# US 8,772,073 B2 · Integrated circuit manufacturing method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,772,073 B2 - Document ID: US8772073B2 - Status: Granted - Kind: B2 - Application number: 12/988,110 - Filed: 2009-04-14 - Published: 2011-02-17 - Granted: 2014-07-08 - Earliest claimed: 2008-04-18 - Assignees: NXP B.V. - Applicants: Viet Nguyen Hoang; Radu Surdeanu; Benoit Bataillou - Inventors: Viet Nguyen Hoang; Radu Surdeanu; Benoit Bataillou - Web page: https://patentgrep.com/patent/US8772073B2 ## CPC - H10F 39/024: {of coatings or optical elements} - H10F 39/8053: {Colour filters} - H10F 39/8067: {Reflectors} - H10P 95/062: {involving a dielectric removal step} - H10P 50/283: {by chemical means} - H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A method of providing a dielectric material (18) having regions (18′, 18″) with a varying thickness in an IC manufacturing process is disclosed. The method comprises forming a plurality of patterns in respective regions (20′, 20″) of the dielectric material (18), each pattern increasing the susceptibility of the dielectric material (18) to a dielectric material removal step by a predefined amount and exposing the dielectric material (18) to the dielectric material removal step. In an embodiment, the IC comprises a plurality of pixilated elements (12) and a plurality of light interference elements (24), each comprising a first mirror element (16) and a second mirror element (22), a region of the dielectric material (18) separating the first mirror element (16) and the second element (22), and each being arranged over one of said pixilated elements (12), the method further comprising forming the respective first mirror elements (16) in a dielectric layer (14) over a substrate (10) comprising the plurality of pixilated elements; depositing the dielectric material over the dielectric layer; and forming the respective second mirror elements such that each second mirror element is separated from a respective first mirror element by a region of the exposed dielectric material. Hence, an IC having a layer of a dielectric material (18) comprising regions of different thicknesses can be obtained requiring only a few process steps. ## Claims ### Claim 1 A method of providing a dielectric material having regions with respective different thicknesses in an integrated circuit manufacturing process, the method comprising: forming a plurality of concurrently-residing patterns in respective regions of the dielectric material, each pattern configured and arranged for setting the susceptibility of the dielectric material to a dielectric material removal step by a predefined amount whereby the plurality of concurrently-residing patterns correspond to the respective different thicknesses; and exposing the dielectric material to the dielectric material removal step, and using concurrently-residing the patterns to provide the respective different thicknesses; wherein the step of exposing the dielectric material to the dielectric removal step provides a first removal rate in certain regions of the dielectric material and a second rate, lower than the first removal rate, in other regions of the dielectric material. ### Claim 2 (depends on 1) A method according to claim 1, wherein the integrated circuit comprises a plurality of pixilated elements and a plurality of light interference elements, each of said light interference elements being arranged over one of said pixilated elements, each light interference element comprising a first mirror element and a second mirror element, a region of the dielectric material separating the first mirror element and the second element, the method further comprising: forming the respective first mirror elements in a dielectric layer over a substrate comprising the plurality of pixilated elements; depositing the dielectric material over the dielectric layer; and forming the respective second mirror elements such that each second mirror element is separated from a respective first mirror element by a region of the exposed dielectric material. ### Claim 3 (depends on 2) A method according to claim 2, wherein the step of forming the respective second mirror elements comprises forming the second mirror elements in the dielectric material. ### Claim 4 (depends on 2) A method according to claim 2, wherein the step of forming the respective second mirror elements comprises forming the second mirror elements over the dielectric material. ### Claim 5 (depends on 1) A method according to claim 1, wherein the dielectric material removal step comprises a planarization step. ### Claim 6 (depends on 5) A method according to claim 5, wherein the planarization step is a chemical mechanical planarization step. ### Claim 7 (depends on 1) A method according to claim 1, wherein each of said patterns comprises a plurality of recesses with a predefined recess density for setting the susceptibility of the dielectric material to the dielectric material removal step by the predefined amount, whereby the dielectric material removal step, as concurrently applied to each of said patterns, results in the dielectric material having the respective regions with different thicknesses. ### Claim 8 (depends on 2) A method according to claim 2, wherein the plurality of light interference elements are arranged to act as a plurality of color filters. ### Claim 9 (depends on 2) A method according to claim 2 wherein the light interference elements are Fabry-Perot interferometers. ### Claim 10 (depends on 2) A method according to claim 2 wherein the first mirror element comprises a first metal. ### Claim 11 (depends on 2) A method according to claim 2, wherein the second mirror element comprises a second metal. ### Claim 12 (depends on 1) An integrated circuit manufactured by the method of claim 1. ### Claim 13 A method of providing a dielectric material having regions with respective different thicknesses in an integrated circuit manufacturing process, the method comprising: providing a plurality of pixilated elements in a substrate and covering the substrate with a dielectric layer; forming a plurality of first mirror elements in the dielectric layer; depositing a dielectric material over the dielectric layer; patterning a plurality of regions of the dielectric material to set the susceptibility of the dielectric material to a dielectric material removal step by a predefined amount; exposing the dielectric material to the dielectric material removal step, and using the patterns concurrently provided to provide the respective different thicknesses; and depositing a plurality of second mirror elements on the dielectric material. ### Claim 14 (depends on 13) The method according to claim 13, wherein the plurality of pixilated elements are photodiodes. ### Claim 15 A method of providing a dielectric material having regions with respective different thicknesses in an integrated circuit manufacturing process, the method comprising: providing a plurality of pixilated elements in a substrate and covering the substrate with a dielectric layer; forming a plurality of first mirror elements in the dielectric layer; depositing a dielectric material over the dielectric layer; patterning a plurality of regions of the dielectric material to set the susceptibility of the dielectric material to a dielectric material removal step by a predefined amount; exposing the dielectric material to the dielectric material removal step to provide the dielectric material with regions of respective different thicknesses; and depositing a plurality of second mirror elements on the dielectric material, wherein the step of exposing the dielectric material to the dielectric removal step provides a first removal rate in the patterned regions of the dielectric material and a second lower rate in unpatterned regions of the dielectric material. ### Claim 16 (depends on 13) The method according to claim 13 further comprising a step of depositing a planarization layer after the step of depositing a plurality of second mirror elements. ### Claim 17 (depends on 1) The method according to claim 1, wherein the second rate is a lower rate than the first rate, and wherein the step of exposing the dielectric material to the dielectric removal step provides a first removal rate in the patterned regions of the dielectric material and a second rate, different than the first removal rate, in unpatterned regions of the dielectric material. ### Claim 18 (depends on 2) A method according to claim 2, wherein the step of forming the respective second mirror elements comprises forming the second mirror elements in the dielectric material, and wherein the step of exposing the dielectric material to the dielectric removal step provides a first removal rate in certain regions of the dielectric material and a second rate, lower than the first removal rate, in other regions of the dielectric material. ### Claim 19 (depends on 2) A method according to claim 2, wherein the step of exposing the dielectric material to the dielectric removal step provides a first removal rate in certain regions of the dielectric material and a second rate, lower than the first removal rate, in other regions of the dielectric material, wherein the dielectric material removal step comprises a planarization step, wherein the step of forming the respective second mirror elements comprises forming the second mirror elements in the dielectric material.