# US 8,772,796 B2 · Panel and method for fabricating the same

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- Number: US 8,772,796 B2
- Document ID: US8772796B2
- Status: Granted
- Kind: B2
- Application number: 13/483,005
- Filed: 2012-05-29
- Published: 2013-07-04
- Granted: 2014-07-08
- Earliest claimed: 2011-12-30
- Assignees: Au Optronics Corporation
- Applicants: Kuo-Yu Huang; Te-Chun Huang
- Inventors: Kuo-Yu Huang; Te-Chun Huang
- Web page: https://patentgrep.com/patent/US8772796B2

## CPC

- H10D 86/60: wherein the TFTs are in active matrices
- H10D 86/0231: {using masks, e.g. half-tone masks}
- H10D 86/441: {Interconnections, e.g. scanning lines}
- H10D 86/451: {characterised by the compositions or shapes of the interlayer dielectrics}
- H10D 86/481: {integrated with passive devices, e.g. auxiliary capacitors}
- H10H 29/142: {Two-dimensional arrangements, e.g. asymmetric LED layout}
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10H: INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS

## Abstract

A panel is disclosed, in which, a patterned semiconductor layer is formed on an insulation layer. The patterned semiconductor layer includes a portion corresponding to an electrode and another portion corresponding to a wiring trace. The portion corresponding to the electrode may be formed as, for example, a channel, and the other portion corresponding to the wiring trace may protect the wiring trace during fabrication process or in the structure from scratching or corrosion.

## Claims

### Claim 1

A panel, comprising:
a substrate defined with a pixel region and a wiring region on at least one side of the pixel region;
a first patterned conductive layer disposed on the substrate, wherein the first patterned conductive layer comprises at least one first electrode line, at least one first electrode, and at least one wiring trace, the first electrode and the first electrode line are connected to each other and both disposed in the pixel region, and the wiring trace is disposed in the wiring region;
a first insulation layer disposed to cover the pixel region, the wiring region, and the first patterned conductive layer;
a second patterned conductive layer disposed on the first insulation layer, the second patterned conductive layer comprising at least one second electrode disposed on the first insulation layer in the pixel region;
a second insulation layer disposed to cover the second electrode in the pixel region, the wiring region, and the first insulation layer above the wiring trace;
a patterned semiconductor layer disposed on the second insulation layer, the patterned semiconductor layer comprising at least one first portion corresponding to the first electrode and at least one second portion corresponding to the wiring trace;
a third patterned conductive layer disposed on the second insulation layer, the third patterned conductive layer comprising at least one second electrode line, at least one third electrode connected to the second electrode line, and at least one fourth electrode, wherein the third electrode, the second electrode line, and the fourth electrode are disposed in the pixel region, the first electrode, the first portion of the patterned semiconductor layer, and the third electrode are disposed to form a transistor, and the fourth electrode and the second electrode are correspondingly disposed to form a storage capacitor;
a protection layer disposed to cover the third patterned conductive layer and the second insulation layer in the pixel region; and
a patterned conductive film disposed on the protection layer in the pixel region, the patterned conductive film comprising at least one pixel electrode connected to the transistor and the storage capacitor.

### Claim 2 (depends on 1)

The panel according to claim 1, wherein the wiring trace is connected to the first electrode line or the second electrode line.

### Claim 3 (depends on 1)

The panel according to claim 1, wherein
the substrate further comprises a contact pad region;
the first patterned conductive layer further comprises at least one first contact pad disposed on the contact pad region and the first contact pad is connected to the wiring trace;
the second insulation layer further disposed on the contact pad region;
the third patterned conductive layer further comprises at least one second contact pad disposed on the second insulation layer in the contact pad region, the at least one second contact pad connected to the first contact pad through an opening in the second insulation layer; and
the patterned conductive film further comprises at least one third portion apart from the pixel electrode, the third portion disposed to cover the second contact pad, wherein the patterned semiconductor layer is not in the contact pad region.

