Apparatus and method for analyzing and modifying a specimen surface
AssigneeCarl Zeiss SMS GmbH
InventorsChristof Baur, Klaus Edinger, Thorsten Hofmann, Gabriel Baralia
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AssigneeCarl Zeiss SMS GmbH
InventorsChristof Baur, Klaus Edinger, Thorsten Hofmann, Gabriel Baralia
Estimating the term…
The invention refers to a probe assembly for a scanning probe microscope which comprises at least one first probe-adapted for analyzing a specimen, at least one second probe adapted for modifying the specimen and at least one motion element associated with the probe assembly and adapted for scanning one of the probes being in a working position across a surface of the specimen so that the at least one first probe interacts with the specimen whereas the at least one second probe is in a neutral position in which it does not interact with the specimen and to bring the at least one second probe into a position so that the at least one second probe can modify a region of the specimen analyzed with the at least one first probe.
A probe assembly, comprising:
A method, comprising:
Dependencies are inferred from the claim text.