# US 8,772,803 B2 · Semiconductor light-emitting device and method for fabricating the same

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- Number: US 8,772,803 B2
- Document ID: US8772803B2
- Status: Granted
- Kind: B2
- Application number: 12/796,044
- Filed: 2010-06-08
- Published: 2011-04-21
- Granted: 2014-07-08
- Earliest claimed: 2009-10-15
- Assignees: LG Innotek Co., Ltd.
- Applicants: Hwan Hee Jeong; Sang Youl Lee; June O Song; Kwang Ki Choi
- Inventors: Hwan Hee Jeong; Sang Youl Lee; June O Song; Kwang Ki Choi
- Web page: https://patentgrep.com/patent/US8772803B2

## CPC

- H10H 20/832: characterised by their material
- H10H 20/82: Roughened surfaces, e.g. at the interface between epitaxial layers
- H10H 20/825: containing nitrogen, e.g. GaN
- H10W 72/552: {comprising metals or metalloids, e.g. silver}
- H10H: INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10

## Abstract

A semiconductor light-emitting device is provided that may include an electrode layer, a light-emitting structure including a compound semiconductor layer on the electrode layer, and an electrode on the light-emitting structure, wherein the electrode includes an ohmic contact layer that contacts the compound semiconductor layer, a first barrier layer on the ohmic contact layer, a conductive layer including copper on the first barrier layer, a second barrier layer on the conductive layer, and a bonding layer on the second barrier layer.

## Claims

### Claim 1

A semiconductor light-emitting device, comprising:
an electrode layer;
a light-emitting structure, the light-emitting structure comprising a plurality of semiconductor layers wherein an uppermost layer of the plurality of semiconductor layers comprises a N type semiconductor layer;
a channel layer along an edge of the electrode layer and having a top surface and a bottom surface opposite to each other and parallel to each other;
an adhesion layer under the electrode layer; and
an electrode on the light-emitting structure, wherein the electrode comprises:
an ohmic contact layer that directly contacts a top surface of the N-type semiconductor layer;
a first barrier layer on the ohmic contact layer;
a conductive layer comprising copper on the first barrier layer;
a second barrier layer on the conductive layer; and
a bonding layer on the second barrier layer, wherein the top surface of the channel layer is spaced apart from a side surface of the uppermost layer of the plurality of semiconductor layers, and wherein at least a portion of the top surface of the channel layer extends horizontally from a side surface of the light-emitting structure toward a side surface of the adhesion layer.

### Claim 2 (depends on 1)

The semiconductor light-emitting device according to claim 1, further comprising:
a roughness pattern on the top surface of the plurality of semiconductor layers.

### Claim 3 (depends on 2)

The semiconductor light-emitting device according to claim 2, wherein the ohmic contact layer is formed to correspond to the roughness pattern.

### Claim 4 (depends on 1)

The semiconductor light-emitting device according to claim 1, wherein the ohmic contact layer comprises at least one selected from a group consisting of Cr, Cr-alloy, Al, Al-alloy, Ti, Ti-alloy, Ag, Ag-alloy, Ni, and Ni-alloy.

### Claim 5 (depends on 1)

The semiconductor light-emitting device according to claim 1, wherein the ohmic contact layer is formed of a multi-layer structure having a reflective metal as an upper layer.

### Claim 6 (depends on 1)

The semiconductor light-emitting device according to claim 1, wherein the first barrier layer is formed of at least one of Ni, Ni-alloy, Ti, or Ti-alloy.

### Claim 7 (depends on 6)

The semiconductor light-emitting device according to claim 6, wherein the first barrier layer is formed to a thickness of about 10 nm to about 500 nm.

### Claim 8 (depends on 1)

The semiconductor light-emitting device according to claim 1, wherein the conductive layer is formed of Cu or Cu-alloy.

### Claim 9 (depends on 8)

The semiconductor light-emitting device according to claim 8, wherein the conductive layer is formed to a thickness of about 500 nm to about 5000 nm.

### Claim 10 (depends on 1)

The semiconductor light-emitting device according to claim 1, wherein the second barrier layer is formed of at least one of Ni, Ni-alloy, Ti, or Ti-alloy.

### Claim 11 (depends on 1)

The semiconductor light-emitting device according to claim 1, wherein the bonding layer is a single-layer or multi-layer structure formed of Au, Al, Cu, or Cu-alloy.

### Claim 12 (depends on 1)

The semiconductor light-emitting device according to claim 1, wherein the bonding layer is formed to a thickness of about 500 nm to about 3000 nm.

### Claim 13

A semiconductor light-emitting device, comprising:
an electrode layer;
a light-emitting structure above the electrode layer, the light-emitting structure comprising a plurality of semiconductor layers;
a channel layer along an edge of the electrode layer and having a top surface and a bottom surface opposite to each other and parallel to each other;
an adhesion layer under the electrode layer; and
an electrode on the light-emitting structure, wherein the electrode comprises:
an ohmic contact layer that contacts a top surface of the plurality of semiconductor layers and comprising a single layer including Ti;
a first barrier layer on the ohmic contact layer;
a conductive layer comprising copper on the first barrier layer;
a second barrier layer on the conductive layer; and
a bonding layer on the second barrier layer, wherein an uppermost layer of the plurality of semiconductor layers comprises a N type semiconductor layer, and wherein the ohmic contact layer directly contacts a surface of the N type semiconductor layer thereof, and wherein at least a portion of the top surface of the channel layer extends horizontally from a side surface of the light-emitting structure toward a side surface of the adhesion layer.

### Claim 14

A semiconductor light-emitting device, comprising:
an electrode layer;
a light-emitting structure above the electrode layer, the light-emitting structure comprising a plurality of semiconductor layers;
an electrode on the light-emitting structure, wherein the electrode comprises:
an ohmic contact layer that contacts a top surface of the plurality of semiconductor layers;
a first barrier layer on the ohmic contact layer;
a conductive layer comprising copper on the first barrier layer;
a second barrier layer on the conductive layer; and
a bonding layer on the second barrier layer,
an adhesion layer under the electrode layer;
an ohmic layer between the electrode layer and the plurality of semiconductor layers;
a channel layer along a bottom edge of the plurality of semiconductor layers; and
a current blocking layer between the ohmic layer and the plurality of semiconductor layers, wherein the current blocking layer is formed of a non-metal material having an electrical conductivity lower than the ohmic layer.

### Claim 15 (depends on 14)

The semiconductor light-emitting device according to claim 14, wherein the channel layer comprises at least one of a transparent oxide material, a transparent nitride material, or a transparent insulating material.

### Claim 16 (depends on 14)

The semiconductor light-emitting device according to claim 14, wherein an inner portion of a bottom surface of the channel layer contacts the ohmic layer, and an outer portion of the bottom surface of the channel layer contacts at least one of the electrode layer or the adhesion layer.

### Claim 17 (depends on 14)

The semiconductor light-emitting device according to claim 14, further comprising:
a capping layer under the channel layer, wherein a bottom surface of the capping layer contacts at least one of the electrode layer or the adhesion layer.

### Claim 18 (depends on 17)

The semiconductor light-emitting device according to claim 17, wherein the capping layer comprises a mixed metal of one or more selected from a group consisting of Ti, Ni, Pt, Pd, Cu, Al, Ir, and Rh.

### Claim 19 (depends on 1)

A semiconductor light-emitting device package comprising the light emitting device of claim 1.

### Claim 20 (depends on 1)

The semiconductor light-emitting device according to claim 1, wherein the first and second barrier layers include substantially the same material.
