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US 8,753,445 B2Granted
Apparatus for growing high quality silicon single crystal ingot and growing method using the same
AssigneeSiltron Inc.
InventorHyon-Jong Cho
Life of this patent
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Abstract
The invention relates to an apparatus and method for growing a high quality Si single crystal ingot and a Si single crystal ingot and wafer produced thereby. The growth apparatus controls the oxygen concentration of the Si single crystal ingot to various values thereby producing the Si single crystal ingot with high productivity and extremely controlled growth defects.
Claims5
A method for growing a silicon single crystal by the Czochralski method, the method comprising:
- providing a heater installed aside a crucible containing silicon melt, the heater having a narrow cross section or a high resistance in a middle region as a localized heating position;
- and
- adjusting the heater, by changing the localized heating position, so as to supply a maximum heat output to a portion adjacent to a central plane between the bottom face of the crucible and a solid-liquid interface, and to configure a temperature distribution of the silicon melt such that when a temperature of the crucible is measured along an axis in parallel with a longitudinal direction of a single crystal ingot, the temperature of the crucible, from a hottest point, gradually descends toward the bottom face of the crucible and the solid-liquid interface since convection to the hot zone is promoted, thus controlling a quantity of oxygen dissolution from the crucible.
Dependencies are inferred from the claim text.