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US 8,756,550 B2Granted
Method to ensure double patterning technology compliance in standard cells
AssigneeTexas Instruments Incorporated
InventorJames Walter Blatchford
Life of this patent
Estimating the term…
Abstract
An integrated circuit with standard cells with top and bottom metal-1 and metal-2 power rails and with lateral standard cell borders that lie between an outermost vertical dummy poly lead from one standard cell and an adjacent standard cell. A DPT compatible standard cell design rule set. A method of forming an integrated circuit with standard cells constructed using a DPT compatible standard cell design rule set. A method of forming DPT compatible standard cells.
Claims4
A method of forming an integrated circuit, comprising the steps:
- forming a first metal-1 pattern of a metal-1 interconnect layer of a double pattern technology (DPT) process over said integrated circuit, said first metal-1 pattern including first geometries of a first standard cell and first geometries of a second standard cell laterally adjacent to said first standard cell;
- forming a second metal-1 pattern of said metal-1 interconnect layer of said DPT process over said integrated circuit, said second metal-1 pattern including second geometries of said first standard cell and second geometries of said second standard cell;
- forming a first metal-2 pattern of a metal-2 interconnect layer over said metal-1 interconnect layer of said DPT process over said integrated circuit, said first metal-2 pattern including first geometries of said first standard cell and first geometries of said second standard cell abutting said first standard cell;
- and
- forming a second metal-2 pattern of said metal-2 interconnect layer of said DPT process over said integrated circuit, said second metal-2 pattern including second geometries of said first standard cell and second geometries of said second standard cell;
- wherein each of said first standard cell and said second standard cell;
- have cell side boundaries which lie outside an outermost vertical dummy poly lead;
- have a first metal-1 power rail across a top of said standard cells where said first metal-1 power rail traverses a width of each of said standard cells and touches a top boundary and said cell side boundaries;
- have a second metal-1 power rail across a bottom of said standard cells where said second metal-1 power rail traverses said width of each of said standard cells and touches a bottom boundary and said cell side boundaries;
- have DPT compatible metal-1 geometries in an interior of said standard cells where said metal-1 geometries terminate a design rule distance from said outermost vertical dummy poly lead or terminate a design rule distance from said cell side boundary;
- have a first metal-2 power rail across said top of said standard cells where said first metal-2 power rail traverses said width of each of said standard cells and touches said top boundary and said cell side boundaries;
- have a second metal-2 power rail across said bottom of said standard cells where said second metal-2 power rail traverses said width of each of said standard cells and touches a bottom boundary and said cell side boundaries;
- and
- have DPT compatible metal-2 geometries in said interior of said standard cells where said metal-2 geometries terminate a design rule distance from said outermost vertical dummy poly lead or terminate a design rule distance from said cell side boundaries;
- and
- where said cell side boundary of said first standard cell lies between a first outermost vertical dummy poly lead of said first standard cell and a second outermost vertical dummy poly lead of said second standard cell;
- where said first metal-1 power rail across said top of said first standard cell is continuous with said first metal-1 power rail across said top of said second standard cell;
- where said first metal-1 power rail across said bottom of said first standard cell is continuous with said first metal-1 power rail across said bottom of said second standard cell;
- where said first metal-2 power rail across said top of said first standard cell is continuous with said first metal-2 power rail across said top of said second standard cell;
- and
- where said first metal-2 power rail across said bottom of said first standard cell is continuous with said first metal-2 power rail across said bottom of said second standard cell.
18 more elements
Dependencies are inferred from the claim text.