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US 8,756,978 B2Granted
Leak detector with optical tracer gas detection
AssigneeInficon GmbH
InventorsVladimir Schwartz, Daniel Wetzig, Boris Chernobrod
Life of this patent
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Abstract
A leak detector comprises a cell provided with a tracer gas inlet preferably permeable to a tracer gas. In the cell, the tracer gas is caused to assume an energetically higher metastable state. By means of laser spectroscopy the absorption spectrum of the metastable tracer gas is sampled in an optical measuring section, whereby the presence of tracer gas is detected.
Claims5
A leak detector with optical tracer gas recognition, comprising:
- a cell with a tracer gas inlet comprising a membrane selectively or exclusively permeable to a tracer gas,
- an excitation device in the cell for causing the tracer gas to assume an energetically higher metastable state, and
- an optical measuring section formed by a laser and a photo detector receiving the laser beam,
- wherein the cell comprises an electron source that uses electron impacts to cause the tracer gas to assume the metastable state.
1 more element
A leak detector with optical tracer gas recognition, comprising:
- a cell with a tracer gas inlet comprising a first membrane preferably selectively or exclusively permeable to a tracer gas,
- an excitation device in the cell for causing the tracer gas to assume an energetically higher metastable state, and
- an optical measuring section formed by a laser and a photo detector receiving the laser beam,
- wherein the cell additionally comprises a pump connection with a second membrane selectively or exclusively permeable to the tracer gas, wherein the pump connection connects the cell to a pump chamber which in turn is connected to a vacuum pump device.
1 more element
Dependencies are inferred from the claim text.