# US 8,772,078 B1 · Method and system for laser separation for exclusion region of multi-junction photovoltaic materials > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,772,078 B1 - Document ID: US8772078B1 - Status: Granted - Kind: B1 - Application number: 12/389,188 - Filed: 2009-02-19 - Granted: 2014-07-08 - Earliest claimed: 2008-03-03 - Assignees: Stion Corporation - Applicants: Chester A. Farris, III - Inventors: Chester A. Farris, III - Web page: https://patentgrep.com/patent/US8772078B1 ## CPC - H10F 19/30: comprising thin-film photovoltaic cells - B23K 26/0622: by shaping pulses - B23K 26/08: Devices involving relative movement between laser beam and workpiece - B23K 26/16: Removal of by-products, e.g. particles or vapours produced during treatment of a workpiece (by a fluid stream B23K26/142) - B23K 26/361: for deburring or mechanical trimming (B23K26/351 takes precedence) - B23K 26/40: taking account of the properties of the material involved - B23K 2101/40: Semiconductor devices - B23K 2103/172: {wherein at least one of the layers is non-metallic} - B23K 2103/50: {Inorganic materials other than metals or composite materials} - Y02E 10/50: Photovoltaic [PV] energy - H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION - B23K: SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM - Y02E: REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION ## Abstract A method for laser separation of a thin film structure with multi junction photovoltaic materials. The method includes providing an optically transparent substrate having a thickness, a back surface region, and a front surface region including an edge region. The method further includes forming a thin film structure including a conductive layer on the optical transparent substrate. The conductive layer immediately overlies the front surface region. Additionally, the method includes aligning a laser beam with a beam spot on a first portion of the edge region from the back surface region through the thickness of the optically transparent substrate. The method further includes subjecting at least partially the conductive layer overlying the first portion via absorbed energy from the laser beam to separate an edge portion of the thin film structure from the first portion of the edge region. ## Claims ### Claim 1 A method for processing a thin film device by laser separation, the method comprising: providing an optically transparent substrate having a thickness, a back surface region, a front surface region, and an edge region; forming a thin film device on the optically transparent substrate, the thin film device including a conductive layer overlying the front surface region and an edge portion overlying the edge region; covering the back surface region except an exposed area along the edge region; aligning a laser beam from the back surface region through the thickness of the optically transparent substrate to irradiate a first spot within the edge region; energy from the laser beam thereby selectively removing part of the edge portion to form a remaining side wall portion to expose at least the conductive layer, a P-type semiconductor layer overlying the conductive layer, a N-type semiconductor layer overlying the P-type semiconductor layer, and an electrode layer overlying the N-type semiconductor layer, exposed edges of the plurality of layers being substantially free from residue particles; and scanning the laser beam along the exposed area. ### Claim 2 (depends on 1) The method of claim 1 wherein the optically transparent substrate comprises one of glass, acrylic, quartz, or fused silica which is transparent at least to light with wavelengths from 400 nm to 1200 nm. ### Claim 3 (depends on 1) The method of claim 1 wherein the exposed area has a width of about 1 centimeter from a nearest edge of the back surface region and a length up to a periphery of the back surface region. ### Claim 4 (depends on 1) The method of claim 1 wherein the step of covering the back surface region comprises disposing a sheet material on the back surface that is opaque to light with wavelengths ranging from 400 nm to 1200 nm. ### Claim 5 (depends on 1) The method of claim 1 wherein aligning a laser beam from the back surface region comprises placing a laser source near the back surface region and directing the laser beam in a direction substantially perpendicular to the back surface. ### Claim 6 (depends on 5) The method of claim 5 wherein the laser beam is provided by a Q switched mode-locked Nd:YAG laser source characterized by an output wavelength range from 500 nm to 1200 nm, a homogeneous top-hat beam intensity profile with a spot size about 3 mm and more, an energy density of about 50 W/cm2, a pulse length ranging from nanoseconds to milliseconds, and a tunable pulse duration ranging from 10 microseconds to 1 millisecond. ### Claim 7 (depends