Systems for discretized processing of regions of a substrate
AssigneeIntermolecular, Inc.
InventorsTony P. Chiang, David E. Lazovsky, Thomas R. Boussie, Thomas H. McWaid, Alexander Gorer
Life of this patent
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Abstract
The present invention provides methods and systems for discretized, combinatorial processing of regions of a substrate such as for the discovery, implementation, optimization, and qualification of new materials, processes, and process sequence integration schemes used in integrated circuit fabrication. A substrate having an array of differentially processed regions thereon is processed by delivering materials to or modifying regions of the substrate.
Claims35
A tool for performing combinatorial processing, comprising:
- a plurality of wet processing cells each having a cavity defined between sidewalls of the processing cells, the cavity having upper and lower openings at opposed ends of the processing cells;
- a plurality of dispensing cells disposed above the plurality of wet processing cells;
- a valve array disposed between the upper openings of the plurality of wet processing cells and lower openings of the plurality of dispensing cells;
- and,
- an insert disposed within the cavity of the wet processing cells, the insert extending through the wet processing cells and having a top opening and a bottom opening corresponding to the upper openings and the lower openings, and wherein the insert is configured to enable formation of a seal between a substrate and the bottom opening.
A system for performing combinatorial processing on a substrate surface, comprising:
- a plurality of wet processing cells each having a sidewall, a top opening having a septum disposed across the top opening and a bottom opening, wherein the bottom opening defines a processing region, each of the wet processing cells independently moveable in three dimensions;
- a support coupled to a top surface of the wet processing cells, and wherein the wet processing cells are moveable in a horizontal plane above a top surface of a substrate to modify a position of the processing region;
- a liquid inlet extending into a wet processing area from the support, the wet processing area defined above the processing region;
- and
- a liquid outlet extending into the wet processing area from the support.
A system for performing combinatorial processing, comprising:
- a plurality of wet processing cells each having a processing area defined by a sidewall, the sidewall having a top surface and a bottom, wherein the bottom surface is-adapted to define a processing region such that there are a plurality of processing regions defined on a substrate;
- a dry inlet extending into the processing area, the dry inlet in fluid communication with a dry source;
- a liquid inlet extending into the processing area, the liquid inlet in fluid communication with a liquid source;
- a plurality of dispensing cells disposed above the plurality of wet processing cells;
- a valve array disposed between the upper openings of the plurality of wet processing cells and lower openings of the plurality of dispensing cells such that each of the wet processing cells is in communication with a valve of the valve array.
Dependencies are inferred from the claim text.