# US 8,769,749 B2 · Cleaning device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,769,749 B2 - Document ID: US8769749B2 - Status: Granted - Kind: B2 - Application number: 12/997,530 - Filed: 2009-06-12 - Published: 2011-04-28 - Granted: 2014-07-08 - Earliest claimed: 2008-06-12 - Assignees: STS Corporation - Applicants: Dong Young Ryou - Inventors: Dong Young Ryou - Web page: https://patentgrep.com/patent/US8769749B2 ## CPC - C23C 16/4407: {Cleaning of reactor or reactor parts by using wet or mechanical methods} - C23C 16/4481: {by evaporation using carrier gas in contact with the source material (C23C16/4486 takes precedence)} - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) ## Abstract A cleaning device for cleaning a mixing vaporizer is provided. The mixing vaporizer includes a first hole that a raw material flows in therethrough, a second hole that carrier gas flows in therethrough, a mixing space that generates mixed gas by mixing the raw material and the carrier gas, a carrier gas nozzle that is connected to the second hole for supplying the carrier gas to the mixing space, and a third hole that discharges the mixed gas. The cleaning device cleans the mixing vaporizer by circulating a cleaning solution through at least one the first hole, the second hole, and the third hole. ## Claims ### Claim 1 A cleaning device for cleaning a mixing vaporizer, wherein the mixing vaporizer comprises a first hole that a raw material flows in therethrough, a second hole that carrier gas flows in therethrough, a mixing space that generates mixed gas by mixing the raw material and the carrier gas, a carrier gas nozzle that is connected to the second hole for supplying the carrier gas to the mixing space, and a third hole that discharges the mixed gas, wherein the cleaning device cleans the mixing vaporizer by circulating a cleaning solution through at least one the first hole, the second hole, and the third hole, wherein the cleaning device comprises: a cleaning solution tank for storing the cleaning solution; a circulation pump for circulating the cleaning solution in the mixing vaporizer; and a direction-changing member, wherein the direction-changing member connecting the first hole and the second hole to the circulation pump and connecting the third hole to the cleaning solution tank during a circulation in a normal direction, and the direction-changing member connecting the third hole to the circulation pump and connecting the first hole and the second hole to the cleaning solution tank during a circulation in a reverse direction, wherein the mixing vaporizer is cleaned along the normal direction and the reverse direction by the direction-changing member. ### Claim 2 (depends on 1) The cleaning device according to claim 1, further comprising: a first pipe detachably connected to the first hole; a second pipe including one end communicated with the first pipe and the other end detachably connected to the second hole; and a third pipe detachably connected to the third hole. ### Claim 3 (depends on 2) The cleaning device according to claim 2, wherein the direction-changing member, a first direction-changing valve provided between the circulation pump and the first pipe, a second direction-changing valve provided between the circulation pump and the third pipe, a third direction-changing valve provided between the first pipe and the cleaning solution tank, and a fourth direction-changing valve provided between the cleaning solution tank and the third pipe, wherein the second direction-changing valve and the third direction-changing valve are close during the circulation in the normal direction, and wherein the first direction-changing valve and the fourth direction-changing valve are close during the circulation in the reverse direction. ### Claim 4 A cleaning device, comprising: a cleaning solution tank storing a cleaning solution for cleaning a mixing vaporizer, wherein the mixing vaporizer comprising a first hole that a raw material flows in therethrough, a second hole that carrier gas flows in therethrough, a mixing space that generates mixed gas by mixing the raw material and the carrier gas, a carrier gas nozzle that is connected to the second hole for supplying the carrier gas to the mixing space, and a third hole that discharges the mixed gas, a deionized-water tank storing deionized water for cleaning the mixing vaporizer; a circulation pump circulating the cleaning solution or the deionized water in the mixing vaporizer; and a selection member, the selection member connecting the circulation pump to the cleaning solution tank for returning the cleaning solution, which is discharged from the mixing vaporizer, into the cleaning solution tank when the cleaning solution is circulated, and the selection member connecting the circulation pump to the deionized-water tank for returning the deionized water, which is discharge from the mixing vaporizer, into the deionized-water tank when the deionized water is circulated. ### Claim 5 (depends on 4) The cleaning device according to claim 4, further comprising: a direction-changing member, the direction-changing member connecting the first hole and the second hole to the circulation pump and connecting the third hole to the selection member during a circulation in a normal direction, and the direction-changing member connecting the third hole to the circulation pump and connecting the first hole and the second hole to the selection member during a circulation in a reverse direction, wherein the mixing vaporizer is cleaned along the normal direction and the reverse direction by the direction-changing member. ### Claim 6 (depends on 5) The cleaning device according to claim 5, further comprising: a first pipe detachably connected to the first hole; a second pipe including one end communicated with the first pipe and the other end detachably connected to the second hole; and a third pipe detachably connected to the third hole. ### Claim 7 (depends on 6) The cleaning device according to claim 6, wherein the direction-changing member comprises a first direction-changing valve provided between the circulation pump and the first pipe, a second direction-changing valve provided between the circulation pump and the third pipe, a third direction-changing valve provided between the first pipe and the selection member, and a fourth direction-changing valve provided between the selection member and the third pipe, wherein the second direction-changing valve and the third direction-changing valve are close during the circulation in the normal direction, and wherein the first direction-changing valve and the fourth direction-changing valve are close during the circulation in the reverse direction. ### Claim 8 (depends on 4, 7) The cleaning device according to claim 4 or claim 7, wherein the cleaning solution comprises fluorine F. ### Claim 9 (depends on 1, 4) The cleaning device according to claim 1 or claim 4, wherein the cleaning solution comprises at least one of hydrofluoric acid HF, ammonium hydrogen fluoride NH4HF2, and tetrahydrofuran THF.