# US 8,771,423 B2 · Low sloped edge ring for plasma processing chamber

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 8,771,423 B2
- Document ID: US8771423B2
- Status: Granted
- Kind: B2
- Application number: 13/649,196
- Filed: 2012-10-11
- Published: 2013-02-07
- Granted: 2014-07-08
- Earliest claimed: 2008-09-10
- Assignees: Applied Materials, Inc.
- Applicants: Applied Materials, Inc.
- Inventors: Changhun Lee; Michael D. Willwerth; Hoan Nguyen
- Web page: https://patentgrep.com/patent/US8771423B2

## CPC

- H10P 72/0421: {for drying etching}
- H01J 37/32623: {Mechanical discharge control means}
- H01J 37/32642: {Focus rings}
- H10P 72/7611: {characterised by edge profile or support profile}
- H10P 72/7616: {characterised by a coating, a hardness or a material}
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

Embodiments of a cover ring for use in a plasma processing chamber are provided. In one embodiment, a cover ring for use in a plasma processing chamber includes a ring-shaped body fabricated from a yttrium (Y) containing material. The body includes a bottom surface having an inner locating ring and an outer locating ring. The inner locating ring extends further from the body than the outer locating ring. The body includes an inner diameter wall having a main wall and a secondary wall separated by a substantially horizontal land. The body also includes a top surface having an outer sloped top surface meeting an inner sloped surface at an apex. The inner sloped surface defines an angle with a line perpendicular to a centerline of the body less than about 70 degrees.

## Claims

### Claim 1

A cover ring for use in a plasma processing chamber, comprising of:
a ring-shaped body fabricated from a yttrium (Y) containing material, the body comprising of:
a bottom surface having an inner locating ring and an outer locating ring, the inner locating ring extending further from the body than the outer locating ring, the inner locating ring having an inner wall, the inner wall facing a centerline of the ring-shaped body, wherein the outer locating ring has an outer wall defining an outer diameter of the cover ring, the outer wall of the outer locating ring is configured to cover an outer most diameter of a substrate support, the bottom of the outer locating ring extends below the bottom of the body but less than the bottom of the inner locating ring;
a notch defined in the bottom surface between the inner locating ring and the outer locating ring;
an inner diameter wall having a main wall and a secondary wall separated by a substantially horizontal land, the secondary wall having a diameter greater than the main wall less than the inner wall of the inner locating ring, and wherein the main wall is above the notch; and
a top surface having a substantially horizontal main top surface, and wherein the inner wall of the inner locating ring is radially inward of the main top surface, the outer locating ring is radially outward of the main top surface, a substantially horizontal inner top surface and the substantially horizontal land, the main top surface positioned outward of and above the inner top surface, the inner top surface positioned outward of and above the land, and wherein the secondary wall and the substantially horizontal land define a substrate-receiving pocket, and the inner and outer locating ring are radially outward of the substrate receiving step.

### Claim 2 (depends on 1)

The cover ring of claim 1, wherein the body is fabricated from bulk yttrium oxide (Y2O3).

### Claim 3 (depends on 1)

The cover ring of claim 1, wherein the body is fabricated from a material selected from a group consisting of yttrium metal, yttrium alloy, and yttrium doped materials.

### Claim 4 (depends on 1)

The cover ring of claim 1, wherein the inner diameter wall has a diameter from about 11.50 inches to about 11.75 inches.