Optical member and method of manufacturing the same
AssigneeCanon Kabushiki Kaisha
InventorsZhang Zuyi, Hiroyuki Tanaka, Masayuki Yamada
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Abstract
An optical member including an oxide layer that has a stable fine textured structure and is excellent in durability is provided. The optical member includes a base material and an antireflection coating on a surface of the base material. The antireflection coating includes at least an oxide layer having a fine textured structure on the surface, and the oxide layer contains a phosphate compound. Furthermore, a method of manufacturing the optical member is provided.
Claims6
A method of manufacturing an optical member having (a) a base material and (b) an antireflection coating on the base material, the method comprising:
- forming a layer comprising aluminum or aluminum oxide on the base material;
- bringing the layer into contact with water to form a fine textured structure having crystalline particles of aluminum oxide in a surface of the layer;
- and
- bringing the layer having the fine textured structure into contact with a liquid in which a water-soluble phosphoric acid compound is dispersed in water or a water-soluble organic solvent, wherein the content of the phosphoric acid compound in the liquid is 0.01% by weight or more and 30% by weight or less, so as to form a fine textured structure containing a phosphate compound on the base material, wherein the reactivity between the phosphoric acid compound and the layer having the fine textured structure is controlled so as not to damage the antireflection function of the fine textured structure.
Dependencies are inferred from the claim text.