# US 8,772,155 B2 · Filling cavities in semiconductor structures having adhesion promoting layer in the cavities

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- Number: US 8,772,155 B2
- Document ID: US8772155B2
- Status: Granted
- Kind: B2
- Application number: 12/948,897
- Filed: 2010-11-18
- Published: 2012-05-24
- Granted: 2014-07-08
- Earliest claimed: 2010-11-18
- Assignees: Micron Technology, Inc.
- Applicants: Shai Haimson; Avi Rozenblat; Dror Horvitz; Maor Rotlain; Rotem Drori
- Inventors: Shai Haimson; Avi Rozenblat; Dror Horvitz; Maor Rotlain; Rotem Drori
- Web page: https://patentgrep.com/patent/US8772155B2

## CPC

- H10W 70/635: {Through-vias}
- H10W 20/035: {combinations of barrier, adhesion or liner layers, e.g. multi-layered barrier layers}
- H10W 20/054: {by selectively removing parts thereof (H10W20/034 takes precedence)}
- H10W 20/056: {by filling conductive material into holes, grooves or trenches}
- H10W 20/40: Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10

## Abstract

High aspect ratio trenches may be filled with metal that grows more from the bottom than the top of the trench. As a result, the tendency to form seams or to close off the trench at the top during filling may be reduced in some embodiments. Material that encourages the growth of metal may be formed in the trench at the bottom, while leaving the region of the trench near the top free of such material to encourage growth upwardly from the bottom.

## Claims

### Claim 1

A method comprising:
lining a cavity with a lining material;
depositing a metal nucleation layer on the lining material;
removing the lining material and metal nucleation layer from a portion of a sidewall of the cavity; and
after removing the lining material and metal nucleation layer from the portion of the sidewall of the cavity, depositing a metallic material in the cavity covering the lining material, metal nucleation layer, and the portion of the sidewall, the metallic material adjacent to the lining material and substantially filling the cavity.

### Claim 2 (depends on 1)

The method of claim 1, further comprising forming the cavity in a dielectric material, wherein the metallic material contacts the dielectric material at the portion of the sidewall.

### Claim 3 (depends on 1)

The method of claim 1, wherein the lining material is a material that promotes adhesion by the metallic material.

### Claim 4 (depends on 1)

The method of claim 1, wherein depositing the metallic material in the cavity comprises selectively depositing the metallic material.

### Claim 5 (depends on 1)

The method of claim 1, wherein the lining material comprises titanium nitride.

### Claim 6 (depends on 1)

The method of claim 1, wherein removing the lining material from a portion of a sidewall of the cavity comprises one of pattern dependent etching or polishing.