# US 8,772,076 B2 · Back contact diffusion barrier layers for group ibiiiavia photovoltaic cells

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- Number: US 8,772,076 B2
- Document ID: US8772076B2
- Status: Granted
- Kind: B2
- Application number: 12/875,669
- Filed: 2010-09-03
- Published: 2012-03-08
- Granted: 2014-07-08
- Earliest claimed: 2010-09-03
- Assignees: Solopower Systems, Inc.
- Applicants: Mustafa Pinarbasi; James Freitag; Jorge Vasquez
- Inventors: Mustafa Pinarbasi; James Freitag; Jorge Vasquez
- Web page: https://patentgrep.com/patent/US8772076B2

## CPC

- H10F 77/1699: {the films including Group I-III-VI materials, e.g. CIS or CIGS on metal foils or polymer foils}
- H10F 10/167: comprising Group I-III-VI materials, e.g. CdS/CuInSe2 [CIS] heterojunction photovoltaic cells
- H10F 77/126: {comprising only Group I-III-VI chalcopyrite materials, e.g. CuInSe2, CuGaSe2 or CuInGaSe2 [CIGS]}
- Y02E 10/541: CuInSe2 material PV cells
- Y02P 70/50: Manufacturing or production processes characterised by the final manufactured product
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- Y02E: REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02P: CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS

## Abstract

The present invention provides for new ohmic contact materials and diffusion barriers for Group IBIIIAVIA based solar cell structures, which eliminate two way diffusion while preserving the efficient ohmic contacts between the substrate and the absorber layers.

## Claims

### Claim 1

A method of manufacturing a Cu(In,Ga) Se2 thin-film solar cell, comprising:
forming an intermediate layer on a surface of a flexible conductive substrate, the flexible conductive substrate including iron (Fe) species, the step of forming the intermediate layer comprising:
forming a conductive barrier stack on the surface of the flexible conductive substrate, the conductive barrier stack including a chromium (Cr) film applied to the surface of the flexible conductive substrate and a titanium nitride (TiN) film deposited on the Cr film;
depositing a contact layer on the conductive barrier stack;
depositing a nucleation layer on the contact layer;
depositing an absorber precursor including Cu species, In species, Ga species and Se species over the nucleation layer;
applying heat to the absorber precursor to form therefrom an absorber layer including a Cu(In,Ga) Se2 compound, wherein the step of forming the absorber layer causes some of the Fe species in the flexible substrate to diffuse towards the absorber layer and some of the Se species in the absorber layer to diffuse towards the flexible conductive substrate, and wherein the conductive barrier stack inhibits diffusion of both the iron (Fe) species and the Se species across the conductive barrier stack during the step of applying heat;
disposing a transparent conductive layer on the absorber layer, the transparent conductive layer including a buffer layer deposited on the absorber layer and a transparent conductive oxide layer formed on the buffer layer;
forming a top terminal on the transparent conductive layer, thereby resulting in the Cu(In,Ga) Se2 thin-film solar cell; and
wherein after the step of forming, the conductive barrier stack continues to inhibit diffusion of both the iron (Fe) species and the Se species across the conductive barrier stack.

### Claim 2 (depends on 1)

The method of claim 1, wherein the contact layer includes one of molybdenum (Mo), tungsten (W) and titanium (Ti) and tantalum (Ta).

### Claim 3 (depends on 2)

The method of claim 2 further comprising depositing a second titanium nitride (TiN) film on the contact layer prior to depositing a nucleation layer on the contact layer.

### Claim 4 (depends on 3)

The method of claim 3 further comprising depositing a second contact layer on the second titanium nitride (TiN) film prior to depositing a nucleation layer on the contact layer.

### Claim 5 (depends on 1)

The method of claim 1, wherein the conductive barrier stack is formed using a physical vapor deposition technique.

### Claim 6 (depends on 1)

The method of claim 1, wherein the step of forming the absorber precursor comprises: electroplating a film stack including at least a copper (Cu) film, an indium (In) film and a gallium (Ga) film; depositing a selenium (Se) film on the film stack using one of an electroplating process and a vapor deposition process.

### Claim 7 (depends on 1)

The method of claim 1, wherein the buffer layer includes CdS and the transparent conductive oxide layer includes ZnO.

### Claim 8 (depends on 1)

The method of claim 1 further comprising depositing a seed layer over the nucleation layer, wherein the seed layer is a copper (Cu) layer.

### Claim 9 (depends on 8)

The method of claim 8, wherein the seed layer has a thickness in the range of 2-100 nm.

### Claim 10 (depends on 1)

The method of claim 1, wherein the chromium (Cr) film has a thickness in the range of 50-100 nm.

### Claim 11 (depends on 1)

The method of claim 1, wherein the titanium nitride (TiN) film has a thickness in the range of 200-400 nm.

### Claim 12 (depends on 1)

The method of claim 1, wherein the contact layer has a thickness in the range of 400-1000 nm.

### Claim 13 (depends on 1)

The method of claim 1, wherein the nucleation layer has a thickness in the range of 1-300 nm.

### Claim 14 (depends on 1)

The method of claim 1 wherein the conductive barrier stack inhibits diffusion of both the iron (Fe) species and the Se species across the conductive barrier stack such that FeSe defects are eliminated.