Clean transfer robot

An apparatus for moving a workpiece, comprising:

• a clean housing providing a clean environment;
• a robotic housing disposed within the clean housing, the robotic housing comprising first elongated slot connecting the clean environment and the environment within the robotic housing;
• a linear moving mechanism comprising a linear guide within the robotic housing for moving a robot part along the first slot, the robot part protruded to the clean environment;
• an exhausting mechanism coupled to the robotic housing for removing particles generated by the moving mechanism in the housing to the outside of the clean environment;
• a first restrictor along the slot, disposed within the robotic housing and between the housing and the exhaust mechanism to establish a substantial uniform flow along the first slot;
• and
• at least a second elongated slot with a second moving mechanism for moving a second robotic part.

A method for improving a clean environment containing a plurality of moving mechanisms, wherein the plurality of moving mechanisms is disposed in a robotic housing and moves a plurality of robot parts through a plurality of elongated slots connecting the clean environment and the inside of the housing, the method comprising:

• positioning the moving mechanisms in the vicinity of the elongated slots;
• exhausting the inside of the housing to the outside of the clean environment;
• and
• restricting the flow from the elongated slots to the exhaust as to provide a substantial uniform flow along the elongated slots.