Substrate accommodating tray pallet
AssigneesSharp Kabushiki Kaisha, Sydek Corporation
InventorsTakenori Yoshizawa, Hideo Taniguchi, Hiroto Shibata
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Abstract
A substrate accommodating tray pallet has a substrate in a horizontal state, includes openings for inserting substrate removal tools for raising the substrate, and is used for transferring substrate accommodating trays which can be vertically stacked, wherein: the substrate accommodating trays are to be mounted on an upper surface; and substrate removal tool insertion openings for inserting the substrate removal tools are positioned so as to oppose openings of the mounted substrate accommodating trays.
Claims12
A substrate accommodating tray pallet having substrate accommodating trays for accommodating substrates on an upper surface and for transferring the substrate accommodating trays, the pallet comprising:
- a plate defining vertically penetrating substrate removal tool insertion openings which allow substrate removal tools to be inserted for removing substrates accommodated in the substrate accommodating trays for removing the substrates from the substrate accommodating tray;
- and
- shutter members slidably fixed to the plate for opening/closing the substrate removal tool insertion openings.
A substrate accommodating tray pallet having substrate accommodating trays for accommodating substrates on an upper surface and for transferring the substrate accommodating trays, the pallet comprising:
- a palette body including vertically penetrating pallet body openings;
- and
- shutter bodies which are located on an upper surface of the palette body that defines shutter body openings located at positions opposing the pallet body openings,
- wherein:
- the pallet body openings and the shutter body openings define substrate removal tool insertion openings for inserting substrate removal tools for removing the substrates accommodated in the substrate accommodating trays, and
- the shutter bodies include shutter members slidably fixed to the upper surface for opening/closing the substrate removal tool insertion openings.
A substrate accommodating tray pallet having substrate accommodating trays for accommodating substrates on an upper surface and for transferring the substrate accommodating trays, the pallet comprising:
- a plate defining vertically penetrating substrate removal tool insertion openings which allow substrate removal tools to be inserted for removing substrates accommodated in the substrate accommodating trays for removing the substrates from the substrate accommodating tray;
- and
- shutter members slidably supported by the plate and opening/closing the substrate removal tool insertion openings.
Dependencies are inferred from the claim text.