# US 8,772,777 B2 · Organic light-emitting display device and method of manufacturing the same

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- Number: US 8,772,777 B2
- Document ID: US8772777B2
- Status: Granted
- Kind: B2
- Application number: 13/158,632
- Filed: 2011-06-13
- Published: 2012-06-07
- Granted: 2014-07-08
- Earliest claimed: 2010-12-03
- Assignees: Samsung Display Co., Ltd.
- Applicants: June-Woo Lee; Sung-Ho Kim
- Inventors: June-Woo Lee; Sung-Ho Kim
- Web page: https://patentgrep.com/patent/US8772777B2

## CPC

- H10D 86/0231: {using masks, e.g. half-tone masks}
- H10K 59/121: characterised by the geometry or disposition of pixel elements
- H10K 59/124: Insulating layers formed between TFT elements and OLED elements
- H10K 59/879: {comprising refractive means, e.g. lenses}
- H10K 59/1201: {Manufacture or treatment}
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES

## Abstract

In an organic light-emitting display device and a method of manufacturing the same, the organic light-emitting display device comprises: a substrate in which a light-emitting region and a thin-film transistor (TFT) region are defined; and a plurality of insulating films formed on the substrate. A refractive index changes at only one of the interfaces between insulating films, which correspond to the light-emitting region and are formed between the substrate and a first electrode of an organic electroluminescence display element, and a refractive index changes at two or more of the interfaces between insulating films which correspond to the TFT region.

## Claims

### Claim 1

An organic light-emitting display device, comprising:
a substrate in which a light-emitting region and a thin-film transistor (TFT) region are defined; and
a plurality of insulating films formed on the substrate,
wherein a refractive index changes at only one of interfaces between insulating films, which correspond to the light-emitting region and which are formed between the substrate and a first electrode of an organic electroluminescence display element, and a refractive index changes at at least two interfaces between insulating films which correspond to the TFT region.

### Claim 2 (depends on 1)

The display device of claim 1, wherein the TFT region of the substrate comprises:
a first insulating film formed on the substrate;
a semiconductor layer formed on the first insulating film;
a second insulating film formed on the semiconductor layer;
a gate electrode formed on the second insulating film;
a third insulating film formed on the gate electrode;
source and drain electrodes formed on the third insulating film; and
a fourth insulating film formed on the source and drain electrodes.

### Claim 3 (depends on 2)

The display device of claim 2, wherein the first insulating film comprises a first sub-insulating film and a second sub-insulating film formed sequentially on the substrate, wherein the first sub-insulating film is made of one of SiNx and SiON, and the second sub-insulating film is made of SiO2.

### Claim 4 (depends on 3)

The display device of claim 3, wherein the second insulating film comprises a third sub-insulating film and a fourth sub-insulating film formed sequentially on the semiconductor layer, wherein the third sub-insulating film is made of SiO2, and the fourth sub-insulating film is made of one of SiNx, SiON, and a high-k film.

### Claim 5 (depends on 4)

The display device of claim 4, wherein the third insulating film comprises a fifth sub-insulating film and a sixth sub-insulating film formed sequentially on the gate electrode, wherein the fifth sub-insulating film is made of SiO2, and the sixth sub-insulating film is made of one of SiNx and SiON.

### Claim 6 (depends on 5)

The display device of claim 5, wherein the third sub-insulating film directly contacts the substrate in the light-emitting region.

### Claim 7 (depends on 6)

The display device of claim 6, wherein the fifth sub-insulating film directly contacts the third sub-insulating film in the light-emitting region.

### Claim 8 (depends on 7)

The display device of claim 7, wherein the refractive index changes only at an interface between the fifth sub-insulating film and the sixth sub-insulating film disposed between the substrate and the first electrode of the organic electroluminescence display element in the light-emitting region.

### Claim 9 (depends on 4)

The display device of claim 4, wherein the fourth sub-insulating film has a same pattern shape as the gate electrode.

### Claim 10 (depends on 4)

The display device of claim 4, wherein the substrate further comprises a capacitor region, and wherein the capacitor region comprises:
the first and second sub-insulating films formed on the substrate;
a capacitor first electrode formed on the second sub-insulating film;
the third and fourth sub-insulating films formed on the capacitor first electrode; and
a capacitor second electrode formed on the fourth sub-insulating film.

### Claim 11 (depends on 3)

The display device of claim 3, wherein the first sub-insulating film and the second sub-insulating film have a same pattern shape as the semiconductor layer.

### Claim 12 (depends on 3)

The display device of claim 3, wherein the first and second sub-insulating films comprise regions which protrude from sidewalls of the semiconductor layer.

### Claim 13

A method of manufacturing an organic light-emitting display device, the method comprising the steps of:
sequentially forming a first insulating film, which comprises a stack of a first sub-insulating film and a second sub-insulating film, and a film for forming a semiconductor layer on a substrate in which a light-emitting region and a TFT region are defined;
forming a first photoresist pattern on the film for forming the semiconductor layer;
etching the film for forming the semiconductor layer, the second sub-insulating film, and the first sub-insulating film using the first photoresist pattern as an etch mask;
removing the first photoresist pattern and then sequentially forming a second insulating film, which comprises a stack of a third sub-insulating film and a fourth sub-insulating film, and a conductive film for forming a gate electrode on an entire surface of the substrate having a semiconductor layer;
forming a second photoresist pattern on the conductive film for forming the gate electrode; and
etching the conductive film for forming the gate electrode and the fourth sub-insulating film using the second photoresist pattern as an etch mask.

### Claim 14 (depends on 13)

The method of claim 13, wherein the first sub-insulating film is made of one of SiNx and SiON, the second and third sub-insulating films are made of SiO2, and the fourth sub-insulating film is made of one of SiNx, SiON, and a high-k film.

### Claim 15 (depends on 14)

The method of claim 14, wherein the first photoresist pattern comprises a first region and a second region having different thicknesses, wherein the first region is thicker than the second region, the first region corresponds to a region in which the semiconductor layer is formed, and the second region corresponds to the TFT region excluding the light-emitting region.

### Claim 16 (depends on 14)

The method of claim 14, further comprising:
removing the second photoresist pattern and then forming a third insulating film, which comprises a stack of a fifth sub-insulating film and a sixth sub-insulating film, on the entire surface of the substrate having a gate electrode;
forming source and drain electrodes on the sixth sub-insulating film; and
forming a fourth insulating film on the entire surface of the substrate having the source and drain electrodes.

### Claim 17 (depends on 16)

The method of claim 16, wherein the fifth sub-insulating film is made of SiO2, and the sixth sub-insulating film and the fourth insulating film are made of one of SiNx and SiON.

### Claim 18 (depends on 16)

An organic light-emitting display device fabricated by the method of claim 16, wherein a refractive index changes at only one of interfaces between insulating films, which correspond to the light-emitting region and which are formed between the substrate and a first electrode of an organic electroluminescence display element, and a refractive index changes at at least two interfaces between insulating films which correspond to the TFT region.

### Claim 19 (depends on 16)

An organic light-emitting display device fabricated by the method of claim 16, wherein the TFT region of the substrate comprises:
the first insulating film formed on the substrate;
the semiconductor layer formed on the first insulating film;
the second insulating film formed on the semiconductor layer;
the gate electrode formed on the second insulating film;
a third insulating film formed on the gate electrode;
source and drain electrodes formed on the third insulating film; and
a fourth insulating film formed on the source and drain electrodes.

### Claim 20 (depends on 15)

The method of claim 15, wherein the first photoresist pattern is formed using a slit mask or a halftone mask.
