# US 8,770,030 B2 · Ultrasonic transmitter and receiver with compliant membrane > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,770,030 B2 - Document ID: US8770030B2 - Status: Granted - Kind: B2 - Application number: 13/089,513 - Filed: 2011-04-19 - Published: 2012-10-25 - Granted: 2014-07-08 - Earliest claimed: 2011-04-19 - Assignees: Eastman Kodak Company - Applicants: James D. Huffman; Gary A. Kneezel - Inventors: James D. Huffman; Gary A. Kneezel - Web page: https://patentgrep.com/patent/US8770030B2 ## CPC - G01N 29/245: {Ceramic probes, e.g. lead zirconate titanate [PZT] probes} - G01N 2291/0427: Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) ## Abstract An ultrasonic transmitter and receiver includes a MEMS composite transducer. The MEMS composite transducer includes a substrate. Portions of the substrate define an outer boundary of a cavity. A first MEMS transducing member includes a first size. A first portion of the first MEMS transducing member is anchored to the substrate. A second portion of the first MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A second MEMS transducing member includes a second size that is smaller than the first size of the first MEMS transducing member. A first portion of the second MEMS transducing member is anchored to the substrate. A second portion of the second MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A compliant membrane is positioned in contact with the first and second MEMS transducing members. A first portion of the compliant membrane covers the first and second MEMS transducing members. A second portion of the compliant membrane is anchored to the substrate. ## Claims ### Claim 1 An ultrasonic transmitter and receiver comprising: a MEMS composite transducer comprising a substrate, portions of the substrate defining an outer boundary of a cavity; a first MEMS transducing member including a first size, a first portion of the first MEMS transducing member being anchored to the substrate, a second portion of the first MEMS transducing member extending over at least a portion of the cavity, the second portion of the first MEMS transducing member being free to move relative to the cavity; a second MEMS transducing member including a second size smaller than the first size, a first portion of the second MEMS transducing member being anchored to the substrate, a second portion of the second MEMS transducing member extending over at least a portion of the cavity, the second portion of the second MEMS transducing member being free to move relative to the cavity; and a compliant membrane positioned in contact with the first and second MEMS transducing members, a first portion of the compliant membrane covering the first and second MEMS transducing members, and a second portion of the compliant membrane being anchored to the substrate. ### Claim 2 (depends on 1) The ultrasonic transmitter and receiver of claim 1, wherein the compliant membrane is anchored to the substrate around the outer boundary of the cavity. ### Claim 3 (depends on 1) The ultrasonic transmitter and receiver of claim 1, the first and second MEMS transducing members each comprising a beam having a first end and a second end, wherein the first end is anchored to the substrate and the second end cantilevers over the cavity. ### Claim 4 (depends on 3) The ultrasonic transmitter and receiver of claim 3, the beam of the first MEMS transducing member including a first width at its first end and a second width at its second end, wherein the first width is greater than the second width. ### Claim 5 (depends on 3) The ultrasonic transmitter and receiver of claim 3, the beam of the first MEMS transducing member including a first width at its first end and a second width at its second end, and the beam of the second MEMS transducing member including a third width at its first end and a fourth width at its second end, wherein the third width is smaller than the first width. ### Claim 6 (depends on 3) The ultrasonic transmitter and receiver of claim 3, the beam of the first MEMS transducing member including a first width at its first end and a second width at its second end, and the beam of the second MEMS transducing member including a third width at its first end and a fourth width at its second end, wherein the fourth width is smaller than the second width. ### Claim 7 (depends on 3) The ultrasonic transmitter and receiver of claim 3, the beam of the first MEMS transducing member including a first length, and the beam of the second MEMS transducing member including a second length, wherein the second length is smaller than the first length. ### Claim 8 (depends on 1) The ultrasonic transmitter and receiver of claim 1, the first MEMS transducing member being one of a first plurality of MEMS transducing members each having a first size, and the second MEMS transducing member being one of a second plurality of MEMS transducing members each having a second size smaller than the first size. ### Claim 9 (depends on 8) The ultrasonic transmitter and receiver of claim 8, a first end of each of the first plurality of MEMS transducing members and a