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US 8,770,215 B1Granted
Low flow injector to deliver a low flow of gas to a remote location
OwnerDaniel T. Mudd, Patti J. Muddinventors
Life of this patent
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Abstract
A low flow injector controls remote delivery of low flows of gas. A higher flow carrier gas is provided by an MFC to a conduit. A remote flow restrictor is located to exhaust a critical process gas directly into the conduit. An electronic regulator controls a pressure of the critical gas responsive to a pressure point received from a controller corresponding to a desired mass flow. Also, a large flow restrictor vents the critical process gas.
Claims18
A low flow injector to control remote delivery of low flows of gas, comprising:
- a gas conduit having a proximal end and a distal end;
- a remote flow restrictor located at the distal end of the gas conduit to exhaust a flow of a critical process gas from the gas conduit directly into a flow of a carrier gas, wherein a mass flow of the carrier gas is provided by a mass flow controller (MFC) at a higher mass flow than the critical process gas;
- and
- an electronic regulator located at a proximal end of the gas conduit to pressurize the gas conduit at substantially the same time as the MFC provides the carrier gas to prevent backflow of the carrier gas into the gas conduit, and to adjust a pressure of the critical process gas flow through the gas conduit to the remote flow restrictor based on a pressure set point command, the pressure set point command associated with a desired mass flow of the critical process gas.
1 more element
A method in a low flow injector for controlling remote delivery of low flows of gas, comprising:
- exhausting a flow of a critical process gas from a gas conduit directly into a flow of a carrier gas, wherein a mass flow of the carrier gas is provided by a mass flow controller (MFC) at a higher mass flow than the critical process gas;
- pressurizing the gas conduit at substantially the same time as the MFC provides the carrier gas to prevent backflow of the carrier gas into the gas conduit;
- and
- adjusting by an electronic regulator a pressure of the critical process gas flow through the gas conduit to a remote flow restrictor located at an distal end of the gas conduit based on a pressure set point command, the pressure set point command associated with a desired mass flow of the critical process gas.
1 more element
Dependencies are inferred from the claim text.