# US 8,772,773 B2 · Display device including protective circuit > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,772,773 B2 - Document ID: US8772773B2 - Status: Granted - Kind: B2 - Application number: 12/553,122 - Filed: 2009-09-03 - Published: 2010-03-18 - Granted: 2014-07-08 - Earliest claimed: 2008-09-12 - Assignees: Semiconductor Energy Laboratory Co., Ltd. - Applicants: Shunpei Yamazaki; Kengo Akimoto; Shigeki Komori; Hideki Uochi; Tomoya Futamura; Takahiro Kasahara - Inventors: Shunpei Yamazaki; Kengo Akimoto; Shigeki Komori; Hideki Uochi; Tomoya Futamura; Takahiro Kasahara - Web page: https://patentgrep.com/patent/US8772773B2 ## CPC - H01L 27/1214 - H01L 29/7869 - H01L 27/1225 - H01L ## Abstract A protective circuit includes a non-linear element, which includes a gate electrode, a gate insulating layer covering the gate electrode, a pair of first and second wiring layers whose end portions overlap with the gate electrode over the gate insulating layer and in which a second oxide semiconductor layer and a conductive layer are stacked, and a first oxide semiconductor layer which overlaps with at least the gate electrode and which is in contact with the gate insulating layer, side face portions and part of top face portions of the conductive layer and side face portions of the second oxide semiconductor layer in the first wiring layer and the second wiring layer. Over the gate insulating layer, oxide semiconductor layers with different properties are bonded to each other, whereby stable operation can be performed as compared with Schottky junction. Thus, the junction leakage can be decreased and the characteristics of the non-linear element can be improved. ## Claims ### Claim 1 A display device comprising: a scan line and a signal line intersecting with each other over a substrate having an insulating surface; a pixel portion including a pixel electrode and a transistor, wherein the transistor comprises: a gate electrode electrically connected to the scan line; a channel formation region including a fourth oxide semiconductor layer; a first wiring layer electrically connected to the signal line and the fourth oxide semiconductor layer; and a second wiring layer electrically connected to the pixel electrode and the fourth oxide semiconductor layer; a non-linear element between the pixel portion and a signal input terminal disposed at a periphery of the substrate, wherein the non-linear element comprises: a gate electrode electrically connected to the scan line or the signal line; a gate insulating layer covering the gate electrode; a second oxide semiconductor layer over the gate insulating layer; a third oxide semiconductor layer over the gate insulating layer; a first conductive layer over the gate insulating layer with the second oxide semiconductor layer positioned therebetween; a second conductive layer over the gate insulating layer with the third oxide semiconductor layer positioned therebetween; and a first oxide semiconductor layer in contact with a top surface and a side surface of each of the first conductive layer and the second conductive layer, wherein the second conductive layer of the non-linear element is electrically connected to the gate electrode via a third wiring layer, and wherein a part of the second conductive layer is surrounded by the first conductive layer when seen from above. ### Claim 2 (depends on 1) A display device according to claim 1, wherein bottom surfaces of the second oxide semiconductor layer and the third oxide semiconductor layer are in contact with the gate insulating layer, wherein a top surface of the second oxide semiconductor layer is in contact with the first conductive layer, wherein a top surface of the third oxide semiconductor layer is in contact with the second conductive layer, and wherein an oxygen concentration of the first oxide semiconductor layer is higher than an oxygen concentration of the second oxide semiconductor layer. ### Claim 3 (depends on 1) A display device according to claim 1, wherein a bottom surface bottom surfaces of the second oxide semiconductor layer and the third oxide semiconductor layer are in contact with the gate insulating layer, wherein a top surface of the second oxide semiconductor layer is in contact with the first conductive layer, wherein a top surface of the third oxide semiconductor layer is in contact with the second conductive layer, wherein the first oxide semiconductor layer has an amorphous structure and the second oxide semiconductor layer includes a nanocrystal in an amorphous structure, and wherein an electrical conductivity of the first oxide semiconductor layer is lower than an electrical conductivity of the second oxide semiconductor layer. ### Claim 4 (depends on 1) A display device according to claim 1, wherein bottom surfaces of the second oxide semiconductor layer and the third oxide semiconductor layer are in contact with the gate insulating layer, wherein a top surface of the second oxide semiconductor layer is in contact with the first conductive layer, wherein a top surface of the third oxide semiconductor layer is in contact with the second conductive layer, and wherein the first oxide semiconductor layer is oxygen-excess type and the second oxide semiconductor layer is oxygen-deficiency type. ### Claim 5 (depends on 1) A display device according to claim 1, wherein bottom surfaces of the second oxide semiconductor layer and the third oxide semiconductor layer are in contact with the gate insulating layer, wherein a top surface of the second oxide semiconductor layer is in contact with the first conductive layer, wherein a top surface of the third oxide semiconductor layer is in contact with the second conductive layer, and wherein the first oxide semiconductor layer and the second oxide semiconductor layer include indium, gallium, and zinc. ### Claim 6 (depends on 1) A display device according to claim 1, wherein the third wiring layer comprises the same material as the pixel electrode. ### Claim 7 (depends on 1) A display device according to claim 1, wherein the display device is