# US 8,770,142 B2 · Electrode for generating plasma and plasma generator

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- Number: US 8,770,142 B2
- Document ID: US8770142B2
- Status: Granted
- Kind: B2
- Application number: 12/560,705
- Filed: 2009-09-16
- Published: 2010-03-18
- Granted: 2014-07-08
- Earliest claimed: 2008-09-17
- Assignees: Veeco ALD Inc.
- Applicants: Sang In Lee
- Inventors: Sang In Lee
- Web page: https://patentgrep.com/patent/US8770142B2

## CPC

- C23C 16/45578: {Elongated nozzles, tubes with holes}
- C23C 16/50: using electric discharges {(generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34)}
- H01J 37/32009: {Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources (plasma generation in general H05H1/24)}
- H01J 37/32541: {Shape}
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

A plasma generator may include a first electrode extending in one direction, and a second electrode spaced apart from the first electrode. Facing surfaces of the first electrode and the second electrode may have spiral shapes along the one direction. A cross-section of the first electrode and a cross-section of the second electrode, which are perpendicular to the one direction, may have at least partially concentric shapes. An electrode for generating plasma may include a platform extending in one direction, and at least one protruding thread spirally formed on a surface of the platform along the one direction.

## Claims

### Claim 1

A plasma generator, comprising:
a first electrode comprising:
a cylindrical platform having a curved outer surface and extending in a longitudinal direction, the platform formed with a channel extending along a length of the platform to carry a cooling medium, and
a plurality of spiral protrusions around the curved outer surface of the platform with an equal interval between the plurality of protruding spiral protrusions; and
a second electrode spaced apart from the first electrode in a direction perpendicular to the longitudinal direction and partially surrounding the curved outer surface of the first electrode, the second electrode having an inner surface and an outer surface, the inner surface facing the first electrode and concentric with the curved outer surface of the platform, the outer surface facing away from the first electrode and concentric with the curved outer surface, plasma generated between the plurality of spiral protrusions and the second electrode at locations away from a substrate.

### Claim 2 (depends on 1)

The plasma generator of claim 1, further comprising a third electrode spaced apart from the second electrode and extending in the longitudinal direction.

### Claim 3 (depends on 1)

The plasma generator of claim 1, wherein the first electrode is formed with at least one channel and an injection hole on the curved outer surface connected to the at least one channel.

### Claim 4 (depends on 1)

The plasma generator of claim 1, wherein the second electrode is formed with at least one channel and an injection hole on the curved outer surface connected to the at least one channel.

### Claim 5 (depends on 1)

The plasma generator of claim 1, further comprising:
a reaction gas provided between the first electrode and the second electrode; and
a power source for applying voltage to the first electrode and the second electrode to generate plasma from the reaction gas.

### Claim 6 (depends on 1)

The plasma generator of claim 1, further comprising a dielectric between the first electrode and the second electrode.