Vibrating gyro device and manufacturing method therefor

A vibrating gyro device arranged to detect rotation about two perpendicular or substantially perpendicular axes of rotation that lie in a plane parallel or substantially parallel to a main surface of a piezoelectric substance, the vibrating gyro device comprising:

• the piezoelectric substance including a frame-shaped region, an inner opening portion through which an inner side surface of the frame-shaped region is exposed, and an outer opening portion through which an outer side surface of the frame-shaped region is exposed, the inner opening portion and the outer opening portion being arranged to have axisymmetrical shapes in the main surface of the piezoelectric substance with the two perpendicular or substantially perpendicular axes of rotation defining axes of symmetry;
• a plurality of pairs of main surface electrodes electromechanically coupled with displacement of the frame-shaped region in a direction perpendicular or substantially perpendicular to the main surface of the piezoelectric substance and with displacement of the frame-shaped region in a direction parallel or substantially parallel to the main surface of the piezoelectric substance, axisymmetrically arranged with the two perpendicular or substantially perpendicular axes of rotation defining the axes of symmetry, and bonded to front and back main surfaces of the frame-shaped region;
• and
• a supporting body arranged to prevent other members of the vibrating gyro device from interfering with the frame-shaped region, to secure a vibration space for the frame-shaped region through which the inner opening portion and the outer opening portion are connected, and to support the piezoelectric substance;
• wherein
• the piezoelectric substance includes an inner region that is arranged inside of the frame-shaped region;
• the inner region is supported by the supporting body and the inner region supports the frame-shaped region;
• and
• the frame-shaped region and the inner region are defined by portions of a same piezoelectric layer arranged on a same plane on an upper surface of the supporting body.