incorporated in one selected from the group consisting of a poster, an advertisement, an electronic book, a television device, a digital photo frame, a game machine and a phone. ### Claim 8 (depends on 1) A display device according to claim 1, wherein bottom surfaces of the second oxide semiconductor layer and the third oxide semiconductor layer are in contact with the gate insulating layer, wherein a top surface of the second oxide semiconductor layer is in contact with the first conductive layer, and wherein a top surface of the third oxide semiconductor layer is in contact with the second conductive layer. ### Claim 9 (depends on 1) A display device according to claim 1, wherein bottom surfaces of the second oxide semiconductor layer and the third oxide semiconductor layer are in contact with the gate insulating layer, wherein a top surface of the second oxide semiconductor layer is in contact with the first conductive layer, wherein a top surface of the third oxide semiconductor layer is in contact with the second conductive layer, and wherein a side surface of the second oxide semiconductor layer is in contact with the first oxide semiconductor layer. ### Claim 10 (depends on 1) A display device according to claim 1, wherein the first conductive layer includes a U-shaped portion when seen from above. ### Claim 11 A display device comprising: a scan line and a signal line intersecting with each other over a substrate having an insulating surface; a pixel portion including a pixel electrode and a transistor, wherein the transistor comprises: a gate electrode electrically connected to the scan line; a channel formation region including a fourth oxide semiconductor layer; a first wiring layer electrically connected to the signal line and the fourth oxide semiconductor layer; and a second wiring layer electrically connected to the pixel electrode and the fourth oxide semiconductor layer; a protective circuit including a non-linear element over the substrate and outside the pixel portion, wherein the protective circuit connects the scan line and a common wiring to each other or connects the signal line and the common wiring to each other, and wherein the non-linear element comprises: a gate electrode; a gate insulating layer covering the gate electrode; a second oxide semiconductor layer over the gate insulating layer; a third oxide semiconductor layer over the gate insulating layer; a first conductive layer over the gate insulating layer with the second oxide semiconductor layer positioned therebetween; a second conductive layer over the gate insulating layer with the third oxide semiconductor layer positioned therebetween; and a first oxide semiconductor layer in contact with a top surface and a side surface of each of the first conductive layer and the second conductive layer, wherein the second conductive layer is electrically connected to the gate electrode of the non-linear element via a third wiring layer, and wherein a part of the second conductive layer is surrounded by the first conductive layer when seen from above. ### Claim 12 (depends on 11) A display device according to claim 11, wherein bottom surfaces of the second oxide semiconductor layer and the third oxide semiconductor layer are in contact with the gate insulating layer, wherein a top surface of the second oxide semiconductor layer is in contact with the first conductive layer, wherein a top surface of the third oxide semiconductor layer is in contact with the second conductive layer, and wherein an oxygen concentration of the first oxide semiconductor layer is higher than an oxygen concentration of the second oxide semiconductor layer. ### Claim 13 (depends on 11) A display device according to claim 11, wherein bottom surfaces of the second oxide semiconductor layer and the third oxide semiconductor layer are in contact with the gate insulating layer, wherein a top surface of the second oxide semiconductor layer is in contact with the first conductive layer, wherein a top surface of the third oxide semiconductor layer is in contact with the second conductive layer, wherein the first oxide semiconductor layer has an amorphous structure and the second oxide semiconductor layer includes a nanocrystal in an amorphous structure, and wherein an electrical conductivity of the first oxide semiconductor layer is lower than an electrical conductivity of the second oxide semiconductor layer. ### Claim 14 (depends on 11) A display device according to claim 11, wherein bottom surfaces of the second oxide semiconductor layer and the third oxide semiconductor layer are in contact with the gate insulating layer, wherein a top surface of the second oxide semiconductor layer is in contact with the first conductive layer, wherein a top surface of the third oxide semiconductor layer is in contact with the second conductive layer, and wherein the first oxide semiconductor layer is oxygen-excess type and the second oxide semiconductor layer is oxygen-deficiency type. ### Claim 15 (depends on 11) A display device according to claim 11, wherein bottom surfaces of the second oxide semiconductor layer and the third oxide semiconductor layer are in contact with the gate insulating layer, wherein a top surface of the second oxide semiconductor layer is in contact with the first conductive layer, wherein a top surface of the third oxide semiconductor layer is in contact with the second conductive layer, and wherein the first oxide semiconductor layer and the second oxide semiconductor layer include indium, gallium, and zinc. ### Claim 16 (depends on 11) A display device according to claim 11, wherein the third wiring layer comprises the same material as the pixel electrode. ### Claim 17 (depends on 11) A display device according to claim 11, wherein the display device is incorporated in one selected from the group consisting of a poster, an advertisement, an electronic book, a television device, a digital photo frame, a game machine and a phone. ### Claim 18 (depends on 11) A display device according to claim 11, wherein bottom surfaces of the second oxide