# US 8,772,066 B2 · Method for hybrid encapsulation of an organic light emitting diode > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,772,066 B2 - Document ID: US8772066B2 - Status: Granted - Kind: B2 - Application number: 13/361,637 - Filed: 2012-01-30 - Published: 2012-08-09 - Granted: 2014-07-08 - Earliest claimed: 2011-02-08 - Assignees: Applied Materials, Inc. - Applicants: Jrjyan Jerry Chen; Soo Young Choi - Inventors: Jrjyan Jerry Chen; Soo Young Choi - Web page: https://patentgrep.com/patent/US8772066B2 ## CPC - H10K 50/8445: {multilayered coatings having a repetitive structure, e.g. having multiple organic-inorganic bilayers} - H10K 71/166: {using selective deposition, e.g. using a mask} - H10K 71/00: Manufacture or treatment specially adapted for the organic devices covered by this subclass - H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES ## Abstract Methods and apparatus for encapsulating organic light emitting diode (OLED) structures disposed on a substrate using a hybrid layer of material are provided. The processing parameters used during deposition of the hybrid layer of material allow control of the characteristics of the deposited hybrid layer. The hybrid layer may be deposited such that the layer has characteristics of an inorganic material in some sublayers of the hybrid layer and characteristics of an organic material in other sublayers of the hybrid layer. Use of the hybrid material allows OLED encapsulation using a single hard mask for the complete encapsulating process with low cost and without alignment issues present in conventional processes. ## Claims ### Claim 1 A method for forming an encapsulating layer on an organic light emitting diode (OLED) substrate, comprising: forming a first inorganic layer on a region of a substrate having an OLED structure disposed thereon; forming a hybrid layer in physical contact with the first inorganic layer, wherein the hybrid layer comprises: a first sublayer having a majority of inorganic materials and a minority of organic materials; a middle sublayer having a majority of organic materials and a minority of inorganic materials; and a second sublayer having a majority of inorganic materials and a minority of organic materials, wherein the first sublayer, the middle sublayer, and the second sublayer are formed by supplying a processing gas comprising a HMDSO gas during the formation of each of the first sublayer, the middle sublayer, and the second sublayer; and forming a second inorganic layer in physical contact with the hybrid layer. ### Claim 2 (depends on 1) The method of claim 1, wherein the hybrid layer comprises plasma-polymerized hexamethyldisiloxane (pp-HMDSO). ### Claim 3 (depends on 1) The method of claim 1, wherein the first sublayer is formed by providing an oxygen-containing gas to the HMDSO gas at a flow ratio of about 10 or greater. ### Claim 4 (depends on 3) The method of claim 3, wherein the middle sublayer is formed by providing an oxygen-containing gas to the HMDSO gas at a flow ratio of less than about 2. ### Claim 5 (depends on 4) The method of claim 4, wherein the second sublayer is formed by providing an oxygen-containing gas to the HMDSO gas at a flow ratio of about 10 or greater. ### Claim 6 (depends on 5) The method of claim 5, wherein the oxygen-containing gas is selected from a group consisting of oxygen gas and nitrous oxide gas. ### Claim 7 (depends on 1) The method of claim 1, wherein the first inorganic layer comprises material selected from a group consisting of silicon nitride, silicon oxynitride, silicon dioxide, aluminum oxide, and aluminum nitride. ### Claim 8 (depends on 1) The method of claim 1, further comprising positioning a mask on the substrate prior to forming the layers on the substrate, wherein each layer is formed through an opening in the mask. ### Claim 9 A method for forming an encapsulating layer on an organic light emitting diode (OLED) substrate, comprising: forming a first sublayer of a hybrid layer having a majority of inorganic materials and a minority of organic materials on a region of a substrate having an OLED structure disposed thereon by providing an oxygen-containing gas to a HMDSO gas at a flow ratio of about 10 or greater; forming a middle sublayer of the hybrid layer having a majority of organic materials and a minority of inorganic materials in physical contact with the first sublayer by decreasing the flow ratio of the oxygen-containing gas to the HMDSO gas to less than about 2; and forming a second sublayer of the hybrid layer having a majority of inorganic materials and a minority of organic materials in physical contact with the middle sublayer by increasing the flow ratio of the oxygen-containing gas to the HMDSO gas to about 10 or greater. ### Claim 10 (depends on 9) The method of claim 9, further comprising positioning a mask on the substrate prior to forming the sublayers on the substrate, wherein each sublayer is formed through an opening in the mask. ### Claim 11 (depends on 9) The method of claim 9, wherein the hybrid layer comprises plasma-polymerized hexamethyldisiloxane (pp-HMDSO). ### Claim 12 (depends on 9) The method of claim 9, wherein the oxygen-containing gas is selected from a group consisting of oxygen gas and nitrous oxide gas. ### Claim 13 A method for forming an encapsulating layer on an organic light emitting diode (OLED) substrate, comprising: forming a first inorganic layer on a region of a substrate having an OLED structure disposed thereon; forming a hybrid layer on the first inorganic layer, wherein the hybrid layer comprises: a first sublayer having a majority of inorganic materials and a minority of organic materials; a middle sublayer having a majority of organic materials and a minority of inorganic materials; and a second sublayer having a majority of inorganic materials and a minority of organic materials, wherein the first sublayer, the middle sublayer, and the second sublayer are all formed by supplying a processing gas comprising a HMDSO gas during the formation of each of the first sublayer, the middle sublayer, and the second sublayer; and forming a second inorganic layer on the hybrid layer.