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US 8,755,556 B2Granted
Actuator apparatus with comb-drive component and methods useful for manufacturing and operating same
AssigneeAudio Pixels Ltd.
InventorsYuval Cohen, Shay Kaplan, Daniel Lewin, Alex Sromin, Meir Ben Simon
Life of this patent
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Abstract
Actuator apparatus comprising at least one moving elements, each comprising comb drive apparatus including at least first and second comb elements at least one of which is free to be in motion in a medium, and a controller controlling the motion responsive to an input signal representing a desired sound.
Claims3
An actuation method comprising:
- providing at least one actuator element, each actuator element comprising a comb drive apparatus including a central comb element and a peripheral comb element, the peripheral comb element being disposed peripherally of said central comb element and being free to be in motion in a medium;
- and
- providing at least one flexure that is disposed peripherally outward of said peripheral comb element and from which said peripheral comb element is suspended.
An Actuator apparatus comprising:
- at least one actuator element, each actuator element comprising a comb drive apparatus including:
- a central comb element;
- a peripheral comb element that is disposed peripherally of said central comb element and that is free to be in motion in a medium;
- and
- at least one flexure that is disposed peripherally outward of said peripheral comb element and from which said peripheral comb element is suspended.
2 more elements
Dependencies are inferred from the claim text.