### Claim 4

A panel, comprising:
a substrate defined with a pixel region and a wiring region on at least one side of the pixel region;
a first patterned conductive layer disposed on the substrate, wherein the first patterned conductive layer comprises at least one first electrode line, at least one first electrode connected to the first electrode line, and at least one first wiring trace, the first electrode and the first electrode line are in the pixel region, and the at least one first wiring trace is in the wiring region;
a first insulation layer disposed to cover the pixel region, the wiring region, and the first patterned conductive layer;
a second patterned conductive layer disposed on the first insulation layer, the second patterned conductive layer comprising at least one second electrode disposed on the first insulation layer in the pixel region and at least one second wiring trace in the wiring region;
a second insulation layer disposed to cover the second electrode in the pixel region, the wiring region, the first insulation layer above the first wiring trace, and the second wiring trace;
a patterned semiconductor layer disposed on the second insulation layer, the patterned semiconductor layer comprising at least one first portion corresponding to the first electrode and at least one second portion corresponding to the second wiring trace;
a third patterned conductive layer disposed on the second insulation layer, wherein, the third patterned conductive layer comprises at least one second electrode line, at least one third electrode connected to the second electrode line, and at least one fourth electrode, wherein the third electrode, the second electrode line, and the fourth electrode are in the pixel region, the first electrode, the first portion of the patterned semiconductor layer and the third electrode are disposed to form a transistor, and the fourth electrode and the second electrode are correspondingly disposed to form a storage capacitor;
a protection layer disposed to cover the third patterned conductive layer and the second insulation layer in the pixel region; and
a patterned conductive film disposed on the protection layer in the pixel region, and the patterned conductive film comprising at least one pixel electrode connected to the transistor and the storage capacitor.

### Claim 5 (depends on 4)

The panel according to claim 4, wherein the protection layer further covers the second portion of the patterned semiconductor layer in the wiring region and the second insulation layer in the wiring region, the protection layer in the pixel region has a first thickness, the protection layer in the wiring region has a second thickness, and the first thickness is substantially greater than the second thickness.

### Claim 6 (depends on 4)

The panel according to claim 4, wherein the patterned semiconductor layer further comprises at least one third portion disposed on the second insulation layer corresponding to the first wiring trace.

### Claim 7 (depends on 4)

The panel according to claim 4, wherein
the substrate further comprises a contact pad region;
the first patterned conductive layer further comprises at least one first contact pad disposed in the contact pad region;
the second patterned conductive layer further comprises at least one second contact pad disposed in the contact pad region;
the second insulation layer is further disposed in the contact pad region;
the third patterned conductive layer further comprises at least one third contact pad and at least one fourth contact pad, the third contact pad disposed in the contact pad region and connected to the first contact pad through a first opening in the second insulation layer, the fourth contact pad disposed in the contact pad region and connected to the second contact pad through a second opening in the second insulation layer; and
the patterned conductive film further comprises at least one third portion and at least one fourth portion, the third portion disposed to cover the third contact pad, the fourth portion disposed to cover the fourth contact pad, and the pixel electrode, the third portion and the fourth portion being apart from each other.

### Claim 8 (depends on 5)

The panel according to claim 5, wherein,
the substrate further comprises a contact pad region;
the first patterned conductive layer further comprises at least one first contact pad disposed in the contact pad region;
the second patterned conductive layer further comprises at least one second contact pad disposed in the contact pad region;
the second insulation layer is further disposed in the contact pad region;
the patterned semiconductor layer is further disposed on the second insulation layer in the contact pad region to form a first ring structure and a second ring structure;
the third patterned conductive layer further comprises at least one third contact pad and at least one fourth contact pad, the third contact pad disposed in the contact pad region and connected to the first contact pad through a first opening in the first ring structure and in the second insulation layer, the fourth contact pad disposed in the contact pad region and connected to the second contact pad through a second opening in the second ring structure and in the second insulation layer; and
the patterned conductive film further comprises at least one third portion and at least one fourth portion, the third portion disposed to cover the third contact pad, the fourth portion disposed to cover the fourth contact pad, and the pixel electrode, the third portion and the fourth portion being apart from each other.

