# US 8,771,525 B2 · Rotary nanotube bearing structure and methods for manufacturing and using the same

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 8,771,525 B2
- Document ID: US8771525B2
- Status: Granted
- Kind: B2
- Application number: 13/681,613
- Filed: 2012-11-20
- Published: 2013-04-25
- Granted: 2014-07-08
- Earliest claimed: 2008-02-14
- Assignees: The Charles Stark Draper Laboratory, Inc.
- Applicants: The Charles Stark Draper Laboratory, Inc.
- Inventors: David J. Carter; Marc S. Weinberg; Eugene Cook; Peter Miraglia
- Web page: https://patentgrep.com/patent/US8771525B2

## CPC

- B81C 1/00198: {comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements}
- F04B 19/006: {Micropumps (F04B43/043 and F04B43/095 take precedence)}
- F04D 13/00: Pumping installations or systems (controlling F04D15/00)
- F04D 25/00: Pumping installations or systems (controlling F04D27/00)
- F16C 33/04: Brasses; Bushes; Linings
- G01C 19/06: Rotors
- B81B 2201/0242: Gyroscopes
- B81B 2201/034: Electrical rotating micromachines
- Y10T 74/12: Gyroscopes
- B81C: PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS (making microcapsules or microballoons B01J13/02; processes or apparatus specially adapted for the manufacture or treatment of piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/01)
- F04B: POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS (machines for liquids, or pumps, of rotary-piston or oscillating-piston type F04C; non-positive-displacement pumps F04D; pumping of fluid by direct contact of another fluid or by using inertia of fluid to be pumped F04F)
- F04D: NON-POSITIVE-DISPLACEMENT PUMPS (engine fuel-injection pumps F02M; ion pumps H01J41/12; electrodynamic pumps H02K44/02)
- F16C: SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- G01C: MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY (measuring liquid level G01F; radio navigation, determining distance or velocity by use of propagation effects, e.g. Doppler effects, propagation time, of radio waves, analogous arrangements using other waves G01S)
- B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00)
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

In one embodiment, a rotary device includes a multiwall nanotube that extends substantially perpendicularly from a substrate. A rotor may be coupled to an outer wall of the multiwall nanotube, be spaced apart from the substrate, and be free to rotate around an elongate axis of the multiwall nanotube.

## Claims

### Claim 1

A method for fabricating a rotary device, comprising:
providing a multiwall nanotube on a substrate;
growing a conformal release layer on the substrate and around at least a portion of the multiwall nanotube, wherein the conformal release layer is grown after providing the multiwall nanotube on the substrate;
depositing rotor material on the conformal release layer and around at least a portion of the multiwall nanotube; and
removing at least a portion of the conformal release layer between surfaces of the substrate and the rotor material so as to space the rotor material from the substrate, but such that the rotor material remains coupled to the multiwall nanotube and is free to rotate about a long axis of the multiwall nanotube.

### Claim 2 (depends on 1)

The method of claim 1, wherein providing the multiwall nanotube comprises growing the multiwall nanotube on the substrate.

### Claim 3 (depends on 2)

The method of claim 2, wherein the multiwall nanotube is grown by PECVD on patterned catalyst particles.

### Claim 4 (depends on 1)

The method of claim 1, wherein providing the multiwall nanotube comprises welding an arc-deposited or laser-ablated multiwall nanotube to the substrate.

### Claim 5 (depends on 1)

The method of claim 1, wherein the release layer comprises silicon dioxide.

### Claim 6 (depends on 1)

The method of claim 1, wherein the release layer is grown by PECVD.

### Claim 7 (depends on 1)

The method of claim 1, wherein the rotor material comprises silicon.

### Claim 8 (depends on 1)

The method of claim 1, wherein the rotor material is deposited by thermal CVD.

### Claim 9 (depends on 1)

The method of claim 1, wherein the release layer is removed by etching the release layer with vapor hydrofluoric acid.

### Claim 10 (depends on 1)

The method of claim 1 further comprising patterning and etching the rotor material so as to shape the rotor material.

### Claim 11 (depends on 1)

The method of claim 1 further comprising patterning and etching drive electrodes on the rotor material.

### Claim 12 (depends on 1)

The method of claim 1 further comprising removing at least a portion of an outer wall of the multiwall nanotube located between the surfaces of the substrate and the rotor material.