# US 8,771,192 B2 · Ultrasonic sensor and electronic device

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- Number: US 8,771,192 B2
- Document ID: US8771192B2
- Status: Granted
- Kind: B2
- Application number: 13/093,021
- Filed: 2011-04-25
- Published: 2011-10-27
- Granted: 2014-07-08
- Earliest claimed: 2010-04-27
- Assignees: Seiko Epson Corporation
- Applicants: Kazuyuki Kano
- Inventors: Kazuyuki Kano
- Web page: https://patentgrep.com/patent/US8771192B2

## CPC

- A61B 8/5269: {involving detection or reduction of artifacts}
- A61B 8/02: Measuring pulse or heart rate
- A61B 8/04: Measuring blood pressure
- A61B 8/06: Measuring blood flow
- A61B 8/42: {Details of probe positioning or probe attachment to the patient}
- A61B 8/4227: {characterised by straps, belts, cuffs or braces}
- A61B 8/4455: {Features of the external shape of the probe, e.g. ergonomic aspects}
- A61B 8/56: {Details of data transmission or power supply}
- B06B 1/0629: {Square array}
- G01S 15/8915: {using a transducer array}
- G10K 11/004: {Mounting transducers, e.g. provided with mechanical moving or orienting device (mountings specially adapted to a particular sound-producing device, see the preceding groups G10K1/00 - G10K9/00, e.g. G10K1/26, G10K1/28, G10K9/22; arrangements of sonic watch equipment on submarines B63G8/39; buoys B63B22/00)}
- A61B: DIAGNOSIS; SURGERY; IDENTIFICATION (usefulness limited to only animals A61D)
- B06B: METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, {e.g.} FOR PERFORMING MECHANICAL WORK IN GENERAL (for particular applications, see the relevant subclasses, e.g. B07B1/40, B23Q17/12, B24B31/06; measurement of mechanical vibrations G01H; in direction finding, locating, distance or velocity measuring G01S; {generating seismic energy G01V1/02}; control of mechanical vibrations in general G05D; sound-producing devices, e.g. bells, sirens, whistles G10K, {e.g. methods or devices for transmitting, conducting, or directing sound in general G10K11/00}; generation of electrical oscillations H03B; electromechanical resonators in general H03H; electromechanical transducers {for communication techniques, e.g. microphones, speakers} H04R)
- G01S: RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G10K: SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR

## Abstract

The ultrasonic sensor includes, on the same substrate, transmitter elements, receiver elements, a potential controller for receiver electrodes of the receiver elements, and a connection switching unit for the receiver electrodes and the potential controller. During the ultrasound transmission period of the transmitter elements, the connection switching unit connects the potential controller and the receiver electrodes. During the reception period of the receiver elements, the connection switching unit disconnects the potential controller and the receiver electrodes.

## Claims

### Claim 1

An ultrasonic sensor comprising:
a substrate,
a transmitter element formed above the substrate, the transmitter element including a transmission film adapted to transmit ultrasound through oscillation, a transmission piezoelectric body for causing the transmission film to oscillate, and a pair of actuation electrodes for applying an actuation voltage to the transmission piezoelectric body;
a receiver element formed above the substrate, the receiver element being different from the transmitter element, the receiver element including a reception film adapted to oscillate through reception of the ultrasound, a reception piezoelectric body for converting oscillation of the reception film to an electrical signal, and a pair of receiver electrodes for picking up the electrical signal that is output from the reception piezoelectric body;
a potential controller configured to bring the receiver electrodes to a first potential;
a connection switching unit configured to switch a connection state of the receiver electrodes and the potential controller;
a trigger signal generator configured to keep outputting a trigger signal during a trigger output period that is set to be longer than a transmission period in which the ultrasound is transmitted by the transmitter element, and
an actuation controller configured to output an actuation signal applied to the actuation electrodes of the transmitter element while simultaneously activating the trigger signal generator,
during the transmission period, the connection switching unit being configured to switch to a first state in which the potential controller and the receiver electrodes are connected, the connection switching unit being configured to switch to the first state in response to commencing output of the trigger signal from the trigger signal generator, and
during a reception period in which the ultrasound is received by the reception element, the connection switching unit being configured to switch to a second state in which the potential controller and the receiver electrodes are disconnected, the connection switching unit being configured to switch to the second state in response to termination of the output of the trigger signal.

### Claim 2 (depends on 1)

The ultrasonic sensor according to claim 1, wherein
the connection switching unit has a potential control switch configured to switch the connection state between the potential controller and at least one of the receiver electrodes, and a short switch connected to each of the receiver electrodes and configured to switch the connection state between the receiver electrodes, and
in the first state, the connection switching unit is configured to switch the short switch to a connection state in which the receiver electrodes are connected, and to switch the potential control switch to a connection state in which the potential controller is connected to at least one of the receiver electrodes.