on 1) The method of claim 1 wherein the step of aligning a laser beam from the back surface region through the thickness of the optically transparent substrate to irradiate a first spot within the edge region comprises: subjecting the conductive layer within the first spot to absorbed energy from the laser beam: at least partially converting the absorbed energy from the laser beam to latent heat of sublimation of the conductive layer; and breaking apart the first portion of the thin film structure above the first spot of the edge region. ### Claim 8 (depends on 1) The method of claim 1 wherein scanning the laser beam along the exposed area comprises redirecting the laser beam with an optical system or moving a stage supporting the optically transparent substrate with a robot relative to the laser beam. ### Claim 9 (depends on 8) The method of claim 8 wherein scanning the laser beam comprises moving a beam spot step by step, wherein the laser beam irradiates materials within the beam spot for a time period of a laser pulse length at each step before moving to an immediate next step within a time period of a laser pulse duration, the beam spot at each step spatially overlaps about 10-30% with the beam spot at the immediate next step. ### Claim 10 (depends on 9) The method of claim 9 further comprising cleaning the edge region and the side wall of remaining portion of the thin film device with a vacuum head. ### Claim 11 (depends on 1) The method of claim 1 further comprising processing the conductive layer and the electrode layer to connect them with electric connectors producing electrical coupling to which other thin film devices may be connected, and then applying an encapsulating material over the thin film device. ### Claim 12 A method for processing a thin film device having a conductive layer and an edge region on an optically transparent substrate comprising: covering a back surface of the optically transparent substrate except an exposed area along the edge region; aligning a laser beam from the back surface of the optically transparent substrate to irradiate a spot within the edge region; energy from the laser beam thereby selectively removing part of the edge region to form a remaining side wall portion exposing at least the conductive layer, a P-type semiconductor layer overlying the conductive layer, a N-type semiconductor layer directly overlying the P-type semiconductor layer, and an electrode layer overlying the N-type semiconductor layer, exposed edges of the plurality of layers being substantially free from residue particles; and scanning the laser beam along the edge region. ### Claim 13 (depends on 12) The method of claim 12 wherein the optically transparent substrate comprises one of glass, acrylic, quartz, or fused silica being transparent at least to the laser beam. ### Claim 14 (depends on 12) The method of claim 12 wherein the step of aligning a laser beam comprises placing a laser source to output the laser beam substantially perpendicularly to the back surface region. ### Claim 15 (depends on 14) The method of claim 14 wherein the laser source comprises a Q switched mode-locked Nd:YAG laser source characterized by an output wavelength range from 500 nm to 1200 nm, a homogeneous top-hat beam intensity profile, and energy density of about 50 W/cm2. ### Claim 16 (depends on 14) The method of claim 14 wherein the laser source is a pulsed laser source with a pulse length ranging from nanoseconds to milliseconds and a pulse duration ranging from 10 microseconds to 1 milliseconds. ### Claim 17 (depends on 12) The method of claim 12 wherein the edge region comprises a width of about 1 centimeter from a nearest periphery edge of the optically transparent substrate. ### Claim 18 (depends on 12) The method of claim 12 wherein the conductive layer comprises one of a metal, a metal alloy, and a metal oxide. ### Claim 19 (depends on 12) The method of claim 12 wherein the thin film device comprises photovoltaic materials overlying the conductive layer. ### Claim 20 (depends on 19) The method of claim 19 wherein the photovoltaic materials comprise at least one of single crystal silicon, poly-crystal silicon, amorphous silicon, semiconducting metallic oxides, compound semiconductor including copper indium diselenide (CIS), Copper Indium Gallium Selenide (CIGS) Cadium Telluride (CdTe), and nano-structured materials. ### Claim 21 (depends on 12) The method of claim 12 further comprising cleaning the thin film device to remove residues. ### Claim 22 (depends on 12) The method of claim 12 further comprises scanning the laser beam along the edge region, wherein a beam spot at each step at least spatially overlaps a beam spot at an immediate last step by about 10-30%. ### Claim 23 (depends on 22) The method of claim 22 wherein the scanning comprises redirecting the laser beam with an optical system.