Method for manufacturing a read head having conductive filler in insulated hole through substrate
AssigneeWestern Digital (Fremont), LLC
InventorsMark D. Moravec, Subrata I Gusti Made, Santi Pumkrachang
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Abstract
A method for manufacturing a read head includes the step of depositing a conductive filler into a plurality of holes that extend through a wafer. Each of the holes extends from a wafer top surface to a wafer bottom surface. Each of the holes includes an inner surface that includes an insulative layer. The method further includes the steps of fabricating a read transducer on the wafer top surface, and depositing a plurality of electrically conductive leading connection pads on the wafer bottom surface. The plurality of electrically conductive leading connection pads are in electrical contact with the conductive filler.
Claims7
A method for manufacturing a read head, the method comprising:
- depositing a conductive filler into a plurality of holes that extend through a wafer, each of the holes extending from a wafer top surface to a wafer bottom surface, each of the holes including an inner surface that includes an insulative layer;
- fabricating a read transducer on the wafer top surface;
- depositing a plurality of electrically conductive leading connection pads on the wafer bottom surface, the plurality of electrically conductive leading connection pads being in electrical contact with the conductive filler.
Dependencies are inferred from the claim text.