### Claim 3 (depends on 2)

An electronic device including the ultrasonic sensor according to claim 2.

### Claim 4 (depends on 1)

The ultrasonic sensor according to claim 1, wherein
the potential controller has a first potential controller configured to apply a voltage to one of the receiver electrodes, and a second potential controller configured to apply a voltage to the other of the receiver electrodes,
the connection switching unit has a first switch configured to switch the connection state between the first potential controller and the one of the receiver electrodes, and a second switch configured to switch the connection state between the second potential controller and the other of the receiver electrodes, and
in the first state, the connection switching unit is configured to switch the first switch to a connection state in which the first potential controller and the one of the receiver electrodes are connected, and to switch the second switch to a connection state in which the second potential controller and the other of the receiver electrodes are connected.

### Claim 5 (depends on 4)

An electronic device including the ultrasonic sensor according to claim 4.

### Claim 6 (depends on 1)

The ultrasonic sensor according to claim 1, wherein
the trigger output period is set to be equivalent to a period including at least one cycle period of the actuation signal, plus the transmission period.

### Claim 7 (depends on 6)

An electronic device including the ultrasonic sensor according to claim 6.

### Claim 8 (depends on 1)

An electronic device including the ultrasonic sensor according to claim 1.

### Claim 9

An ultrasonic sensor comprising:
a substrate having a plurality of opening portions;
a support film covering the opening portions;
a first piezoelectric element formed above the support film and in the inside region of a first opening portion among the opening portions in plan view;
a second piezoelectric element formed above the support film and in the inside region of a second opening portion among the opening portions in plan view, the second piezoelectric element being a different element from the first piezoelectric element;
a potential controller configured to supply a potential;
a connection switching unit configured to switch a connection state of the first piezoelectric element and the potential controller;
a trigger signal generator configured to keep outputting a trigger signal during a trigger output period that is set to be longer than a transmission period in which an actuation voltage is applied to the second piezoelectric element, and
an actuation controller configured to output an actuation signal to the second piezoelectric element while simultaneously activating the trigger signal generator,
the first piezoelectric element including a first piezoelectric body and a pair of first piezoelectric element electrodes connected to the first piezoelectric body, the second piezoelectric element including a second piezoelectric body and a pair of second piezoelectric element electrodes connected to the second piezoelectric body,
during the transmission period, the connection switching unit being configured to switch to a first state in which the potential controller and the first piezoelectric element electrodes are connected, the connection switching unit being configured to switch to the first state in response to commencing output of the trigger signal from the trigger signal generator, and
during a reception period in which an electrical signal of the first piezoelectric element is picked up, the connection switching unit being configured to switch to a second state in which the potential controller and at least one of the first piezoelectric element electrodes are disconnected, the connection switching unit being configured to switch to the second state in response to termination of the output of the trigger signal.

### Claim 10 (depends on 9)

The ultrasonic sensor according to claim 9, wherein
the connection switching unit includes a potential control switch configured to switch the connection state between the potential controller and at least one of the first piezoelectric element electrodes, and a short switch connected to each of the first piezoelectric element electrodes and configured to switch the connection state between the first piezoelectric element electrodes, and
in the first state, the connection switching unit is configured to switch the short switch to a connection state in which the first piezoelectric element electrodes are connected, and to switch the potential control switch to a connection state for connecting the potential controller to at least one of the first piezoelectric element electrodes.

### Claim 11 (depends on 10)

An electronic device including the ultrasonic sensor according to claim 10.

### Claim 12 (depends on 9)

The ultrasonic sensor according to claim 9, wherein
the potential controller includes a first potential controller and a second potential controller, and
the connection switching unit includes a first switch configured to switch the connection state between the first potential controller and one of the first piezoelectric element electrodes, and a second switch configured to switch the connection state between the second potential controller and the other of the first piezoelectric element electrodes, and,
in the first state, the connection switching unit is configured to switch the first switch to a connection state for connecting the first potential controller to the one of the first piezoelectric element electrodes, and to switch the second switch to a connection state for connecting the second potential controller to the other of the first piezoelectric element electrodes.

### Claim 13 (depends on 12)

An electronic device including the ultrasonic sensor according to claim 12.

### Claim 14 (depends on 9)

The ultrasonic sensor according to claim 9, wherein
the trigger output period of duration is set to be equivalent to at least one cycle period of the actuation signal, plus the transmission period.

### Claim 15 (depends on 14)

An electronic device including the ultrasonic sensor according to claim 14.

### Claim 16 (depends on 9)

An electronic device including the ultrasonic sensor according to claim 9.