# US 8,771,430 B2 · Method for drying a substrate > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,771,430 B2 - Document ID: US8771430B2 - Status: Granted - Kind: B2 - Application number: 14/028,571 - Filed: 2013-09-17 - Published: 2014-01-16 - Granted: 2014-07-08 - Earliest claimed: 2006-11-09 - Assignees: Invenpro (M) Sdn. Bhd. - Applicants: Invenpro (M) SDN. BHD. - Inventors: Kae Jeng Ng; Kien Hui Liang; Kien Yew Liang - Web page: https://patentgrep.com/patent/US8771430B2 ## CPC - B08B 3/10: with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration - H10P 72/0406: {for cleaning followed by drying, rinsing, stripping, blasting or the like} - H10P 72/0408: {for drying} - B08B: CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A method for drying a workpiece using an apparatus comprising a liquid bath for immersing said workpiece, a deionized water supply for supplying deionized water to said bath, a partially enclosed volume of heated inert gas located above said liquid bath and a heated inert gas supply for supplying heated inert gas. A first holder is used for holding said workpiece in said liquid bath with a vertical orientation between the first holder and said liquid bath and a second holder, comprising a horizontal member, that is able to hold said at least one workpiece in such a way as to substantially prevent said workpiece from sliding along said horizontal member. ## Claims ### Claim 1 A method for washing and drying at least one workpiece, said workpiece having a substantially circumferential opening at a center location defining an inner diameter of said workpiece, the method comprising: immersing said workpiece within liquid forming a liquid bath, wherein the liquid comprises deionized water; supplying heated inert gas to a partially enclosed volume above said liquid bath; holding said workpiece within said liquid bath with a vertical orientation using a first holder, and thereafter, drying said workpiece, said drying comprising separating said at least one workpiece from said liquid bath, said separating step comprising: providing a second holder, said second holder comprising a horizontal member, said horizontal member being structured to hold at least one workpiece in such a way as to substantially prevent said workpiece from sliding along said horizontal member, and moving said second holder laterally so that said at least one workpiece can be held on said horizontal member, wherein said moving laterally causes said horizontal member to penetrate the circumferential opening of said workpiece and causes said horizontal member to attach to said circumferential opening of said workpiece. ### Claim 2 (depends on 1) The method according to claim 1, wherein said first holder comprises a tray with a plurality of slots such that each slot is able to hold said at least one workpiece in such a way that the at least one workpiece will not tend to spontaneously move downwards or sideways in relation to said plurality of slots. ### Claim 3 (depends on 1) The method according to claim 1, wherein in the separating step: when moved in an upwards direction, the horizontal member contacts an upper part of said inner diameter of the circumferential opening of said at least one workpiece and causes said horizontal member to attach to said circumferential opening of said workpiece. ### Claim 4 (depends on 1) The method according to claim 1, further comprising using a vertical slider to control movement of the first holder. ### Claim 5 (depends on 1) The method according to claim 1, further comprising using a horizontal slider and a vertical slider to effect movement of said second holder. ### Claim 6 (depends on 1) The method according to claim 1, further comprising, raising said at least one workpiece at a substantially constant speed, provided by a transition of the workpiece between the first holder to the second holder. ### Claim 7 (depends on 1) The method according to claim 1, further comprising providing a heat source for heating said inert gas. ### Claim 8 (depends on 1) The method according to claim 1, further comprising providing said horizontal member with regularly spaced notches, each of said notches for holding said at least one workpiece. ### Claim 9 (depends on 1) The method according to claim 1, said drying further comprising operating said second holder so as to cause said workpiece to change from being in contact with said liquid to being in contact with said gas in a substantially vertical movement. ### Claim 10 (depends on 1) The method according to claim 1, further comprising operating said second holder so that it is able to secure said at least one workpiece as the workpiece is changed from being in contact with said liquid to being in contact with said gas in a substantially vertical movement. ### Claim 11 (depends on 1) The method according to claim 1, further comprising operating an apparatus in a manner to cause transfer of said workpiece from being in contact with said liquid to being in contact with said gas. ### Claim 12 (depends on 3) The method according to claim 3, further comprising using a vertical slider to control movement of the first holder. ### Claim 13 (depends on 3) The method according to claim 3, further comprising using a horizontal slider and a vertical slider to effect movement of said second holder. ### Claim 14 (depends on 3) The method according to claim 3, further comprising raising said at least one workpiece at a substantially constant speed, provided by a transition of the workpiece between the first holder to the second holder. ### Claim 15 (depends on 3) The method according to claim 3, further comprising providing a heat source for heating said inert gas. ### Claim 16 (depends on 3) The method according to claim 3, further comprising providing said horizontal member with regularly spaced notches, each of said notches for holding said at least one workpiece. ### Claim 17 (depends on 3) The method according to claim 3, said drying further comprising operating said second holder so as to cause said workpiece to change from being in contact with said liquid to being in contact with said gas in a substantially vertical movement. ### Claim 18 (depends on 3) The method according to claim 3, further comprising operating said second holder so that it is able to secure said at least one workpiece as the workpiece is changed from being in contact with said liquid to being in contact with said gas in a substantially vertical movement. ### Claim 19 (depends on 3) The method according to claim 3, further comprising operating an apparatus in a manner to cause transfer of said workpiece from being in contact with said liquid to being in contact with said gas. ### Claim 20 (depends on 3) The method according to claim 3, wherein said first holder comprises a tray with a plurality of slots such that each slot is able to hold said at least one workpiece in such a way that the at least one workpiece will not tend to spontaneously move downwards or sideways in relation to said plurality of slots.