# US 8,772,064 B2 · Group-III nitride semiconductor laser device, and method of fabricating group-III nitride semiconductor laser device

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- Number: US 8,772,064 B2
- Document ID: US8772064B2
- Status: Granted
- Kind: B2
- Application number: 13/289,507
- Filed: 2011-11-04
- Published: 2012-04-26
- Granted: 2014-07-08
- Earliest claimed: 2009-12-25
- Assignees: Sumitomo Electric Industries, Ltd.
- Applicants: Shimpei Takagi; Yusuke Yoshizumi; Koji Katayama; Masaki Ueno; Takatoshi Ikegami
- Inventors: Shimpei Takagi; Yusuke Yoshizumi; Koji Katayama; Masaki Ueno; Takatoshi Ikegami
- Web page: https://patentgrep.com/patent/US8772064B2

## CPC

- H01S 5/34333: {with a well layer based on Ga(In)N or Ga(In)P, e.g. blue laser}
- B82Y 20/00: Nanooptics, e.g. quantum optics or photonic crystals
- H01S 5/0202: {Cleaving}
- H01S 5/1082: {with a special facet structure, e.g. structured, non planar, oblique}
- H01S 5/1085: {Oblique facets}
- H01S 5/16: Window-type lasers, i.e. with a region of non-absorbing material between the active region and the reflecting surface (H01S5/14 takes precedence)
- H01S 5/320275: {semi-polar orientation}
- H01S 5/0014: {Measuring characteristics or properties thereof (measuring techniques per se G01J, G01K, G01N, G01R)}
- H01S 5/028: Coatings {; Treatment of the laser facets, e.g. etching, passivation layers or reflecting layers}
- H01S 5/04254: {characterised by the shape}
- H01S 2301/14: Semiconductor lasers with special structural design for lasing in a specific polarisation mode
- H01S: DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES

## Abstract

A method of fabricating a III-nitride semiconductor laser device includes: preparing a substrate having a hexagonal III-nitride semiconductor and having a semipolar primary surface; forming a substrate product having a laser structure, an anode electrode and a cathode electrode, the laser structure including a substrate and a semiconductor region formed on the semipolar primary surface; scribing a first surface of the substrate product in part in a direction of the a-axis of the hexagonal III-nitride semiconductor; and carrying out breakup of the substrate product by press against a second surface of the substrate product, to form another substrate product and a laser bar.

## Claims

### Claim 1

A method of fabricating a III-nitride semiconductor laser device, the method comprising the steps of:
preparing a substrate comprised of a hexagonal III-nitride semiconductor and having a semipolar primary surface;
forming a substrate product having a laser structure, an anode electrode and a cathode electrode, the laser structure including a substrate and a semiconductor region formed on the semipolar primary surface;
scribing a first surface of the substrate product in part in a direction of the a-axis of the hexagonal III-nitride semiconductor; and
carrying out breakup of the substrate product by press against a second surface of the substrate product, to form another substrate product and a laser bar,
the first surface being opposite to the second surface,
the semiconductor region being located between the second surface and the substrate,
the laser bar having first and second end faces, the first and second end faces extending from the first surface to the second surface, and the first and second end faces being made by the breakup,
the first and second end faces forming a laser cavity of the III-nitride semiconductor laser device,
the anode electrode and the cathode electrode being formed on the laser structure,
the semiconductor region comprising a first cladding layer comprised of a first conductivity type GaN-based semiconductor, a second cladding layer comprised of a second conductivity type GaN-based semiconductor, and an active layer provided between the first cladding layer and the second cladding layer,
the first cladding layer, the second cladding layer, and the active layer being arranged along an axis normal to the semipolar primary surface,
the active layer comprising a GaN-based semiconductor layer,
a c-axis of the hexagonal III-nitride semiconductor of the substrate being inclined at a finite angle ALPHA with respect to the normal axis toward an m-axis of the hexagonal III-nitride semiconductor,
the angle ALPHA being in one of a range of not less than 45 degrees and not more than 80 degrees and a range of not less than 100 degrees and not more than 135 degrees, and
the first and second end faces intersecting with an m-n plane defined by the normal axis and the m-axis of the hexagonal III-nitride semiconductor.

