Imprint apparatus and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorEigo Kawakami
Life of this patent
Estimating the term…
Abstract
An imprint apparatus includes: a support member which supports the mold; a substrate stage which supports the substrate; a detector which detects a force applied to the mold; a mechanism which forms a space for removing the mold supported by the support member, between the support member and the substrate stage, and a controller. The controller determines a release force required to detach the mold from the cured resin, based on a detection result from the detector, compares the determined release force with a first threshold value, and causes the mechanism to form the space if the determined release force is larger than the first threshold value.
Claims7
An imprint apparatus for performing, for each shot of a substrate, an imprint operation of coating the substrate with a resin, and curing the resin while the resin is in contact with a pattern surface of a mold, the apparatus comprising:
- a support member configured to support the mold;
- a substrate stage configured to support the substrate;
- a detector configured to detect a force applied to the mold;
- a mechanism configured to form a space for removing the mold supported by said support member, between said support member and said substrate stage;
- a controller;
- and
- a display unit,
- wherein said controller is configured to:
- determine a release force required to detach the mold from the cured resin, based on a detection result from said detector;
- compare the determined release force with a first threshold value and cause said display unit to display a message prompting replacement of the mold, if the determined release force is larger than the first threshold value;
- and
- compare the determined release force with a second threshold value smaller than the first threshold value, and determine that filling of the resin into the mold is incomplete and cause said display unit to display the determination result, if the determined release force is smaller than the second threshold value.
An article manufacturing method comprising the steps of:
- forming a pattern on a substrate by using an imprint apparatus which performs, for each shot of the substrate, an imprint operation of coating the substrate with a resin, and curing the resin while the resin is in contact with a pattern surface of a mold;
- and
- processing the substrate on which the pattern is formed in the preceding step,
- wherein the imprint apparatus comprises:
- a support member configured to support the mold;
- a substrate stage configured to support the substrate;
- a detector configured to detect a force applied to the mold;
- a mechanism configured to form a space for removing the mold supported by the support member, between the support member and the substrate stage;
- a controller;
- and
- a display unit,
- wherein the controller is configured to:
- determine a release force required to detach the mold from the cured resin, based on a detection result from the detector;
- compare the determined release force with a first threshold value and cause the the display unit to display a message prompting replacement of the mold, if the determined release force is larger than the first threshold value;
- and
- compare the determined release force with a second threshold value smaller than the first threshold value, and determine that filling of the resin into the mold is incomplete and cause the display unit to display the determination result, if the determined release force is smaller than the second threshold value.
An imprint apparatus for curing a resin with which a substrate is coated, while the resin is in contact with a pattern surface of a mold, the apparatus comprising:
- a detection unit configured to detect a force applied to the mold;
- a display unit;
- and
- a controller configured to:
- determine a release force required to detach the mold from the cured resin, based on a detection result from said detection unit;
- compare the determined release force with a first threshold value and cause said display unit to display a message prompting replacement of the mold, if the determined release force is larger than the first threshold value;
- and
- compare the determined release force with a second threshold value smaller than the first threshold value, and determine that filling of the resin into the mold is incomplete and cause said display unit to display the determination result, if the determined release force is smaller than the second threshold value.
Dependencies are inferred from the claim text.