semiconductor layer and the third oxide semiconductor layer are in contact with the gate insulating layer, wherein a top surface of the second oxide semiconductor layer is in contact with the first conductive layer, and wherein a top surface of the third oxide semiconductor layer is in contact with the second conductive layer. ### Claim 19 (depends on 11) A display device according to claim 11, wherein bottom surfaces of the second oxide semiconductor layer and the third oxide semiconductor layer are in contact with the gate insulating layer, wherein a top surface of the second oxide semiconductor layer is in contact with the first conductive layer, wherein a top surface of the third oxide semiconductor layer is in contact with the second conductive layer, and wherein a side surface of the second oxide semiconductor layer is in contact with the first oxide semiconductor layer. ### Claim 20 (depends on 11) A display device according to claim 11, wherein the first conductive layer includes a U-shaped portion when seen from above. ### Claim 21 A display device comprising: a protective circuit including a non-linear element over a substrate, wherein the non-linear element comprises: a gate electrode; a gate insulating layer covering the gate electrode; a second oxide semiconductor layer over the gate insulating layer; a third oxide semiconductor layer over the gate insulating layer; a first conductive layer over the gate insulating layer with the second oxide semiconductor layer positioned therebetween; a second conductive layer over the gate insulating layer with the third oxide semiconductor layer positioned therebetween; and a first oxide semiconductor layer in contact with a top surface and a side surface of each of the first conductive layer and the second conductive layer, wherein the second conductive layer is electrically connected to the gate electrode of the non-linear element via a wiring layer, and wherein a part of the second conductive layer is surrounded by the first conductive layer when seen from above. ### Claim 22 (depends on 21) A display device according to claim 21, wherein bottom surfaces of the second oxide semiconductor layer and the third oxide semiconductor layer are in contact with the gate insulating layer, wherein a top surface of the second oxide semiconductor layer is in contact with the first conductive layer, wherein a top surface of the third oxide semiconductor layer is in contact with the second conductive layer, and wherein an oxygen concentration of the first oxide semiconductor layer is higher than an oxygen concentration of the second oxide semiconductor layer. ### Claim 23 (depends on 21) A display device according to claim 21, wherein bottom surfaces of the second oxide semiconductor layer and the third oxide semiconductor layer are in contact with the gate insulating layer, wherein a top surface of the second oxide semiconductor layer is in contact with the first conductive layer, wherein a top surface of the third oxide semiconductor layer is in contact with the second conductive layer, wherein the first oxide semiconductor layer has an amorphous structure and the second oxide semiconductor layer includes a nanocrystal in an amorphous structure, and wherein an electrical conductivity of the first oxide semiconductor layer is lower than an electrical conductivity of the second oxide semiconductor layer. ### Claim 24 (depends on 21) A display device according to claim 21, wherein bottom surfaces of the second oxide semiconductor layer and the third oxide semiconductor layer are in contact with the gate insulating layer, wherein a top surface of the second oxide semiconductor layer is in contact with the first conductive layer, wherein a top surface of the third oxide semiconductor layer is in contact with the second conductive layer, and wherein the first oxide semiconductor layer is oxygen-excess type and the second oxide semiconductor layer is oxygen-deficiency type. ### Claim 25 (depends on 21) A display device according to claim 21, wherein bottom surfaces of the second oxide semiconductor layer and the third oxide semiconductor layer are in contact with the gate insulating layer, wherein a top surface of the second oxide semiconductor layer is in contact with the first conductive layer, wherein a top surface of the third oxide semiconductor layer is in contact with the second conductive layer, and wherein the first oxide semiconductor layer and the second oxide semiconductor layer include indium, gallium, and zinc. ### Claim 26 (depends on 21) A display device according to claim 21, wherein the wiring layer comprises the same material as a pixel electrode. ### Claim 27 (depends on 21) A display device according to claim 21, wherein the display device is incorporated in one selected from the group consisting of a poster, an advertisement, an electronic book, a television device, a digital photo frame, a game machine and a phone. ### Claim 28 (depends on 21) A display device according to claim 21, wherein bottom surfaces of the second oxide semiconductor layer and the third oxide semiconductor layer are in contact with the gate insulating layer, wherein a top surface of the second oxide semiconductor layer is in contact with the first conductive layer, and wherein a top surface of the third oxide semiconductor layer is in contact with the second conductive layer. ### Claim 29 (depends on 21) A display device according to claim 21, wherein bottom surfaces of the second oxide semiconductor layer and the third oxide semiconductor layer are in contact with the gate insulating layer, wherein a top surface of the second oxide semiconductor layer is in contact with the first conductive layer, wherein a top surface of the third oxide semiconductor layer is in contact with the second conductive layer, and wherein a side surface of the second oxide semiconductor layer is in contact with the first oxide semiconductor layer. ### Claim 30 (depends on 21) A display device according to claim 21, wherein the first conductive layer includes a U-shaped portion when seen from above.