# US 8,770,965 B2 · Device and method for transferring micro structure > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,770,965 B2 - Document ID: US8770965B2 - Status: Granted - Kind: B2 - Application number: 13/370,413 - Filed: 2012-02-10 - Published: 2012-08-16 - Granted: 2014-07-08 - Earliest claimed: 2011-02-10 - Assignees: Hitachi High-Technologies Corporation - Applicants: Ryuta Washiya; Masahiko Ogino; Noritake Shizawa; Kyoichi Mori; Akihiro Miyauchi - Inventors: Ryuta Washiya; Masahiko Ogino; Noritake Shizawa; Kyoichi Mori; Akihiro Miyauchi - Web page: https://patentgrep.com/patent/US8770965B2 ## CPC - G03F 7/0002: {Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping} - B29C 33/3878: {used as masters for making successive impressions} - B30B 15/062: {Press plates} - B82Y 10/00: Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic - B82Y 40/00: Manufacture or treatment of nanostructures - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - B29C: SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING (making preforms B29B11/00; making laminated products by combining previously unconnected layers which become one product whose layers will remain together B32B37/00 - B32B41/00) - B30B: PRESSES IN GENERAL (producing ultra-high pressure or ultra-high pressure and high temperature to effect modifications of a substance, e.g. for making artificial diamonds B01J3/00 ){(compressing means for refuse receptacles B65F1/1405)} - B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES ## Abstract A microstructure transferring device is characterized in that the device comprises a stamper made from a first photo-curable resin composition cured with light with a first wavelength, and a light source emitting light with a second wavelength longer than the first wavelength. The microstructure is transferred to an impression receptor supplied with a second photo-curable resin composition, which is curable with light with the second wavelength emitted by the light source. ## Claims ### Claim 1 A microstructure transferring device for transferring a microstructure to a photo-curable resin composition supplied to an impression receptor comprising: a stamper having the microstructure configured to be pressed against a second photo-curable resin composition applied to the impression receptor and removed from the supplied second photo-curable resin composition after cured; a light source emitting a second wavelength light, whose wavelength is longer than a first wavelength, the second wavelength light being capable of curing the second photo-curable resin composition, and being configured to pass through the stamper to the second photo-curable resin composition while the stamper is being pressed against the second photo-curable resin composition supplied to the impression receptor in order to cure the supplied second photo-curable resin composition; a pressing member configured to press the stamper against the second photo-curable resin composition supplied to the impression receptor; and an optical filter, which is disposed at the pressing member, and which absorbs light with a range of wavelengths shorter than the second wavelength, wherein the light source is configured to expose the second photo-curable resin composition supplied to the impression receptor to light passing through the optical filter before reaching the second photo-curable resin composition, and wherein the stamper is formed by pressing, against a first photo-curable resin composition, a master stamper having the microstructure, by curing the first photo-curable resin composition by exposing the first photo-curable resin composition to light with the first wavelength, and by removing the master stamper from the cured first photo-curable resin composition. ### Claim 2 A microstructure transferring system comprising: a first microstructure transferring device for producing a stamper, including: a master stamper having a microstructure configured to be pressed against a first photo-curable resin composition and removed from the first photo-curable resin composition after the first photo-curable resin composition is cured, a first light source emitting a first light of a first wavelength to cure the first photo-curable resin composition; and a second microstructure transferring device configured to transfer the microstructure to a second photo-curable resin composition applied to an impression receptor including: the stamper configured to be pressed against the second photo-curable resin composition applied to the impression receptor and removed from the applied second photo-curable resin composition after the applied second photo-curable resin composition is cured; a second light source emitting a second light of a second wavelength being longer than the first wavelength, the second light being capable of curing the second photo-curable resin composition, and being configured to pass through the stamper to the second photo-curable resin composition while the stamper is being pressed against the second photo-curable resin composition applied to the impression receptor in order to cure the applied second photo-curable resin composition; a pressing member configured to press the stamper against the second photo-curable resin composition applied to the impression receptor; and an optical filter provided on the pressing member, the optical filter absorbing light with a range of wavelengths shorter than the second