Micromechanical system
AssigneeRobert Bosch GmbH
InventorJochen Reinmuth
Life of this patent
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Abstract
In a micromechanical system having a substrate and an electrode situated over the substrate, the electrode is connected to the substrate via a vertical spring. The vertical spring is sectionally provided in a first conductive layer and sectionally provided in a second conductive layer, the second conductive layer being situated over the first conductive layer and the first conductive layer being situated over the substrate. The electrode is provided in a third conductive layer, which is situated over the second conductive layer.
Claims9
A micromechanical system, comprising:
- a substrate;
- an electrode situated over the substrate;
- and
- a vertical spring that rotates about an axis parallel to the substrate, wherein the electrode is connected to the substrate via the vertical spring;
- wherein a first portion of the vertical spring is sectionally provided in a first conductive layer and a second portion of the vertical spring is sectionally provided in a second conductive layer, the second conductive layer being situated over the first conductive layer, and the first conductive layer being situated over the substrate, and wherein the electrode is provided in a third conductive layer situated over the second conductive layer, wherein the vertical spring includes a first spring arm and a second spring arm provided in the second conductive layer;
- the first spring arm is connected at a first upper fastening point to the electrode and connected at a first lower fastening point to a base provided in the first conductive layer;
- and the second spring arm is connected at a second upper fastening point to the electrode and connected at a second lower fastening point to the base, wherein the first and second upper fastening points are in a different plane than the first and second lower fastening points.
A method for manufacturing a micromechanical system having an electrode situated over a substrate, comprising:
- depositing a first insulation layer on the substrate;
- depositing and structuring a first conductive layer to create a base of a vertical spring capable of rotating about an axis parallel to the substrate;
- depositing and structuring a second insulation layer;
- depositing and structuring a second conductive layer to create a first spring arm and a second spring arm of the vertical spring;
- depositing and structuring a third insulation layer;
- depositing and structuring a third conductive layer to create the electrode, which is connected to the substrate via the vertical spring;
- and
- removing a part of the first insulation layer, the second insulation layer, and the third insulation layer, wherein the first spring arm is connected at a first upper fastening point to the electrode and connected at a first lower fastening point to the base provided in the first conductive layer;
- and the second spring arm is connected at a second upper fastening point to the electrode and connected at a second lower fastening point to the base, wherein the first and second upper fastening points are in a different plane than the first and second lower fastening points.
Dependencies are inferred from the claim text.