (25) is movably affixed to a probe arm (26) affixed to the measuring carriage (15), the probe arm (26) is supported by a rocker (28) on the measuring carriage (15), the probe arm (26) is pivotable about a pivot axis (27), the probe arm (25) extends transversely to the moving direction (x) of the measuring carriage (15) whereby the alignment of the probe tip (25) changes as a function of the pivoting position of the probe arm (26) about the pivot axis (27). ### Claim 11 (depends on 10) Measuring device as in claim 10, further characterized by the pivot arm (26) is operatively connected to one side of the rocker (28) while the rocker (28) is operatively connected to a force setting device (35). ### Claim 12 (depends on 11) Measuring device as in claim 11, further characterized by the force setting device (35) is connected in circuit with the analyzing unit (21). ### Claim 13 (depends on 11) Measuring device as in claim 11, further characterized by the measured value receiver (45) comprises two inductive measuring units (46), each inductive measuring unit (46) comprises a coil (47) and a core (48) that can be moved relative to the coil (47), the core (48) of each inductive measuring unit (46) is permanently slidably connected with rocker (28), whereby when rocker (28) performs a pivoting motion about pivot axis (27) each of the cores (48) move relative to the respectively allocated measuring coil (47) and deliver the corresponding measured value s1, s2 to the analyzing unit (21). ### Claim 14 A method for measuring a surface profile of a workpiece, said method comprising the following steps: during measurement, a measuring carriage (15) is moved in a straight line at a distance from the workpiece surface (11) in a moving direction (x); a free probe end (40) of a probe tip (25) fastened to the measuring carriage (15) rests on the workpiece surface (11) to be measured with a measuring force (Fm) and glides over the workpiece surface (11) along moving direction (x); a deflecting value (s) is detected, said deflecting value describing the deflection (zT) of the probe end (40) in a measuring direction (z) extending transversely to moving direction (x); and, a measuring force change value (Fdyn) describing the actual change of the measuring force (Fm) between the probe end (40) and the workpiece surface (11) is determined independent of the deflecting value (s); providing a pre-specified measuring force target range (Fo, Fu) for the measuring force value (Fm), whereby an exact measurement can occur within said range; and, generating a previously specifiable static contact force (Fstat) between the probe end (40) and the workpiece surface (11). ### Claim 15 (depends on 14) The method for measuring a surface profile of a workpiece as in claim 14 further comprising the following steps: calculating the deflection (zT) from the detecting value (s); determining the acceleration (aT) of the probe end (40) in measuring direction (z) based on the deflection (zT); and, determining the measuring force change value (Fdyn), whereby the measuring force change value (Fdyn) corresponds to the difference between the measuring force (Fm) and the static force (F stat). ### Claim 16 Measuring device (10) for measuring a surface profile of a workpiece, said device comprising, a measuring carriage (15) having a plurality of carriage positions, the measuring carriage (15) during measurement carried by and movable via a carriage drive (16) in a straight line at a distance from the workpiece surface in a moving direction (x), a probe tip (25) provided on the measuring carriage (15), a free probe end (40) of said probe tip (25) in operative position resting on the workpiece surface (11) to be measured with a measuring force (Fm) and the free probe end (40) being deflectable in a measuring direction (z) transverse to the moving direction (x), a measured value receiver (45) in operative arrangement with the probe tip (25) and for detecting a deflecting value (s) describing a deflection (zT) of the probe end (40) in the measuring direction (z), an analyzing unit (21) in operative arrangement with the carriage drive (16) and the measured value receiver (45), the analyzing unit (21) for determining a measuring force change value (Fdyn) describing the change of the measuring force (Fm) between the probe end (40) and the workpiece surface (11) as a function of the deflecting value (s), the analyzing unit (21) is provided with a pre-specified measuring force target range (Fo, Fu) for the measuring force value (Fm), whereby an exact measurement can occur within said range, the analyzing unit (21) for generating a measuring error signal when the measuring force value (Fm) is outside the measuring force target range (Fo, Fu), and, a force setting device (35) that can be activated by the analyzing unit (21) is provided, said force setting device (35) for generating a previously specifiable static contact force (Fstat) between the probe end (40) and the workpiece surface (11). ### Claim 17 (depends on 16) Measuring device as in claim 16, further characterized by, when a measuring error signal is present, the analyzing unit (21) for activating the force setting device (35) for changing the static contact force (Fstat). ### Claim 18 (depends on 16) Measuring device as in claim 16, further characterized by the force setting device (35) is a linear drive.