# US 8,770,725 B2 · Method of manufacturing electromechanical transducer element, electromechanical transducer element, discharging head, and inkjet recording device

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 8,770,725 B2
- Document ID: US8770725B2
- Status: Granted
- Kind: B2
- Application number: 13/612,717
- Filed: 2012-09-12
- Published: 2013-03-21
- Granted: 2014-07-08
- Earliest claimed: 2011-09-16
- Assignees: Ricoh Company, Ltd.
- Applicants: Yasuhiro Watanabe; Osamu Machida; Akira Shimofuku; Ryo Tashiro
- Inventors: Yasuhiro Watanabe; Osamu Machida; Akira Shimofuku; Ryo Tashiro
- Web page: https://patentgrep.com/patent/US8770725B2

## CPC

- H10N 30/2047: {Membrane type}
- B41J 2/161: {of film type, deformed by bending and disposed on a diaphragm}
- H10N 30/078: by sol-gel deposition
- H10N 30/081: by coating or depositing using masks, e.g. lift-off
- Y10T 29/42: Piezoelectric device making
- H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- B41J: TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

Disclosed is a method of manufacturing an electromechanical transducer element including a first process of hydrophobizing a first area of an electrode by forming a self-assembled monolayer film; a second process of applying a sol-gel solution onto a predetermined second area of the electrode so as to produce a complex oxide; a third process of producing the complex oxide by calcining the electrode; a fourth process of acid-washing the electrode on which the complex oxide has been produced; a fifth process of hydrophobizing the first area of the acid-washed electrode by forming the self-assembled monolayer film; a sixth process of applying the sol-gel solution onto the predetermined second area; and a seventh process of producing the complex oxide by calcining the electrode.

## Claims

### Claim 1

A method of manufacturing an electromechanical transducer element comprising:
a first process of hydrophobizing a first area of an electrode by forming a self-assembled monolayer film on the first area, wherein a complex oxide film has been formed on a predetermined second area of the electrode, and the complex oxide film has not been formed on the first area of the electrode;
a second process of applying a sol-gel solution onto the predetermined second area of the electrode where the self-assembled monolayer film has not been formed, wherein the sol-gel solution is adjusted to produce the complex oxide;
a third process of producing the complex oxide by calcining the electrode to which the sol-gel solution has been applied;
a fourth process of acid-washing the electrode on which the complex oxide has been produced;
a fifth process of hydrophobizing, by forming the self assembled monolayer film, the first area of the acid-washed electrode on which the complex oxide film has not been formed;
a sixth process of applying the sol-gel solution onto the predetermined second area where the self-assembled monolayer film has not been formed; and
a seventh process of producing the complex oxide by calcining the electrode on which the sol-gel solution has been applied.

### Claim 2 (depends on 1)

The method according to claim 1,
wherein the fourth process, the fifth process, the sixth process, and the seventh process are repeated subsequently to the seventh process.

### Claim 3 (depends on 1)

The method according to claim 1,
wherein the fourth process includes a process of spraying an acid or a solution of the acid from a first nozzle to the electrode on which the complex oxide has been produced.

### Claim 4 (depends on 3)

The method according to claim 3,
wherein a pH of the solution of the acid at 25 degrees Celsius is greater than or equal to 2 and less than or equal to 5.

### Claim 5 (depends on 1)

The method according to claim 1,
wherein the first process includes a first spraying process of spraying a thiol or a solution of the thiol from a second nozzle to the electrode, wherein the complex oxide film has been formed on the predetermined second area of the electrode, and
wherein the fifth process includes a second spraying process of spraying the thiol or the solution of the thiol from the second nozzle to the electrode on which the complex oxide has been produced.

### Claim 6 (depends on 5)

The method according to claim 5,
wherein the first process and the fifth process include a third spraying process of spraying a cleaning solution to the electrode to which the thiol or the solution of the thiol has been sprayed, wherein ultrasonic waves have been applied the cleaning solution.

### Claim 7 (depends on 1)

The method according to claim 1,
wherein the electrode is a platinum electrode.

### Claim 8 (depends on 1)

The method according to claim 1,
wherein the complex oxide is lead zirconate titanate.

### Claim 9

An electromechanical transducer element that is produced by a method comprising:
a first process of hydrophobizing a first area of an electrode by forming a self-assembled monolayer film on the first area, wherein a complex oxide film has been formed on a predetermined second area of the electrode, and the complex oxide film has not been formed on the first area of the electrode;
a second process of applying a sol-gel solution onto the predetermined second area of the electrode where the self-assembled monolayer film has not been formed, wherein the sol-gel solution is adjusted to produce the complex oxide;
a third process of producing the complex oxide by calcining the electrode to which the sol-gel solution has been applied;
a fourth process of acid-washing the electrode on which the complex oxide has been produced;
a fifth process of hydrophobizing, by forming the self-assembled monolayer film, the first area of the acid-washed electrode on which the complex oxide film has not been formed;
a sixth process of applying the sol-gel solution onto the predetermined second area where the self-assembled monolayer film has not been formed; and
a seventh process of producing the complex oxide by calcining the electrode on which the sol-gel solution has been applied.

### Claim 10

A discharging head that includes an electromechanical transducer element, the electromechanical transducer element being produced by a method comprising:
a first process of hydrophobizing a first area of an electrode by forming a self-assembled monolayer film on the first area, wherein a complex oxide film has been formed on a predetermined second area of the electrode, and the complex oxide film has not been formed on the first area of the electrode;
a second process of applying a sol-gel solution onto the predetermined second area of the electrode where the self-assembled monolayer film has not been formed, wherein the sol-gel solution is adjusted to produce the complex oxide;
a third process of producing the complex oxide by calcining the electrode to which the sol-gel solution has been applied;
a fourth process of acid-washing the electrode on which the complex oxide has been produced;
a fifth process of hydrophobizing, by forming the self-assembled monolayer film, the first area of the acid-washed electrode on which the complex oxide film has not been formed;
a sixth process of applying the sol-gel solution onto the predetermined second area where the self-assembled monolayer film has not been formed; and
a seventh process of producing the complex oxide by calcining the electrode on which the sol-gel solution has been applied.

### Claim 11

An inkjet recording device that includes a discharging head including an electromechanical transducer element, the electromechanical transducer element being produced by a method comprising:
a first process of hydrophobizing a first area of an electrode by forming a self-assembled monolayer film on the first area, wherein a complex oxide film has been formed on a predetermined second area of the electrode, and the complex oxide film has not been formed on the first area of the electrode;
a second process of applying a sol-gel solution onto the predetermined second area of the electrode where the self-assembled monolayer film has not been formed, wherein the sol-gel solution is adjusted to produce the complex oxide;
a third process of producing the complex oxide by calcining the electrode to which the sol-gel solution has been applied;
a fourth process of acid-washing the electrode on which the complex oxide has been produced;
a fifth process of hydrophobizing, by forming the self-assembled monolayer film, the first area of the acid-washed electrode on which the complex oxide film has not been formed;
a sixth process of applying the sol-gel solution onto the predetermined second area where the self-assembled monolayer film has not been formed; and
a seventh process of producing the complex oxide by calcining the electrode on which the sol-gel solution has been applied.