first end of each of the second plurality of MEMS transducing members being anchored to the substrate, and a second end of each of the first plurality of MEMS transducing members and a second end of each of the second plurality of MEMS transducing members being cantilevered over the cavity. ### Claim 10 (depends on 1) The ultrasonic transmitter and receiver of claim 1, the first MEMS transducing member comprising a beam having a first end and a second end, wherein the first end and the second end are anchored to the substrate. ### Claim 11 (depends on 10) The ultrasonic transmitter and receiver of claim 10, the second MEMS transducing member comprising a beam having a first end and a second end, wherein the first end of the beam of the second MEMS transducing member is anchored to the substrate and the second end cantilevers over the cavity. ### Claim 12 (depends on 1) The ultrasonic transmitter and receiver of claim 1, the first MEMS transducing member being a first of a plurality of MEMS transducing members each comprising a beam having a first end and a second end, wherein the first end and the second end are anchored to the substrate, and wherein at least two of the beams anchored at both the first and second end intersect each other over the cavity. ### Claim 13 (depends on 1) The ultrasonic transmitter and receiver of claim 1, wherein a shape of the cavity is substantially cylindrical. ### Claim 14 (depends on 1) The ultrasonic transmitter and receiver of claim 1, wherein the first MEMS transducing member and the second MEMS transducing member each comprise a piezoelectric material. ### Claim 15 (depends on 14) The ultrasonic transmitter and receiver of claim 14, wherein the piezoelectric material comprises a piezoelectric ceramic. ### Claim 16 (depends on 15) The ultrasonic transmitter and receiver of claim 15, wherein the piezoelectric ceramic comprises lead zirconate titanate. ### Claim 17 (depends on 1) The ultrasonic transmitter and receiver of claim 1, wherein the compliant membrane comprises a polymer. ### Claim 18 (depends on 17) The ultrasonic transmitter and receiver of claim 17, wherein the polymer comprises an epoxy. ### Claim 19 (depends on 1) The ultrasonic transmitter and receiver of claim 1, the first MEMS transducing member and the second MEMS transducing member each having a first Young's modulus and the compliant membrane having a second Young's modulus, wherein the first Young's modulus is at least 10 times greater than the second Young's modulus. ### Claim 20 An ultrasonic imaging system comprising: an ultrasonic transmitter and receiver comprising: a MEMS composite transducer comprising a substrate, portions of the substrate defining an outer boundary of a cavity; a first MEMS transducing member including a first size, a first portion of the first MEMS transducing member being anchored to the substrate, a second portion of the first MEMS transducing member extending over at least a portion of the cavity, the second portion of the first MEMS transducing member being free to move relative to the cavity; a second MEMS transducing member including a second size smaller than the first size, a first portion of the second MEMS transducing member being anchored to the substrate, a second portion of the second MEMS transducing member extending over at least a portion of the cavity, the second portion of the second MEMS transducing member being free to move relative to the cavity; and a compliant membrane positioned in contact with the first and second MEMS transducing members, a first portion of the compliant membrane covering the first and second MEMS transducing members, and a second portion of the compliant membrane being anchored to the substrate; a first electrical circuit connected to the first MEMS transducing member; and a second electrical circuit connected to the second MEMS transducing member. ### Claim 21 (depends on 20) The ultrasonic imaging system of claim 20, wherein the first electrical circuit includes a voltage source greater than 20 volts. ### Claim 22 (depends on 21) The ultrasonic imaging system of claim 21, wherein the first electrical circuit includes a pulse generator. ### Claim 23 (depends on 20) The ultrasonic imaging system of claim 20, wherein the second electrical circuit includes a low noise amplifier. ### Claim 24 (depends on 23) The ultrasonic imaging system of claim 23 further comprising signal processing circuitry to process signals from the low noise amplifier. ### Claim 25 (depends on 24) The ultrasonic imaging system of claim 24 further comprising a display for viewing an image corresponding to the processed signals. ### Claim 26 (depends on 24) The ultrasonic imaging system of claim 24 further comprising a printing system to provide a printed image corresponding to the processed signals. ### Claim 27 (depends on 24) The ultrasonic imaging system of claim 24 further comprising a storage medium for storing an image corresponding to the processed signals. ### Claim 28 (depends on 20) The ultrasonic imaging system of claim 20, wherein the MEMS composite transducer is one of a plurality of MEMS composite transducers.