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US 8,756,796 B2Granted
Method for producing an electric component
AssigneeEpcos AG
InventorsWerner Ruile, Markus Hauser, Christoph Eggs, Hans-Peter Kirschner
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Abstract
A method for producing an electric component including a dielectric layer on a substrate, includes the method steps of applying a metallic layer to the substrate and oxidizing the metallic layer to form a dielectric layer, wherein at least one partial region of the metallic layer is fully oxidized through the entire thickness of the layer.
Claims20
A method for producing an electric component, the method comprising:
- providing a substrate for an electroacoustic component;
- forming an electrically conductive layer over the substrate;
- structuring the electrically conductive layer;
- forming an electrically nonconductive layer over the structured electrically conductive layer;
- forming a base metallization over the electrically nonconductive layer;
- thickening the base metallization using an electrolytic process thereby forming a metallic layer;
- and
- oxidizing at least portions of the metallic layer thereby forming a dielectric layer.
5 more elements
Dependencies are inferred from the claim text.