### Claim 2 (depends on 1)

The method according to claim 1, wherein an end face of the active layer in each of the first and second end faces makes an angle in a range of not less than (ALPHA-5) degrees and not more than (ALPHA+5) degrees with respect to a reference plane perpendicular to the m-axis of the substrate comprised of the hexagonal nitride semiconductor, and the angle is defined on a plane defined by the c-axis and the m-axis of the hexagonal III-nitride semiconductor.

### Claim 3 (depends on 1)

The method according to claim 1, wherein the angle ALPHA is in one of a range of not less than 63 degrees and not more than 80 degrees and a range of not less than 100 degrees and not more than 117 degrees.

### Claim 4 (depends on 1)

The method according to claim 1, wherein forming the substrate product comprises performing processing, such as slicing or grinding of the substrate, such that a thickness of the substrate becomes not more than 400 μm, and the first surface is composed of one of a processed surface made by the processing and a surface including an electrode formed on the processed surface.

### Claim 5 (depends on 1)

The method according to claim 1, wherein forming the substrate product comprises polishing the substrate so that a thickness of the substrate becomes not less than 50 μm and not more than 100 μm, and the first surface is composed of one of a polished surface formed by the polishing and a surface including an electrode formed on the polished surface.

### Claim 6 (depends on 1)

The method according to claim 1, wherein a recess of the laser structure reaches the semiconductor region.

### Claim 7 (depends on 1)

The method according to claim 1, wherein the scribing is carried out using a laser scriber, the scribing forms a scribed groove, and a length of the scribed groove is shorter than a length of an intersecting line between the first surface and an a-n plane defined by the normal axis and the a-axis of the hexagonal III-nitride semiconductor.

### Claim 8 (depends on 1)

The method according to claim 1, wherein the semipolar primary surface is any one of a {20-21} plane, a {10-11} plane, a {20-2-1} plane, and a {10-1-1} plane.

### Claim 9 (depends on 1)

The method according to claim 1, wherein the substrate is comprised of any one of GaN, AlGaN, AlN, InGaN, and InAlGaN.

### Claim 10 (depends on 1)

The method according to claim 1, wherein scribing the substrate product comprise forming scribed grooves at a pitch equal to a device width of the III-nitride semiconductor laser device,
the method further comprising the step of performing breakup of the laser bar to fabricate a III-nitride semiconductor laser device, the laser structure of the III-nitride semiconductor laser device having a pair of side faces for the III-nitride semiconductor laser device.

### Claim 11 (depends on 1)

The method according to claim 1, wherein scribing the substrate product comprises forming scribed grooves at a pitch equal to a multiple of a device width of the III-nitride semiconductor laser device,
the method further comprising a step of performing breakup of the laser bar to produce a III-nitride semiconductor laser device, the laser structure of the III-nitride semiconductor laser device having a pair of side faces for the III-nitride semiconductor laser device.

### Claim 12

A method of fabricating a III-nitride semiconductor laser device, the method comprising the steps of:
forming a substrate product having a laser structure, an anode electrode and a cathode electrode, the laser structure including a substrate comprised of a hexagonal III-nitride semiconductor and a semiconductor region formed on the semipolar primary surface of the substrate;
scribing a first surface of the substrate product to form an array of scribed grooves;
carrying out breakup of the substrate product by press against a first surface of the substrate product, to form another substrate product and a laser bar,
a c-axis of the hexagonal III-nitride semiconductor of the substrate being inclined at a finite angle ALPHA with respect to the normal axis toward an m-axis of the hexagonal III-nitride semiconductor,
the angle ALPHA being in one of a range of not less than 45 degrees and not more than 80 degrees and a range of not less than 100 degrees and not more than 135 degrees,
the semiconductor region comprising a first cladding layer of a first conductivity type GaN-based semiconductor, a second cladding layer of a second conductivity type GaN-based semiconductor, and an active layer provided between the first cladding layer and the second cladding layer,
the first cladding layer, the second cladding layer, and the active layer being arranged along a axis normal to the semipolar primary surface,
the laser bar having first and second end faces, the first and second end faces extending from the first surface to the second surface, and the first and second end faces being made by the breakup,
the first surface being opposite to the second surface,
the semiconductor region being located between the second surface and the substrate,
each of the scribed grooves extending along a plane that is defined by the normal axis and an a-axis of the hexagonal III-nitride semiconductor, and
the first and second end faces forming a laser cavity of the III-nitride semiconductor laser device.