### Claim 9

A method of fabricating a panel, comprising:
providing a substrate defined with a pixel region and a wiring region on at least one side of the pixel region;
forming a first patterned conductive layer on the substrate, wherein the first patterned conductive layer comprises at least one first electrode line, a first electrode connected to the at least one first electrode line, and at least one wiring trace, the first electrode and the first electrode line are disposed in the pixel region, and the wiring trace is disposed in the wiring region;
forming a first insulation layer covering the pixel region, the wiring region, and the first patterned conductive layer;
forming a second patterned conductive layer on the first insulation layer, the second patterned conductive layer comprising at least one second electrode disposed on the first insulation layer in the pixel region;
forming a second insulation layer covering the second electrode in the pixel region, the wiring region, and the first insulation layer above the wiring trace;
forming a patterned semiconductor layer on the second insulation layer, the patterned semiconductor layer comprising at least one first portion corresponding to the first electrode and at least one second portion corresponding to the wiring trace;
forming a third patterned conductive layer disposed on the second insulation layer, the third patterned conductive layer comprising at least one second electrode line, at least one third electrode connected to the second electrode line, and at least one fourth electrode, wherein the third electrode, the second electrode line, and the fourth electrode are disposed in the pixel region, the first electrode, the first portion of the patterned semiconductor layer, and the third electrode are disposed to form a transistor, and the fourth electrode and the second electrode are correspondingly disposed to form a storage capacitor;
forming a protection layer covering the third patterned conductive layer and the second insulation layer in the pixel region; and
forming a patterned conductive film on the protection layer in the pixel region, the patterned conductive film comprising at least one pixel electrode connected to the transistor and the storage capacitor.

### Claim 10 (depends on 9)

The method of fabricating the panel according to claim 9, wherein
the substrate further comprises a contact pad region;
the first patterned conductive layer further comprises at least one first contact pad disposed on the contact pad region;
the third patterned conductive layer further comprises at least one second contact pad disposed on the contact pad region and connected to the first contact pad through an opening in the second insulation layer; and
the patterned conductive film further comprises at least one third portion apart from the pixel electrode, the third portion disposed to cover the second contact pad, wherein the patterned semiconductor layer is not in the contact pad region.

### Claim 11 (depends on 9)

The method of fabricating the panel according to claim 9, wherein the wiring trace is connected to the first electrode line or the second electrode line.

### Claim 12 (depends on 9)

The method of fabricating the panel according to claim 9, wherein steps of forming the protection layer covering the third patterned conductive layer and the second insulation layer in the pixel region and forming the patterned conductive film on the protection layer in the pixel region, the patterned conductive film comprising the at least one pixel electrode connected to the transistor and the storage capacitor, comprise:
forming a passivation layer on the third patterned conductive layer;
forming a photosensitive organic layer on the passivation layer, wherein the passivation layer and the photosensitive organic layer are adapted to formed a stack structure as the protection layer;
performing a photolithography process on the photosensitive organic layer to expose two portions of the passivation layer located above the transistor and the storage capacitor respectively;
performing an etch process to remove the passivation layer not covered with the photosensitive organic layer to form a contact window exposing a portion of the storage capacitor and to allow the protection layer to only cover the third patterned conductive layer and the second insulation layer in the pixel region; and
forming the patterned conductive film on the protection layer in the pixel region, the patterned conductive film comprising the pixel electrode connected to the storage capacitor through the contact window.

### Claim 13

A method of fabricating a panel, comprising:
providing a substrate defined with a pixel region and a wiring region on at least one side of the pixel region;
forming a first patterned conductive layer disposed on the substrate, wherein the first patterned conductive layer comprises at least one first electrode line, at least one first electrode connected to the first electrode line, and at least one first wiring trace, wherein the first electrode and the first electrode line are in the pixel region, and the at least one first wiring trace is in the wiring region;
forming a first insulation layer covering the pixel region, the wiring region, and the first patterned conductive layer;
forming a second patterned conductive layer on the first insulation layer, the second patterned conductive layer comprising at least one second electrode disposed on the first insulation layer in the pixel region and at least one second wiring trace in the wiring region;
forming a second insulation layer covering the second electrode in the pixel region, the wiring region, the first insulation layer above the first wiring trace, and the second wiring trace;
forming a patterned semiconductor layer on the second insulation layer, the patterned semiconductor layer comprising at least one first portion corresponding to the first electrode and at least one second portion corresponding to the second wiring trace;
forming a third patterned conductive layer on the second insulation layer, wherein the third patterned conductive layer comprises at least one second electrode line, at least one third electrode connected to the second electrode line, and at least one fourth electrode, wherein the third electrode, the second electrode line, and the fourth electrode are in the pixel region, the first electrode, the first portion of the patterned semiconductor layer and the third electrode are disposed to form a transistor, and the fourth electrode and the second electrode are correspondingly disposed to form a storage capacitor;
forming a protection layer covering the third patterned conductive layer and the second insulation layer in the pixel region; and
forming a patterned conductive film disposed on the protection layer in the pixel region, and the patterned conductive film comprising at least one pixel electrode connected to the transistor and the storage capacitor.