wavelength, and being configured so that the second light passes through the optical filter before reaching the second photo-curable resin composition applied to the impression receptor. ### Claim 3 (depends on 2) The system of claim 2, wherein the device is further provided with a pressing member to press the stamper against the second photo-curable resin composition supplied to the impression receptor, wherein the pressing member has a transmittance of 50% or less of light with the first wavelength and 80% or more of light with the second wavelength. ### Claim 4 (depends on 3) The system of claim 3, wherein the LED light source emits light with a wavelength of 375 nm or longer. ### Claim 5 (depends on 3) The system of claim 3, wherein the LED light source emits light with a wavelength of 390 nm or longer. ### Claim 6 (depends on 2) The system of claim 2, wherein the optical filter has a transmittance of 1% or less of light with a wavelength of 350 nm or shorter. ### Claim 7 (depends on 2) The system of claim 2, wherein the stamper has a transmittance of 50% or less of light with the first wavelength and an 80% or more of light with the second wavelength. ### Claim 8 (depends on 2) The system of claim 2, wherein the light source is an LED light source emitting light with a longer wavelength than a wavelength of light absorbed by a photo-polymerization initiator contained in the first photo-curable resin composition. ### Claim 9 (depends on 2) The system of claim 2, wherein a wavelength of light absorbed by a photo-polymerization initiator contained in the second photo-curable resin composition is longer than a wavelength of light absorbed by a photo-polymerization initiator contained in the first photo-curable resin composition. ### Claim 10 (depends on 2) The system of claim 2, wherein a photo-polymerization initiator contained in the second photo-curable resin composition has a higher absorbance of light with the second wavelength than a photo-polymerization initiator contained in the first photo-curable resin composition. ### Claim 11 (depends on 2) The system of claim 2, wherein the difference between the first wavelength and the second wavelength is 10 nm or more. ### Claim 12 (depends on 2) The system of claim 2, wherein the difference between the first wavelength and the second wavelength is 25 nm or more. ### Claim 13 A microstructure transferring system comprising: a first microstructure transferring device for producing a stamper, including a master stamper having a microstructure configured to be pressed against a first photo-curable resin composition and removed from the first photo-curable resin composition after the first photo-curable resin composition is cured, a first light source emitting a first light of a first wavelength to cure the first photo-curable resin composition; and a second microstructure transferring device configured to transfer the microstructure to a second photo-curable resin composition applied to each of two sides of an impression receptor, including: a pair of the stampers each configured to be pressed against the second photo-curable resin composition applied to each of the two sides of the impression receptor, and being removed from the applied second photo-curable resin composition after the applied second photo-curable resin composition is cured; a pair of second light sources each emitting a second light of a second wavelength being longer than the first wavelength, the second light being capable of curing the second photo-curable resin composition, and passing through the stamper to the second photo-curable resin composition while each of the stampers is being pressed against the second photo-curable resin composition applied to each of the two sides of the impression receptor in order to cure the applied second photo-curable resin composition; a pair of pressing members each configured to press the stamper against the second photo-curable resin composition applied to the impression receptor; and a pair of optical filters each provided on the pressing member, and each of the optical filter absorbing light with a range of wavelengths shorter than the second wavelength, and being configured so that the second light passes through the optical filter before reaching the second photo-curable resin composition applied to the impression receptor. ### Claim 14 (depends on 13) The system of claim 13, wherein the system is further provided with a pair of pressing members, each of the pair of pressing members configured to press the stamper against the second photo-curable resin composition applied to the impression receptor, wherein the pressing member has a transmittance of 50% or less of light with the first wavelength and a 80% or more of light with the second wavelength. ### Claim 15 (depends on 13) The system of claim 13, wherein each of the pair of optical filters has a transmittance of 1% or less of light with a wavelength of 350 nm or shorter. ### Claim 16 (depends on 13) The system of claim 13, wherein each of the pair of stampers has a transmittance of 50% or less of light with the first wavelength and an 80% or more of light with the second wavelength. ### Claim 17 (depends on 13) The system of claim 13, wherein each of the pair of second light sources is an LED light source emitting light with a longer wavelength than a wavelength of light absorbed by a photo-polymerization initiator included in the first photo-curable resin composition.