Organoaminosilane precursors and methods for making and using same

A composition for the deposition of a silicon containing film comprising:

• an organoaminosilane having Formula A, B, and C or mixtures thereof:
• wherein R is independently selected from a C1 to C10 linear or branched alkyl group;
• a C3 to C10 cyclic alkyl group;
• a C5 to C10 aromatic group;
• a C3 to C10 saturated or unsaturated heterocyclic group;
• a linear or a branched C3 to C10 alkenyl group;
• a C1 to C10 alkoxy group;
• a C1 to C10 alkylamino group;
• and in Formula C, R can also be a silyl group with or without substituents;
• R1 is independently selected from a C3-C10 linear or branched alkyl group;
• a C3 to C10 cyclic alkyl group;
• a C5 to C10 aromatic group;
• a C3 to C10 saturated or unsaturated heterocyclic group;
• a hydrogen atom;
• a linear or a branched C3 to C10 alkenyl group;
• a C1 to C10 alkoxy group;
• a C1 to C10 alkylamino group;
• or a silyl group with substituents;
• and R2 represents a single bond;
• a saturated or unsaturated, linear or branched, substituted or unsubstituted, hydrocarbon chain wherein the number of carbon atoms ranges from 1 to 10;
• a saturated or unsaturated, carbocyclic or heterocyclic ring;
• SiR2;
• or SiH2, and wherein R and R1 in Formula A are also combinable to form a cyclic group;
• and
• a solvent selected from the group consisting of an ether, a tertiary amine, a nitrile, a tertiary amino ether, or mixtures thereof.

An organoaminosilane of following Formula A:

• wherein R is independently selected from a C1 to C10 linear or branched, alkyl group;
• a C3 to C10 cyclic alkyl group;
• a C5 to C10 aromatic group;
• a C3 to C10 saturated or unsaturated heterocyclic group;
• a linear or a branched C3 to C10 alkenyl group;
• a C1 to C10 alkoxy group;
• or a C1 to C10 alkylamino group;
• wherein R1 is independently selected from a C3 to C10 linear, branched alkyl group;
• a C3 to C10 cyclic alkyl group;
• a C5 to C10 aromatic group;
• a C3 to C10 saturated or unsaturated heterocyclic group;
• a hydrogen atom;
• a linear or a branched C3 to C10 alkenyl group;
• a C1 to C10 alkoxy group;
• or a C1 to C10 alkylamino group;
• and
• provided that R and R1 in Formula A are one selected from the group consisting of the following:
• (a) the organoaminosilane comprises 1-silyl-7-azaindole;
• (b) R and R1 are combined to form a 5 or 6 member heterocyclic substituted or unsubstituted, aliphatic ring and wherein the organoaminosilane comprises N-silyldecahydroquinoline;
• (c) R and R1 are the same substituents provided that both R and R1 are not one of the following groups:
• ethyl, isopropyl, tert-butyl, isobutyl, sec-butyl, n-butyl, t-pentyl, and sec-pentyl groups;
• or
• (d) R and R1 are different substituents.

An organoaminosilane of following Formula B:

• wherein R is selected from a C6 to C10 substituted aromatic group which is substituted with at least one substituent selected from the group consisting of an alkyl group, an alkenyl group, an amino group, and an alkoxy group or an unsubstituted aromatic group provided that R is not phenyl;
• a linear or a branched, substituted or unsubstituted C3 to C10 alkenyl group;
• a C1 to C10 alkoxyalkyl group;
• a C1 to C10 alkylamino or dialkylamino group;
• or a C4 to C10 linear or branched, substituted or unsubstituted alkyl group provided that R is not an unsubstituted tert-butyl, t-pentyl, or cyclohexyl group.