### Claim 14 (depends on 13)

The method of fabricating the panel according to claim 13, wherein the protection layer is disposed to further cover the second portion of the patterned semiconductor layer in the wiring region and the second insulation layer in the wiring region, the protection layer in the pixel region has a first thickness, the protection layer in the wiring region has a second thickness, and the first thickness is substantially greater than the second thickness.

### Claim 15 (depends on 13)

The method of fabricating the panel according to claim 13, wherein the patterned semiconductor layer further comprises at least one third portion disposed on the second insulation layer corresponding to the first wiring trace.

### Claim 16 (depends on 13)

The method of fabricating the panel according to claim 13, wherein
the substrate further comprises a contact pad region;
the first patterned conductive layer further comprises one first contact pad disposed in the contact pad region;
the second patterned conductive layer further comprises one second contact pad disposed in the contact pad region;
the third patterned conductive layer further comprises a third contact pad and a fourth contact pad, the third contact pad disposed in the contact pad region and connected to the first contact pad through a first opening in the second insulation layer, the fourth contact pad disposed in the contact pad region and connected to the second contact pad through a second opening in the second insulation layer; and
the patterned conductive film further comprises a third portion and a fourth portion, the third portion disposed to cover the third contact pad, the fourth portion disposed to cover the fourth contact pad, and the pixel electrode, the third portion and the fourth portion being apart from each other.

### Claim 17 (depends on 14)

The method of fabricating the panel according to claim 14, wherein
the substrate further comprises a contact pad region;
the first patterned conductive layer further comprises at least one first contact pad disposed in the contact pad region;
the second patterned conductive layer further comprises at least one second contact pad disposed in the contact pad region;
the second insulation layer is further disposed on the contact pad region;
the patterned semiconductor layer is further disposed on the second insulation layer in the contact pad region to form a first ring structure and a second ring structure;
the third patterned conductive layer further comprises at least one third contact pad and at least one fourth contact pad, the third contact pad disposed in the contact pad region and connected to the first contact pad through a first opening in the second insulation layer and the first ring structure, the fourth contact pad disposed in the contact pad region and connected to the second contact pad through a second opening in the second insulation layer and the second ring structure; and
the patterned conductive film further comprises at least one third portion and at least one fourth portion, the third portion disposed to cover the third contact pad, the fourth portion disposed to cover the fourth contact pad, and the pixel electrode, the third portion and the fourth portion being apart from each other.

### Claim 18 (depends on 13)

The method of fabricating the panel according to claim 13, wherein steps of forming the protection layer covering the third patterned conductive layer and the second insulation layer in the pixel region and forming the patterned conductive film on the protection layer in the pixel region, the patterned conductive film comprising the at least one pixel electrode connected to the transistor and the storage capacitor, comprise:
forming a passivation layer on the third patterned conductive layer;
forming a photosensitive organic layer on the passivation layer, wherein the passivation layer and the photosensitive organic layer are adapted to formed a stack structure as the protection layer;
performing a photolithography process on the photosensitive organic layer to expose two portions of the passivation layer located above the transistor and the storage capacitor respectively;
performing an etch process to remove the passivation layer not covered with the photosensitive organic layer to form a contact window exposing a portion of the storage capacitor; and
forming the patterned conductive film on the protection layer in the pixel region, the patterned conductive film comprising the pixel electrode connected to the storage capacitor through the contact window.